Works (54)

Updated: March 28th, 2024 08:59

2022 journal article

Anelasticity in thin-shell nanolattices

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 119(38).

By: I. Chen*, F. Poblete n, A. Bagal n, Y. Zhu n & C. Chang*

author keywords: anelasticity; 3D nanostructures; nanolattices; nanoindentation
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Web Of Science
Added: January 23, 2023

2022 journal article

Cavity Engineering of Perovskite Distributed Feedback Lasers

ACS Photonics, 9(9), 3124–3133.

By: Q. Dong n, X. Fu n, D. Seyitliyev n, K. Darabi n, J. Mendes n, L. Lei n, Y. Chen*, C. Chang* ...

author keywords: perovskite lasers; distributed feedback lasers; cavity fabrication; cavity engineering
UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID, Crossref
Added: August 19, 2022

2021 journal article

Directional Polarized Light Emission from Thin‐Film Light‐Emitting Diodes

Advanced Materials, 33(9), 2006801.

By: X. Fu n, Y. Mehta n, Y. Chen*, L. Lei n, L. Zhu n, N. Barange n, Q. Dong n, S. Yin n ...

author keywords: beam shaping; organic light-emitting diodes; perovskite light-emitting diodes; polarized light; waveguides
TL;DR: By selectively diffracting the transverse electric (TE) waveguide mode while suppressing other optical modes in a nanostructured LED, the authors demonstrate highly directional light emission from a full-area organic LED with a small divergence angle less than 3° and a TE to transverse magnetic (TM) polarization extinction ratio of 13.6%. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID, Crossref
Added: February 15, 2021

2020 journal article

Active Periodic Magnetic Nanostructures with High Aspect Ratio and Ultrahigh Pillar Density

ACS APPLIED MATERIALS & INTERFACES, 12(9), 11135–11143.

By: Z. Luo n, X. Zhang n, B. Evans* & C. Chang n

author keywords: dynamic materials; active nanostructures; nanofabrication; magnetic nanoparticles; high aspect ratio
TL;DR: Active periodic nanostructures with pillar density of 0.25 pillar/μm^2 are demonstrated, which is the highest density for magnetically actuated pillars so far, and can find potential applications in particle manipulation and tunable photonic elements. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: March 30, 2020

2020 journal article

Efficient Energy Funneling in Quasi-2D Perovskites: From Light Emission to Lasing

ADVANCED MATERIALS, 32(16).

By: L. Lei n, D. Seyitliyev n, S. Stuard n, J. Mendes n, Q. Dong n, X. Fu n, Y. Chen n, S. He n ...

author keywords: amplified spontaneous emission; distributed-feedback lasers; energy funneling; light-emitting diodes; quasi-2D perovskites
TL;DR: The results show that it is important to control the morphology of the quasi-2D films to achieve efficient energy transfer, which is a critical requirement for light-emitting devices. (via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (Web of Science; OpenAlex)
Sources: Web Of Science, ORCID
Added: March 16, 2020

2020 journal article

Mode Dispersion in Photonic Crystal Organic Light-Emitting Diodes

ACS APPLIED ELECTRONIC MATERIALS, 2(6), 1759–1767.

By: X. Fu n, C. Peng n, M. Samal n, N. Barange n, Y. Chen*, D. Shin n, Y. Mehta n, A. Rozelle n, C. Chang*, F. So n

author keywords: OLED; photonic crystal; optical modes; photonic band gap; light extraction
UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID
Added: July 20, 2020

2020 journal article

Multi-layered domain morphology in relaxor single crystals with nano-patterned composite electrode

ACTA MATERIALIA, 182, 10–17.

author keywords: Piezoelectricity; Domain engineering; Single crystal; Piezoresponse force microscopy (PFM); Ferroelectric relaxor
Source: Web Of Science
Added: December 30, 2019

2020 journal article

Recovering cavity effects in corrugated organic light emitting diodes

OPTICS EXPRESS, 28(21), 32214–32225.

