Works (3)
1998 journal article
Combined MOS/EBIC and TEM study of electrically active defects in SOI wafers
Diffusion and Defect Data. [Pt. B], Solid State Phenomena, 63-4(1998), 61–67.
1997 journal article
Gettering of iron in silicon-on-insulator wafers
APPLIED PHYSICS LETTERS, 71(8), 1107–1109.
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1997 journal article
Metallic impurity gettering and secondary defect formation in megaelectron volt self-implanted Czochralski and float-zone silicon
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 144(8), 2872–2881.
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