@article{reddy_washiyama_mecouch_hernandez-balderrama_kaess_breckenridge_sarkar_haidet_franke_kohn_et al._2018, title={Plasma enhanced chemical vapor deposition of SiO2 and SiNx on AlGaN: Band offsets and interface studies as a function of Al composition}, volume={36}, ISSN={["1520-8559"]}, DOI={10.1116/1.5050501}, abstractNote={In this work, the authors characterized the interface of plasma enhanced chemical vapor deposition (PECVD) dielectrics, SiO2 and SiNx with AlGaN as a function of Al composition. SiO2 is found to exhibit type I straddled band alignment with positive conduction and valence band offsets for all Al compositions. However, the interface Fermi level is found to be pinned within the bandgap, indicating a significant density of interface states. Hence, SiO2 is found to be suitable for insulating layers or electrical isolation on AlGaN with breakdown fields between 4.5 and 6.5 MV cm−1, but an additional passivating interlayer between SiO2 and AlGaN is necessary for passivation on Al-rich AlGaN. In contrast, Si-rich PECVD SiNx is found to exhibit type II staggered band alignment with positive conduction band offsets and negative valence band offsets for Al compositions <40% and type I straddled band alignment with negative conduction and valence band offsets for Al compositions >40% and is, hence, found to be unsuitable for insulating layers or electrical isolation on Al-rich AlGaN in general. In contrast to passivating stoichiometric LPCVD Si3N4, no evidence for interface state reduction by depositing SiNx on AlGaN is observed.}, number={6}, journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A}, author={Reddy, Pramod and Washiyama, Shun and Mecouch, Will and Hernandez-Balderrama, Luis H. and Kaess, Felix and Breckenridge, M. Hayden and Sarkar, Biplab and Haidet, Brian B. and Franke, Alexander and Kohn, Erhard and et al.}, year={2018}, month={Nov} }
 @article{majkic_franke_kirste_schlesser_collazo_sitar_zgonik_2017, title={Optical nonlinear and electro-optical coefficients in bulk aluminium nitride single crystals}, volume={254}, ISSN={["1521-3951"]}, DOI={10.1002/pssb.201700077}, abstractNote={Bulk aluminium nitride single crystals grown by physical vapour transport were characterised for their nonlinear optical properties. The two independent nonzero optical nonlinear coefficients were determined by the Maker Fringe method, with a LiNbO3 plate as a reference. At a wavelength of 1030 nm, the measured coefficient |d33| = (4.3 ± 0.3) pm V−1 and |d31| = |d33|/(45 ± 5). Michelson interferometer was used to measure two unclamped electro‐optic coefficients to give r33 = (1.16 ± 0.13) pm V−1 and r13 = (0.11 ± 0.02) pm V−1 at a wavelength of 633 nm. By calculating the dispersion relation for d33, we show that AlN is a very promising material for quasi phase‐matched frequency conversion into UV.}, number={9}, journal={PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS}, author={Majkic, Aleksej and Franke, Alexander and Kirste, Ronny and Schlesser, Raoul and Collazo, Ramon and Sitar, Zlatko and Zgonik, Marko}, year={2017}, month={Sep} }
 @article{kaess_mita_xie_reddy_klump_hernandez-balderrama_washiyama_franke_kirste_hoffmann_et al._2016, title={Correlation between mobility collapse and carbon impurities in Si-doped GaN grown by low pressure metalorganic chemical vapor deposition}, volume={120}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/1.4962017}, DOI={10.1063/1.4962017}, abstractNote={In the low doping range below 1 × 1017 cm−3, carbon was identified as the main defect attributing to the sudden reduction of the electron mobility, the electron mobility collapse, in n-type GaN grown by low pressure metalorganic chemical vapor deposition. Secondary ion mass spectroscopy has been performed in conjunction with C concentration and the thermodynamic Ga supersaturation model. By controlling the ammonia flow rate, the input partial pressure of Ga precursor, and the diluent gas within the Ga supersaturation model, the C concentration in Si-doped GaN was controllable from 6 × 1019 cm−3 to values as