By: X. Fu*, Y. Chen*, D. Shin*, Y. Mehta*, I. Chen*, N. Barange*, L. Zhu*, S. Amoah*, C. Chang*, F. So*

TL;DR: It is found that the cavity effects can be partially recovered using a low index Teflon layer inserted between the ITO anode and the substrate due to the enhancement of the reflectance of the corrugated electrodes. (via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (Web of Science; OpenAlex)
Sources: Web Of Science, ORCID
Added: November 16, 2020

2019 journal article

Enhancing optical transmission of multilayer composites using interfacial nanostructures

JOURNAL OF APPLIED PHYSICS, 126(6).

By: Y. Chen n, S. Naidu n, Z. Luo n & C. Chang n

UN Sustainable Development Goal Categories
Source: Web Of Science
Added: September 3, 2019

2019 journal article

Increasing etching depth of sapphire nanostructures using multilayer etching mask

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 37(6).

By: Y. Chen n, I. Chen n & C. Chang n

UN Sustainable Development Goal Categories
Source: Web Of Science
Added: April 14, 2020

2019 journal article

Magnetically Actuated Dynamic Iridescence Inspired by the Neon Tetra

ACS NANO, 13(4), 4657–4666.

By: Z. Luo n, B. Evans* & C. Chang n

author keywords: dynamic iridescence; neon tetra; structural coloration; ferrofluid; magnetic nanoparticles
TL;DR: In this method, a periodic array of magnetic nanopillars serves as a template to guide the assembly of iron oxide nanoparticles when magnetized in a liquid environment, allowing the structure to tilt about the base when the angle of the applied field is changed. (via Semantic Scholar)
UN Sustainable Development Goal Categories
14. Life Below Water (OpenAlex)
Source: Web Of Science
Added: June 4, 2019

2019 review

Recent progress in near-field nanolithography using light interactions with colloidal particles: from nanospheres to three-dimensional nanostructures

[Review of ]. NANOTECHNOLOGY, 30(35).

By: X. Zhang*, I. Chen n & C. Chang n

author keywords: colloidal particles; self-assembly; nanosphere; 3D nanolithography; 3D nanostructures
TL;DR: This review article will report recent progress in utilizing self-assembly of colloidal particles for nanolithography, outlining the underlying optical effects, review the geometries that can be fabricated, discuss key limitations, and highlight potential applications in nanophotonics, optoelectronic devices, and nanoarchitectured materials. (via Semantic Scholar)
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Source: Web Of Science
Added: July 1, 2019

2018 journal article

Atomic Layer Deposition: Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors (Adv. Mater. Interfaces 22/2018)

Advanced Materials Interfaces, 5(22), 1870109.

By: J. Min n, Y. Chen n, I. Chen n, T. Sun n, D. Lee n, C. Li n, Y. Zhu n, B. O'Connor n, G. Parsons n, C. Chang n

Sources: Crossref, ORCID
Added: January 19, 2020

2018 journal article

Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors

ADVANCED MATERIALS INTERFACES, 5(22).

author keywords: atomic layer deposition; conformal thin films; physical vapor deposition; stretchable electronics
UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID
Added: December 10, 2018

2018 article

Evaluation of Photoacoustic Transduction Efficiency of Candle Soot Nanocomposite Transmitters

Chang, W.-Y., Zhang, X. A., Kim, J., Huang, W., Bagal, A., Chang, C.-H., … Jiang, X. (2018, September). IEEE TRANSACTIONS ON NANOTECHNOLOGY, Vol. 17, pp. 985–993.

By: W. Chang n, X. Zhang n, J. Kim n, W. Huang*, A. Bagal n, C. Chang n, T. Fang n, H. Wu*, X. Jiang n

Contributors: W. Chang n, X. Zhang n, J. Kim n, W. Huang*, A. Bagal n, C. Chang n, T. Fang n, H. Wu*, X. Jiang n

author keywords: Photoacoustic efficiency; FDTD simulation; candle soot; carbon nanoparticles; PDMS; nanocomposite
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, ORCID
Added: October 16, 2018

2018 journal article

Patterned nano-domains in PMN-PT single crystals

Acta Materialia, 143, 166–173.

