Michael S. Phillips

Works (1)

Updated: July 5th, 2023 16:00

2002 article

Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 507–511.

By: R. Loesing n, G. Guryanov n, M. Phillips n & D. Griffis n

Source: Web Of Science
Added: August 6, 2018

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