low as 2 × 1015 cm−3. It was found that the electron mobility collapsed as a function of free carrier concentration, once the Si concentration closely approached the C concentration. Lowering the C concentration to the order of 1015 cm−3 by optimizing Ga supersaturation achieved controllable free carrier concentrations down to 5 × 1015 cm−3 with a peak electron mobility of 820 cm2/V s without observing the mobility collapse. The highest electron mobility of 1170 cm2/V s was obtained even in metalorganic vapor deposition-grown GaN on sapphire substrates by optimizing growth parameters in terms of Ga supersaturation to reduce the C concentration.}, number={10}, journal={JOURNAL OF APPLIED PHYSICS}, publisher={AIP Publishing}, author={Kaess, Felix and Mita, Seiji and Xie, Jingqiao and Reddy, Pramod and Klump, Andrew and Hernandez-Balderrama, Luis H. and Washiyama, Shun and Franke, Alexander and Kirste, Ronny and Hoffmann, Axel and et al.}, year={2016}, month={Sep} }
 @article{alden_guo_kirste_kaess_bryan_troha_bagal_reddy_hernandez-balderrama_franke_et al._2016, title={Fabrication and structural properties of AlN submicron periodic lateral polar structures and waveguides for UV-C applications}, volume={108}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/1.4955033}, DOI={10.1063/1.4955033}, abstractNote={Periodically poled AlN thin films with submicron domain widths were fabricated for nonlinear applications in the UV-VIS region. A procedure utilizing metalorganic chemical vapor deposition growth of AlN in combination with laser interference lithography was developed for making a nanoscale lateral polarity structure (LPS) with domain size down to 600 nm. The Al-polar and N-polar domains were identified by wet etching the periodic LPS in a potassium hydroxide solution and subsequent scanning electron microscopy (SEM) characterization. Fully coalesced and well-defined vertical interfaces between the adjacent domains were established by cross-sectional SEM. AlN LPSs were mechanically polished and surface roughness with a root mean square value of ∼10 nm over a 90 μm × 90 μm area was achieved. 3.8 μm wide and 650 nm thick AlN LPS waveguides were fabricated. The achieved domain sizes, surface roughness, and waveguides are suitable for second harmonic generation in the UVC spectrum.}, number={26}, journal={APPLIED PHYSICS LETTERS}, publisher={AIP Publishing}, author={Alden, D. and Guo, W. and Kirste, R. and Kaess, F. and Bryan, I. and Troha, T. and Bagal, A. and Reddy, P. and Hernandez-Balderrama, Luis H. and Franke, A. and et al.}, year={2016}, month={Jun} }
 @article{franke_hoffmann_kirste_bobea_tweedie_kaess_gerhold_collazo_sitar_2016, title={High reflectivity III-nitride UV-C distributed Bragg reflectors for vertical cavity emitting lasers}, volume={120}, ISSN={["1089-7550"]}, DOI={10.1063/1.4963831}, abstractNote={UV-C distributed Bragg reflectors (DBRs) for vertical cavity surface emitting laser applications and polariton lasers are presented. The structural integrity of up to 25 layer pairs of AlN/Al0.65Ga0.35N DBRs is maintained by balancing the tensile and compressive strain present between the single layers of the multilayer stack grown on top of an Al0.85Ga0.35N template. By comparing the structural and optical properties for DBRs grown on low dislocation density AlN and AlGaN templates, the criteria for plastic relaxation by cracking thick nitride Bragg reflectors are deduced. The critical thickness is found to be limited mainly by the accumulated strain energy during the DBR growth and is only negligibly affected by the dislocations. A reflectance of 97.7% at 273 nm is demonstrated. The demonstrated optical quality and an ability to tune the resonance wavelength of our resonators and microcavity structures open new opportunities for UV-C vertical emitters.}, number={13}, journal={JOURNAL OF APPLIED PHYSICS}, author={Franke, A. and Hoffmann, M. P. and Kirste, R. and Bobea, M. and Tweedie, J. and Kaess, F. and Gerhold, M. and Collazo, R. and Sitar, Z.}, year={2016}, month={Oct} }
