@article{king_kern_benjamin_barnak_nemanich_davis_1999, title={Chemical vapor cleaning of 6H-SiC surfaces}, volume={146}, ISSN={["0013-4651"]}, DOI={10.1149/1.1392494}, abstractNote={The techniques (temperature range of study) of in situ thermal desorption (500-1100°C) and chemical vapor cleaning (CVC) via exposure to SiH 4 and/or C 2 H 4 (750-1100°C) have been investigated for preparing 6H SiC [(0001) Si , (0001) C , (1120), and (1010)] surfaces suitable for epitaxial growth of SiC and III-nitride films, and are compared with regard to surface purity, stoichiometry, and structural order. Oxide removal below the detection limits of Auger electron spectroscopy was achieved for all orientations via annealing in 200 L SiH 4 at 850-900°C or 200° lower than necessary by thermal desorption. No non-SiC carbon was detected on the surface by X-ray photoelectron spectroscopy. An approximately one-tenth of a monolayer of oxygen coverage and significant quantities of non-SiC carbon were detected for all 6H-SiC surfaces prepared by thermal desorption. In contrast to the predominantly non-SiC carbon-rich surfaces prepared by thermal desorption, the stoichiometry of the SiC surfaces prepared by CVC could be manipulated from Si-rich to C-rich without non-SiC carbon formation by either extending the SiH 4 exposures or by following with C 2 H 4 exposure. The latter surfaces also had lower concentrations of both oxygen and non-SiC carbon and increased surface order.}, number={9}, journal={JOURNAL OF THE ELECTROCHEMICAL SOCIETY}, author={King, SW and Kern, RS and Benjamin, MC and Barnak, JP and Nemanich, RJ and Davis, RF}, year={1999}, month={Sep}, pages={3448–3454} }
 @article{king_davis_ronning_benjamin_nemanich_1999, title={Valence band discontinuity, surface reconstruction, and chemistry of (0001), (000(1)over-bar), and (1(1)over-bar-00) 2H-AlN/6H-SiC interfaces}, volume={86}, ISSN={["0021-8979"]}, DOI={10.1063/1.371391}, abstractNote={A detailed examination of the valence band discontinuity (ΔEv) formed at the (0001), (0001̄), and (11̄00) interfaces between 2H–AlN and 6H–SiC has been conducted using x-ray and UV photoelectron spectroscopies. The ΔEv was observed to range from 0.6–2.0 eV depending on the growth direction (i.e., AlN on SiC vs SiC on AlN), as well as the crystallographic orientation, cut of the SiC substrate (i.e., on versus off axis), and SiC surface reconstruction and stoichiometry. A ΔEv of 1.4–1.5 eV was observed for AlN grown on (3×3) (0001)Si6H–SiC on-axis substrates; a ΔEv of 0.9–1.0 eV was observed for off-axis substrates with the same surface reconstruction. The values of ΔEv for AlN grown on (√3×√3)R30°(0001) 6H–SiC on-and-off-axis substrates were 1.1–1.2 eV. A larger valence band discontinuity of 1.9–2.0 eV was determined for 3C–SiC grown on (0001) 2H–AlN. Smaller values of ΔEv of 0.6–0.7 and 0.8–0.9 eV were observed for AlN grown on on-axis (0001̄)C and (11̄00)6H–SiC substrates, respectively.}, number={8}, journal={JOURNAL OF APPLIED PHYSICS}, author={King, SW and Davis, RF and Ronning, C and Benjamin, MC and Nemanich, RJ}, year={1999}, month={Oct}, pages={4483–4490} }
 @article{nemanich_baumann_benjamin_english_hartman_sowers_ward_1998, title={Characterization of electron emitting surfaces of diamond and III-V nitrides}, volume={8}, number={4}, journal={Diamond Films and Technology}, author={Nemanich, R. J. and Baumann, P. K. and Benjamin, M. C. and English, S. L. and Hartman, J. D. and Sowers, A. T. and Ward, B. L.}, year={1998}, pages={211–223} }
 @article{king_ronning_davis_benjamin_nemanich_1998, title={Dependence of (0001) GaN/AlN valence band discontinuity on growth temperature and surface reconstruction}, volume={84}, ISSN={["0021-8979"]}, DOI={10.1063/1.368355}, abstractNote={X ray and ultraviolet photoelectron spectroscopies have been used to determine the heterojunction valence band discontinuity at the (0001) GaN/AlN interface. Type I discontinuity values of 0.5±0.2 eV were determined for GaN grown on AlN at 650 °C and 0.8±0.2 eV for GaN grown on AlN at 800 °C. These values are critically evaluated with respect to film quality, the results of other experimental studies, and theory.}, number={4}, journal={JOURNAL OF APPLIED PHYSICS}, author={King, SW and Ronning, C and Davis, RF and Benjamin, MC and Nemanich, RJ}, year={1998}, month={Aug}, pages={2086–2090} }
 @article{nemanich_baumann_benjamin_nam_sowers_ward_ade_davis_1998, title={Electron emission properties of crystalline diamond and III-nitride surfaces}, volume={130}, ISSN={["0169-4332"]}, DOI={10.1016/s0169-4332(98)00140-8}, abstractNote={Wide bandgap semiconductors have the possibility of exhibiting a negative electron affinity (NEA) meaning that electrons in the conduction band are not bound by the surface. The surface conditions are shown to be of critical importance in obtaining a negative electron affinity. UV-photoelectron spectroscopy can be used to distinguish and explore the effect. Surface terminations of molecular adsorbates and metals are shown to induce an NEA on diamond. Furthermore, a NEA has been established for epitaxial AlN and AlGaN on 6H–SiC. Field emission measurements from flat surfaces of p-type diamond and AlN are similar, but it is shown that the mechanisms may be quite different. The measurements support the recent suggestions that field emission from p-type diamond originates from the valence band while for AlN on SiC, the field emission results indicate emission from the AlN conduction band. We also report PEEM (photo-electron emission microscopy) and FEEM (field electron emission microscopy) images of an array of nitride emitters.}, number={1998 June}, journal={APPLIED SURFACE SCIENCE}, author={Nemanich, RJ and Baumann, PK and Benjamin, MC and Nam, OH and Sowers, AT and Ward, BL and Ade, H and Davis, RF}, year={1998}, month={Jun}, pages={694–703} }