@article{bachmann_banks_hopfner_kepler_lesure_mccall_scroggs_1999, title={Optimal design of a high pressure organometallic chemical vapor deposition reactor}, volume={29}, ISSN={["0895-7177"]}, DOI={10.1016/S0895-7177(99)00071-0}, abstractNote={A team composed of material scientists, physicists, and applied mathematicians have used computer simulations as a fundamental design tool in developing a new prototype High Pressure Organometallic Chemical Vapor Deposition (HPOMCVD) reactor for use in thin film crystal growth. Early design of the HPOMCVD reactor dramatically evolved long before any physical reactor was built. This effort offers a strong endorsement of such multidisciplinary, computationally based modeling teams in the design of new products in areas of emerging technologies where heretofore extensive and costly experimental design was the central paradigm.}, number={8}, journal={MATHEMATICAL AND COMPUTER MODELLING}, author={Bachmann, KJ and Banks, HT and Hopfner, C and Kepler, GM and LeSure, S and McCall, SD and Scroggs, JS}, year={1999}, month={Apr}, pages={65–80} }
 @article{bachmann_sukidi_hopfner_harris_dietz_tran_beeler_ito_banks_1998, title={Real-time monitoring of steady-state pulsed chemical beam epitaxy by p-polarized reflectance}, volume={183}, ISSN={["0022-0248"]}, DOI={10.1016/s0022-0248(97)00410-7}, abstractNote={The structure in the p-polarized reflectance (PR) intensity Rp4(t) - observed under conditions of pulsed chemical beam epitaxy (PCBE) - is modeled on the basis of the four-layer stack: ambient/surface reaction layer (SRL)/epilayer/substrate. Linearization of the PR intensity with regard to the phase factor associated with the SRL results in a good approximation that can be expressed as Rp4 = Rp3 + ΔRp.Rp3 is the reflectivity of the three-layer stack ambient-epilayer-substrate. ΔRp describes the properties of the SRL. An explicit relation is derived between ΔRp(t) and the time-dependent surface concentrations ch(t) (h = 1, 2, …, N) of the constituents of the SRL, which holds for conditions of submonolayer coverage of the surface by source vapor molecules. Under conditions of low temperature PCBE at high flux, the SRL is expected to exhibit nonideal behavior, mandating replacement of the surface concentrations by activities. Also, in this case, the thickness of the SRL must be represented in terms of partial molar volumina Vh. Since the relation between ΔRp(t) and the activities of reactants, intermediates and products of the chemical reactions driving heteroepitaxial growth is non-linear, the extraction of kinetic parameters from the measured time dependence of the PR signal generally requires numerical modeling.}, number={3}, journal={JOURNAL OF CRYSTAL GROWTH}, author={Bachmann, KJ and Sukidi, N and Hopfner, C and Harris, C and Dietz, N and Tran, HT and Beeler, S and Ito, K and Banks, HT}, year={1998}, month={Jan}, pages={323–337} }
 @article{kepler_hopfner_scroggs_bachmann_1998, title={Simulation of a vertical reactor for high pressure organometallic chemical vapor deposition}, volume={57}, ISSN={["0921-5107"]}, DOI={10.1016/s0921-5107(98)00256-6}, abstractNote={The suitability of a vertical cylindrical reactor with highly constrained radial flow from a central gas injection port past a set of heated substrate wafers that are embedded in the top channel wall has been evaluated in the context of organometallic chemical vapor deposition (OMCVD) at elevated pressure. Numerical simulations showed that, in addition to the limitation on the channel height necessary for preventing buoyancy driven recirculation, negotiating the ninety-degree bend at the inlet is problematic and also constrains the channel height below a critical value, at which the radial flow area after the inlet bend is equal to the cross-sectional area of the central gas injection port. Restricting the channel height poses the danger of heating of the channel wall opposite to the substrate wafers causing potential problems with deposition of decomposition products and competitive polycrystalline film growth at this location. These problems can be avoided by actively cooling the channel wall opposite to the substrate and by keeping the retention time of the source vapor molecules and fragments thereof in the wafer location below a critical value.}, number={1}, journal={MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY}, author={Kepler, GM and Hopfner, C and Scroggs, JS and Bachmann, KJ}, year={1998}, month={Dec}, pages={9–17} }
 @article{bachmann_hopfner_sukidi_miller_harris_aspnes_dietz_tran_beeler_ito_et al._1997, title={Molecular layer epitaxy by real-time optical process monitoring}, volume={112}, DOI={10.1016/S0169-4332(96)00975-0}, abstractNote={In this paper we consider modern methods of optical process monitoring and control in the context of atomic layer epitaxy. One specific method, p-polarized reflectance spectroscopy (PRS), is chosen to assess details of layer-by-layer growth. We show that PRS monitoring under conditions of steady-state growth by pulsed chemical beam epitaxy (PCBE) can achieve the deposition of molecular layers of GaP on silicon (100) deposited with a precision of 5%, which can be improved by reducing the growth rate and increasing the period of time averaging of the reflectance data. Since in the nucleation period prior to formation of a contiguous heteroepitaxial film inhomogeneous surface chemistry and roughening complicates the modeling of the overgrowth process, advances in both experimental methods and theory are required for extending the control to non-steady-state growth conditions. Results of simultaneous single-wavelength PR monitoring and laser light scattering measurements in conjunction with atomic force microscopy studies of short period heteroepitaxial overgrowth processes are presented. The extension of PRS to the monitoring of organometallic chemical vapor deposition at higher pressures is also discussed.}, number={1997 Mar.}, journal={Applied Surface Science}, author={Bachmann, K. J. and Hopfner, C. and Sukidi, N. and Miller, A. E. and Harris, C. J. and Aspnes, D. E. and Dietz, N. A. and Tran, Hien and Beeler, S. C. and Ito, K. and et al.}, year={1997}, pages={38–47} }