 @article{reddy_washiyama_kaess_breckenridge_hernandez-balderrama_haidet_alden_franke_sarkar_kohn_et al._2016, title={High temperature and low pressure chemical vapor deposition of silicon nitride on AlGaN: Band offsets and passivation studies}, volume={119}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/1.4945775}, DOI={10.1063/1.4945775}, abstractNote={In this work, we employed X-ray photoelectron spectroscopy to determine the band offsets and interface Fermi level at the heterojunction formed by stoichiometric silicon nitride deposited on AlxGa1-xN (of varying Al composition “x”) via low pressure chemical vapor deposition. Silicon nitride is found to form a type II staggered band alignment with AlGaN for all Al compositions (0 ≤ x ≤ 1) and present an electron barrier into AlGaN even at higher Al compositions, where Eg(AlGaN) > Eg(Si3N4). Further, no band bending is observed in AlGaN for x ≤ 0.6 and a reduced band bending (by ∼1 eV in comparison to that at free surface) is observed for x > 0.6. The Fermi level in silicon nitride is found to be at 3 eV with respect to its valence band, which is likely due to silicon (≡Si0/−1) dangling bonds. The presence of band bending for x > 0.6 is seen as a likely consequence of Fermi level alignment at Si3N4/AlGaN hetero-interface and not due to interface states. Photoelectron spectroscopy results are corroborated by current-voltage-temperature and capacitance-voltage measurements. A shift in the interface Fermi level (before band bending at equilibrium) from the conduction band in Si3N4/n-GaN to the valence band in Si3N4/p-GaN is observed, which strongly indicates a reduction in mid-gap interface states. Hence, stoichiometric silicon nitride is found to be a feasible passivation and dielectric insulation material for AlGaN at any composition.}, number={14}, journal={JOURNAL OF APPLIED PHYSICS}, publisher={AIP Publishing}, author={Reddy, Pramod and Washiyama, Shun and Kaess, Felix and Breckenridge, M. Hayden and Hernandez-Balderrama, Luis H. and Haidet, Brian B. and Alden, Dorian and Franke, Alexander and Sarkar, Biplab and Kohn, Erhard and et al.}, year={2016}, month={Apr} }
 @article{berg_franke_kirste_collazo_ivanisevic_2016, title={Photoluminescence changes of III-Nitride lateral polarity structures after chemical functionalization}, volume={3}, ISSN={["2053-1591"]}, DOI={10.1088/2053-1591/3/12/125906}, abstractNote={The photoluminescence changes of a III-Nitride semiconductor with various surface topographies were studied after chemical functionalization. AlxGa1−xN with a composition of 70% aluminum was used and the surfaces were functionalized with a fluorophore dye-terminated peptide using a linker molecule. The stability of the wafers in water was studied using inductively coupled plasma mass spectrometry prior to modifying the material. The leaching data demonstrated that the AlGaN material in highly stable in biological conditions over 7 d. The attachment of the dye to the wafer was investigated using x-ray photoelectron spectroscopy and photoluminescence spectroscopy (PL). The PL spectrum showed a clear signature of the dye with a pronounced emission peak at approximately 260 nm, indicating a successful attachment to the surface.}, number={12}, journal={MATERIALS RESEARCH EXPRESS}, author={Berg, Nora G. and Franke, Alexander and Kirste, Ronny and Collazo, Ramon and Ivanisevic, Albena}, year={2016}, month={Dec} }
 @article{franke_hoffmann_hernandez-balderrama_kaess_bryan_washiyama_bobea_tweedie_kirste_gerhold_et al._2016, title={Strain engineered high reflectivity DBRs in the deep UV}, volume={9748}, ISSN={["1996-756X"]}, DOI={10.1117/12.2211700}, abstractNote={The maximum achievable reflectivity of current III-nitride Bragg reflectors in the UV-C spectral range is limited due to plastic relaxation of thick multilayer structures. Cracking due to a large mismatch of the thermal expansion and lattice constants between AlxGa1-xN/AlyGa1-yN alloys of different composition and the substrate at the heterointerface is the common failure mode. Strain engineering and strain relaxation concepts by the