Charles C. Fulton

Low energy electron-excited nanoscale luminescence spectroscopy studies of intrinsic defects in HfO2 and SiO2-HfO2-SiO2-Si stacks

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 26(1), 232–243.

Local bonding analysis of the valence and conduction band features of TiO2

Fleming, L., Fulton, C. C., Lucovsky, G., Rowe, J. E., Ulrich, M. D., & Lüning, J. (2007, August 1). Journal of Applied Physics.

Electronic properties of the Zr–ZrO2–SiO2–Si(100) gate stack structure

Fulton, C. C., Lucovsky, G., & Nemanich, R. J. (2006, March 15). Journal of Applied Physics.

Intrinsic nanocrystalline grain-boundary and oxygen atom vacancy defects in ZrO2 and HfO2

Lucovsky, G., Hinkle, C. L., Fulton, C. C., Stoute, N. A., Seo, H., & Lüning, J. (2006, October 18). Radiation Physics and Chemistry.

Publisher’s Note: “Thermal stability of TiO2, ZrO2, or HfO2 on Si(100) by photoelectron emission microscopy” [J. Appl. Phys. 99, 023519 (2006)]

Zeman, M. C., Fulton, C. C., Lucovsky, G., Nemanich, R. J., & Yang, W.-C. (2006, May 15). Journal of Applied Physics.

Suppression of Jahn–Teller term-split band edge states in the x-ray absorption spectra of non-crystalline Zr silicates and Si oxynitride alloys, and alloys of ZrO2 with Y2O3

Lucovsky, G., Fulton, C. C., Ju, B. S., Stoute, N. A., Tao, S., Aspnes, D. E., & Lüning, J. (2006, July 19). Radiation Physics and Chemistry, Vol. 76, p. 907.

Thermal stability of TiO2, ZrO2, or HfO2 on Si(100) by photoelectron emission microscopy

Zeman, M. C., Fulton, C. C., Lucovsky, G., Nemanich, R. J., & Yang, W.-C. (2006, January 15). Journal of Applied Physics.

Conduction band states of transition metal (TM) high-k gate dielectrics as determined from X-ray absorption spectra

Lucovsky, G., Hong, J. G., Fulton, C. C., Stoute, N. A., Zou, Y., Nemanich, R. J., … Schlom, D. G. (2005, February 17). Microelectronics Reliability, Vol. 45, pp. 827–830.

Conduction band-edge States associated with the removal of d-state degeneracies by the Jahn-Teller effect

Lucovsky, G., Fulton, C. C., Zhang, Y., Zou, Y., Luning, J., Edge, L. F., … Rogers, B. R. (2005, March 1). IEEE Transactions on Device and Materials Reliability, Vol. 5, pp. 65–83.

Conduction band-edge d-states in high-k dielectrics due to Jahn–Teller term splittings

Lucovsky, G., Fulton, C. C., Zhang, Y., Luning, J., Edge, L., Whitten, J. L., … Afanase'v, V. V. (2005, May 12). Thin Solid Films, Vol. 486, pp. 129–135.

Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys: comparisons between experiment and ab initio calculations

Lucovsky, G., Zhang, Y., Fulton, C. C., Zou, Y., Nemanich, R. J., Ade, H., & Whitten, J. L. (2005, March 15). Journal of Electron Spectroscopy and Related Phenomena, Vol. 144, pp. 917–919.

Structural, microstructural, and electrical properties of gold films and Schottky contacts on remote plasma-cleaned, n-type ZnO{0001} surfaces

Coppa, B. J., Fulton, C. C., Kiesel, S. M., Davis, R. F., Pandarinath, C., Burnette, J. E., … Smith, D. J. (2005, May 5). Journal of Applied Physics.

Studies of the coupling of final d*-states in mixed Hf and Ti oxides (HfO2)x(TiOx)1−x and other complex oxides

Fulton, C. C., Lucovsky, G., Zhang, Y., Zou, Y., Nemanich, R. J., Ade, H., & Whitten, J. L. (2005, April 21). Journal of Electron Spectroscopy and Related Phenomena, Vol. 144, pp. 913–916.

In situ cleaning and characterization of oxygen- and zinc-terminated, n-type, ZnO{0001} surfaces

Coppa, B. J., Fulton, C. C., Hartlieb, P. J., Davis, R. F., Rodriguez, B. J., Shields, B. J., & Nemanich, R. J. (2004, April 29). Journal of Applied Physics.

A novel approach for determining the effective tunneling mass of electrons in HfO2 and other high-K alternative gate dielectrics for advanced CMOS devices

Hinkle, C. L., Fulton, C., Nemanich, R. J., & Lucovsky, G. (2004, January 22). Microelectronic Engineering.

Enhanced tunneling in stacked gate dielectrics with ultra-thin HfO2 (ZrO2) layers sandwiched between thicker SiO2 layers

Hinkle, C. L., Fulton, C., Nemanich, R. J., & Lucovsky, G. (2004, June 18). Surface Science.

Enhanced tunneling in stacked gate dielectrics with ultra-thin HfO2 layers sandwiched between thicker SiO2 layers

Interface instabilities and electronic properties of ZrO2 on silicon (100)

Fulton, C. C., Cook, T. E., Lucovsky, G., & Nemanich, R. J. (2004, September 1). Journal of Applied Physics.

Process-dependent band structure changes of transition-metal (Ti,Zr,Hf) oxides on Si (100)

Fulton, C. C., Lucovsky, G., & Nemanich, R. J. (2004, January 25). Applied Physics Letters.

Spectroscopic studies of metal high‐k dielectrics: transition metal oxides and silicates, and complex rare earth/transition metal oxides

Lucovsky, G., Hong, J. G., Fulton, C. C., Zou, Y., Nemanich, R. J., Ade, H., … Freeouf, J. L. (2004, July 23). Physica Status Solidi (b), Vol. 241, pp. 2221–2235.

X-ray absorption spectra for transition metal high-κ dielectrics: Final state differences for intra- and inter-atomic transitions

Lucovsky, G., Hong, J. G., Fulton, C. C., Zou, Y., Nemanich, R. J., & Ade, H. (2004, July 1). Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, Vol. 22, pp. 2132–2138.

Band offset measurements of the GaN (0001)/HfO2 interface

Band offset measurements of the Si3N4/GaN (0001) interface

Cook, T. E., Fulton, C. C., Mecouch, W. J., Davis, R. F., Lucovsky, G., & Nemanich, R. J. (2003, September 15). Journal of Applied Physics.

Electronic structure of transition metal high-k dielectrics: interfacial band offset energies for microelectronic devices

Lucovsky, G., Rayner, G. B., Zhang, Y., Fulton, C. C., Nemanich, R. J., Appel, G., … Whitten, J. L. (2003, March 4). Applied Surface Science, Vol. 212, pp. 563–569.

Measurement of the band offsets of SiO2 on clean n- and p-type GaN(0001)

Cook, T. E., Fulton, C. C., Mecouch, W. J., Tracy, K. M., Davis, R. F., Hurt, E. H., … Nemanich, R. J. (2003, March 27). Journal of Applied Physics.

Electronic states at the interface of Ti–Si oxide on Si(100)

Fulton, C. C., Lucovsky, G., & Nemanich, R. J. (2002, July 1). Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena.