Works (11)

Updated: July 5th, 2023 16:01

2004 article

A spectroscopic study distinguishing between chemical phase separation with different degrees of crystallinity in Hf(Zr) silicate alloys

Lucovsky, G., Rayner, G. B., Kang, D., Hinkle, C. L., & Hong, J. G. (2004, July 1). Applied Surface Science.

By: G. Lucovsky n, G. Rayner n, D. Kang n, C. Hinkle n & J. Hong n

author keywords: high-k dielectrics; chemical phase separation; nano-crystalline phases
topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Semiconductor materials and interfaces
Source: Web Of Science
Added: August 6, 2018

2004 article

A spectroscopic study distinguishing between chemical phase separation with different degrees of crystallinity in Zr(Hf) silicate alloys

Lucovsky, G., Rayner, G. B., Kang, D., Hinkle, C. L., & Hong, J. G. (2004, June 17). Surface Science.

By: G. Lucovsky n, G. Rayner n, D. Kang n, C. Hinkle n & J. Hong n

author keywords: dielectric phenomena; crystallization; alloys; surface chemical reaction
topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Nuclear materials and radiation effects
Source: Web Of Science
Added: August 6, 2018

2004 article

Chemical phase separation in Zr silicate alloys: a spectroscopic study distinguishing between chemical phase separation with different degree of micro- and nano-crystallinity

Rayner, G. B., Kang, D., Hinkle, C. L., Hong, J. G., & Lucovsky, G. (2004, January 23). Microelectronic Engineering.

By: G. Rayner n, D. Kang n, C. Hinkle n, J. Hong n & G. Lucovsky n

author keywords: high-k dielectrics; chemical phase separation; infrared and X-ray spectroscopy
topics (OpenAlex): Semiconductor materials and devices; Ferroelectric and Piezoelectric Materials; Semiconductor materials and interfaces
Source: Web Of Science
Added: August 6, 2018

2004 article

Chemical phase separation in Zr silicate alloys: a spectroscopic study distinguishing between chemical phase separation with different degrees of micro- and nano-crystallinity

Rayner, G. B., Kang, D., & Lucovsky, G. (2004, April 14). Journal of Non-Crystalline Solids.

By: G. Rayner n, D. Kang n & G. Lucovsky n

topics (OpenAlex): Semiconductor materials and devices; Ferroelectric and Piezoelectric Materials; Semiconductor materials and interfaces
Source: Web Of Science
Added: August 6, 2018

2003 article

Band offset energies in zirconium silicate Si alloys

Lucovsky, G., Rayner, B., Zhang, Y., Appel, G., & Whitten, J. (2003, May 27). Applied Surface Science, Vol. 216, pp. 215–222.

By: G. Lucovsky n, B. Rayner n, Y. Zhang n, G. Appel n & J. Whitten n

author keywords: plasma processing and deposition; Auger electron spectroscopy; X-ray photoelectron spectroscopy; X-ray absorption spectroscopy; zirconium silicate alloys; semiconductor-dielectric band offset energies
topics (OpenAlex): Semiconductor materials and devices; Semiconductor materials and interfaces; Copper Interconnects and Reliability
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2003 article

Device-quality GaN–dielectric interfaces by 300°C remote plasma processing

Bae, C., Rayner, G. B., & Lucovsky, G. (2003, May 27). Applied Surface Science.

By: C. Bae n, G. Rayner n & G. Lucovsky n

author keywords: GaN-dielectric interfaces; surface leaning; subcutaneous oxidation; Ga2O3; SiO2; MOSd devices
topics (OpenAlex): GaN-based semiconductor devices and materials; Semiconductor materials and devices; Ga2O3 and related materials
Source: Web Of Science
Added: August 6, 2018

2002 journal article

Electronic structure of high-k transition metal oxides and their silicate and aluminate alloys

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(4), 1739–1747.

By: G. Lucovsky, Y. Zhang, G. Rayner, G. Appel, H. Ade & J. Whitten

Source: NC State University Libraries
Added: August 6, 2018

2002 article

Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films

Rayner, G. B., Kang, D., Zhang, Y., & Lucovsky, G. (2002, July 1). Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena.

By: G. Rayner n, D. Kang n, Y. Zhang n & G. Lucovsky n

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Catalytic Processes in Materials Science
Source: Web Of Science
Added: August 6, 2018

2001 article

Chemical and physical limits on the performance of metal silicate high-k gate dielectrics

Lucovsky, G., Rayner, G. B., & Johnson, R. S. (2001, July 1). Microelectronics Reliability.

By: G. Lucovsky n, G. Rayner n & R. Johnson n

topics (OpenAlex): Semiconductor materials and devices; Copper Interconnects and Reliability; Semiconductor materials and interfaces
TL;DR: The paper includes results for other high- k oxides, Al 2 O 3 and Ta 2 O 5, and their alloys that relate to the issues addressed in this paper, and in particular help to put the results on the silicate alloys into a better perspective. (via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018

2001 article

Electronic structure of noncrystalline transition metal silicate and aluminate alloys

Lucovsky, G., Rayner, G. B., Kang, D., Appel, G., Johnson, R. S., Zhang, Y., … Whitten, J. L. (2001, September 17). Applied Physics Letters, Vol. 79, pp. 1775–1777.

By: G. Lucovsky n, G. Rayner n, D. Kang n, G. Appel n, R. Johnson n, Y. Zhang n, D. Sayers n, H. Ade n, J. Whitten n

topics (OpenAlex): Semiconductor materials and devices; Semiconductor materials and interfaces; Copper Interconnects and Reliability
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2000 article

Microscopic model for enhanced dielectric constants in low concentration SiO2-rich noncrystalline Zr and Hf silicate alloys

Lucovsky, G., & Rayner, G. B. (2000, October 30). Applied Physics Letters.

By: G. Lucovsky n & G. Rayner n

topics (OpenAlex): Semiconductor materials and devices; Semiconductor materials and interfaces; Integrated Circuits and Semiconductor Failure Analysis
Source: Web Of Science
Added: August 6, 2018

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