growth on a strain reduced Al0.85Ga0.15N template and the implementation of low temperature interlayers is demonstrated. A significant enhancement of the maximum reflectivity above 97% at a resonance wavelength of 270 nm due to an increase of the critical thickness of our AlN/Al0.65Ga0.35N DBRs to 1.45 μm (25.5 pairs) prove their potential. By comparing the growth of identical Bragg reflectors on different pseudo-templates, the accumulated mismatch strain energy in the DBR, not the dislocation density provided by the template/substrate, was identified to limit the critical thickness. To further enhance the reflectivity low temperature interlays were implemented into the DBR to partially relief the misfit strain. Relaxation is enabled by the nucleation of small surface domains facilitating misfit dislocation injection and glide. Detailed structural and optical investigations will be conducted to prove the influence of the LT-AlN interlayers on the strain state, structural integrity and reflectivity properties. Coherent growth and no structural and optical degradation of the Bragg mirror properties was observed proving the fully applicability of the relaxation concept to fabricate thick high reflectivity DBR and vertical cavity laser structures.}, journal={GALLIUM NITRIDE MATERIALS AND DEVICES XI}, author={Franke, A. and Hoffmann, P. and Hernandez-Balderrama, L. and Kaess, F. and Bryan, I. and Washiyama, S. and Bobea, M. and Tweedie, J. and Kirste, R. and Gerhold, M. and et al.}, year={2016} }
 @article{kaess_reddy_alden_klump_hernandez-balderrama_franke_kirste_hoffmann_collazo_sitar_et al._2016, title={The effect of illumination power density on carbon defect configuration in silicon doped GaN}, volume={120}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/1.4972468}, DOI={10.1063/1.4972468}, abstractNote={A study of efficacy of point defect reduction via Fermi level control during growth of GaN:Si as a function of above bandgap illumination power density and hence excess minority carrier density is presented. Electrical characterization revealed an almost two-fold increase in carrier concentration and a three-fold increase in mobility by increasing the illumination power density from 0 to 1 W cm−2, corroborating a decrease in compensation and ionic impurity scattering. The effect was further supported by the photoluminescence studies, which showed a monotonic decrease in yellow luminescence (attributed to CN) as a function of illumination power density. Secondary ion mass spectroscopy studies showed no effect of illumination on the total incorporation of Si or C. Thus, it is concluded that Fermi level management changed the configuration of the C impurity as the CN−1 configuration became energetically less favorable due to excess minority carriers.}, number={23}, journal={JOURNAL OF APPLIED PHYSICS}, publisher={AIP Publishing}, author={Kaess, Felix and Reddy, Pramod and Alden, Dorian and Klump, Andrew and Hernandez-Balderrama, Luis H. and Franke, Alexander and Kirste, Ronny and Hoffmann, Axel and Collazo, Ramón and Sitar, Zlatko and et al.}, year={2016}, month={Dec} }
 @article{majkic_puc_franke_kirste_collazo_sitar_zgonik_2015, title={Optical properties of aluminum nitride single crystals in the THz region}, volume={5}, ISSN={["2159-3930"]}, DOI={10.1364/ome.5.002106}, abstractNote={We report on measurements of the refractive indices and the absorption in bulk single crystals of aluminum nitride, in the region from 1 to 8 THz. The birefringence is approximately 0.2 and is larger than in the optical frequency range. Both indices exhibit normal dispersion with no pronounced absorption resonances. Optical power loss coefficients are approximately 2 cm−1 and 4 cm−1 and the estimated static dielectric constants are 7.84 and 9.22, for the ordinary and extraordinary polarization, respectively.}, number={10}, journal={OPTICAL MATERIALS EXPRESS}, author={Majkic, Aleksej and Puc, Uros and Franke, Alexander and Kirste, Ronny and Collazo, Ramon and Sitar, Zlatko and Zgonik, Marko}, year={2015}, month={Oct}, pages={2106–2111} }