@article{gonzalez_da silva_griffis_russell_2002, title={Improvements in focused ion beam micromachining of interconnect materials}, volume={20}, DOI={10.1116/1.1515310}, number={6}, journal={Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures}, author={Gonzalez, J. C. and Da Silva, M. I. N. and Griffis, D. P. and Russell, P. E.}, year={2002}, pages={2700–2704} }
 @article{gonzalez_griffis_miau_russell_2001, title={Chemically enhanced focused ion beam micromachining of copper}, volume={19}, DOI={10.1116/1.1418406}, number={6}, journal={Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures}, author={Gonzalez, J. C. and Griffis, D. P. and Miau, T. T. and Russell, P. E.}, year={2001}, pages={2539–2542} }