2002 article

Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 507–511.

By: R. Loesing, G. Guryanov, M. Phillips & D. Griffis

Source: Web Of Science
Added: August 6, 2018