By: W. Chang n, C. Chung n, Z. Yuan n, C. Chang n, J. Tian*, D. Viehland*, J. Li*, J. Jones n, X. Jiang n

author keywords: Piezoelectricity; Atomic force microscopy (AFM); Diffusion; Nanodomains; Single crystal
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

2018 journal article

Twin photonic nanojets generated from coherent illumination of microscale sphere and cylinder

Nanotechnology, 29(7), 075204.

By: A. Poteet, X. Zhang*, H. Nagai & C. Chang*

author keywords: photonic nanojet; particle scattering; Mie theory; nanolithography
TL;DR: This work investigates the generation of twin photonic nanojets through the illumination of a microsphere or cylinder from two coherent sources with relative phase shift, and finds the width, length, and intensity enhancement factor of the nanojet geometry are found to be functions of the phase, angle offsets, and particle geometry. (via Semantic Scholar)
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, Crossref
Added: August 6, 2018

2017 journal article

Enhanced total internal reflection using low-index nanolattice materials

OPTICS LETTERS, 42(20), 4123–4126.

By: X. Zhang n, Y. Chen n, A. Bagal n & C. Chang n

TL;DR: Enhanced total internal reflection (TIR) induced by integrating robust nanolattice materials with periodic architectures between high-index media is demonstrated. (via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018

2017 journal article

Large-Area Nanolattice Film with Enhanced Modulus, Hardness, and Energy Dissipation

Scientific Reports, 7(1).

By: A. Bagal n, X. Zhang n, R. Shahrin n, E. Dandley n, J. Zhao n, F. Poblete n, C. Oldham n, Y. Zhu n ...

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: Crossref, ORCID, NC State University Libraries
Added: August 6, 2018

2017 journal article

Nanostructured antireflective in-plane solar harvester

OPTICS EXPRESS, 25(16), A840–A850.

By: J. Tippens n, A. Bagal n, X. Zhang n & C. Chang n

TL;DR: The demonstrated solar harvester can be potentially be widely deployed in residential and commercial buildings as multifunctional windows for solar energy harvesting, scavenging, spectra splitting, and anti-glare properties. (via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (Web of Science; OpenAlex)
Source: Web Of Science
Added: August 6, 2018

2017 journal article

Three-dimensional colloidal interference lithography

Nanotechnology, 28(12), 125302.

By: H. Nagai n, A. Poteet n, X. Zhang n & C. Chang n

author keywords: nanolithography; three-dimensional nanostructures; colloids; self-assembly; interference lithography
TL;DR: Through the introduction of single colloidal particles, the fabrication capability of Lloyd's mirror interference can now be extended to fabrication of 3D nanostructure with complex shell geometry, which could find potential applications in the area of photonics, drug delivery, and nanofluidics. (via Semantic Scholar)
Sources: Crossref, Web Of Science
Added: August 6, 2018

2016 journal article

Designing unit cell in three-dimensional periodic nanostructures using colloidal lithography

OPTICS EXPRESS, 24(2), A276–A284.

By: J. Min*, X. Zhang* & C. Chang*

TL;DR: This work investigates the design and control of the unit-cell geometry by examining the relative ratio of the illumination wavelength and colloidal nanosphere diameter, using analytical and finite-difference time-domain (FDTD) modeling. (via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018

2016 journal article

Fabrication and design of metal nano-accordion structures using atomic layer deposition and interference lithography

NANOSCALE, 8(9), 4984–4990.

By: J. Min n, A. Bagal n, J. Mundy n, C. Oldham n, B. Wu*, G. Parsons n, C. Chang n

Contributors: J. Min n, A. Bagal n, J. Mundy n, C. Oldham n, B. Wu*, G. Parsons n, C. Chang n

TL;DR: This study has developed a method to fabricate and control novel complex platinum nanostructures with accordion-like profile using atomic layer deposition on lithographically patterned polymer templates. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID
Added: August 6, 2018

2016 journal article

Fabrication and structural properties of AlN submicron periodic lateral polar structures and waveguides for UV-C applications

APPLIED PHYSICS LETTERS, 108(26).

