2002 journal article

Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(2), 507–511.

By: R. Loesing, G. Guryanov, M. Phillips & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018