Works (11)
2004 article
A spectroscopic phase separation study distinguishing between chemical with different degrees of crystallinity in Zr(Hf) silicate alloys
Lucovsky, G., Rayner, G. B., Kang, D., Hinkle, C. L., & Hong, J. G. (2004, September 20). SURFACE SCIENCE, Vol. 566, pp. 772–776.
2004 article
A spectroscopic study distinguishing between chemical phase separation with different degrees of crystallinity in Hf(Zr) silicate alloys
Lucovsky, G., Rayner, G. B., Kang, D., Hinkle, C. L., & Hong, J. G. (2004, July 15). APPLIED SURFACE SCIENCE, Vol. 234, pp. 429–433.
2004 article
Chemical phase separation in Zr silicate alloys: a spectroscopic study distinguishing between chemical phase separation with different degree of micro- and nano-crystallinity
Rayner, G. B., Kang, D., Hinkle, C. L., Hong, J. G., & Lucovsky, G. (2004, April). MICROELECTRONIC ENGINEERING, Vol. 72, pp. 304–309.
2004 article
Chemical phase separation in Zr silicate alloys: a spectroscopic study distinguishing between chemical phase separation with different degrees of micro- and nano-crystallinity
Rayner, G. B., Kang, D., & Lucovsky, G. (2004, June 15). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 338, pp. 151–154.
2003 article
Band offset energies in zirconium silicate Si alloys
Lucovsky, G., Rayner, B., Zhang, Y., Appel, G., & Whitten, J. (2003, June 30). APPLIED SURFACE SCIENCE, Vol. 216, pp. 215–222.
2003 article
Device-quality GaN-dielectric interfaces by 300 degrees C remote plasma processing
Bae, C., Rayner, G. B., & Lucovsky, G. (2003, June 30). APPLIED SURFACE SCIENCE, Vol. 216, pp. 119–123.
2002 journal article
Electronic structure of high-k transition metal oxides and their silicate and aluminate alloys
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(4), 1739–1747.
2002 article
Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 1748–1758.
2001 article
Chemical and physical limits on the performance of metal silicate high-k gate dielectrics
Lucovsky, G., Rayner, G. B., & Johnson, R. S. (2001, July). MICROELECTRONICS RELIABILITY, Vol. 41, pp. 937–945.
2001 journal article
Electronic structure of noncrystalline transition metal silicate and aluminate alloys
APPLIED PHYSICS LETTERS, 79(12), 1775–1777.
2000 journal article
Microscopic model for enhanced dielectric constants in low concentration SiO2-rich noncrystalline Zr and Hf silicate alloys
APPLIED PHYSICS LETTERS, 77(18), 2912–2914.