By: D. Alden n, W. Guo n, R. Kirste*, F. Kaess n, I. Bryan n, T. Troha*, A. Bagal n, P. Reddy n ...

Sources: Web Of Science, ORCID
Added: August 6, 2018

2016 journal article

Wicking Enhancement in Three-Dimensional Hierarchical Nanostructures

LANGMUIR, 32(32), 8029–8033.

By: Z. Wang n, J. Zhao n, A. Bagal n, E. Dandley n, C. Oldham n, T. Fang n, G. Parsons n, C. Chang n

Contributors: Z. Wang n, J. Zhao n, A. Bagal n, E. Dandley n, C. Oldham n, T. Fang n, G. Parsons n, C. Chang n

TL;DR: Enhanced wicking dynamics is demonstrated by using nanostructures with three-dimensional (3D) hierarchical features to increase the surface area while mitigating the obstruction of liquid flow. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID
Added: August 6, 2018

2015 journal article

3D Nanostructures: Sculpting Asymmetric, Hollow-Core, Three-Dimensional Nanostructures Using Colloidal Particles (Small 11/2015)

Small, 11(11), 1226–1226.

By: X. Zhang n, B. Dai n, Z. Xu n & C. Chang n

Source: Crossref
Added: January 19, 2020

2015 journal article

Fabrication of three-dimensional hierarchical nanostructures using template-directed colloidal assembly

NANOSCALE, 7(10), 4406–4410.

By: J. Elek n, X. Zhang n, B. Dai n, Z. Xu n & C. Chang n

TL;DR: Optical effects in template-directed colloidal assembly are explored to fabricate microscale patterns with integrated three-dimensional (3D) nanostructures to enable low-cost fabrication of hierarchical devices. (via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018

2015 journal article

Multifunctional nano-accordion structures for stretchable transparent conductors

MATERIALS HORIZONS, 2(5), 486–494.

By: A. Bagal n, E. Dandley n, J. Zhao n, X. Zhang n, C. Oldham n, G. Parsons n, C. Chang n

Contributors: A. Bagal n, E. Dandley n, J. Zhao n, X. Zhang n, C. Oldham n, G. Parsons n, C. Chang n

UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID
Added: August 6, 2018

2015 journal article

Ordered 3D Thin-Shell Nanolattice Materials with Near-Unity Refractive Indices

ADVANCED FUNCTIONAL MATERIALS, 25(42), 6644–6649.

By: X. Zhang n, A. Bagal n, E. Dandley n, J. Zhao n, C. Oldham n, B. Wu*, G. Parsons n, C. Chang n

Contributors: X. Zhang n, A. Bagal n, E. Dandley n, J. Zhao n, C. Oldham n, B. Wu*, G. Parsons n, C. Chang n

Sources: Web Of Science, ORCID
Added: August 6, 2018

2015 journal article

Sculpting Asymmetric, Hollow-Core, Three-Dimensional Nanostructures Using Colloidal Particles

SMALL, 11(11), 1285–1292.

By: X. Zhang n, B. Dai n, Z. Xu n & C. Chang n

TL;DR: A nanolithography technique is demonstrated based on oblique illuminations of colloidal particles to fabricate hollow-core 3D nanostructures with complex symmetry that has high pattern versatility, is low cost and high throughput, and can find potential application in nanoneedles, nanonozzles, and materials with anisotropic properties. (via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018

2013 journal article

Antireflection effects at nanostructured material interfaces and the suppression of thin-film interference

NANOTECHNOLOGY, 24(23).

By: Q. Yang, X. Zhang, A. Bagal*, W. Guo* & C. Chang*

MeSH headings : Animals; Nanostructures / chemistry; Nanostructures / ultrastructure; Optical Phenomena; Polymers / chemistry; Silicon / chemistry
TL;DR: This work describes the use of interfacial nanostructures to eliminate interference effects in thin films using the same principle inspired by moth-eye structures, and creates an effective medium where the index is gradually varying between the neighboring materials. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

2013 journal article

Fabrication of subwavelength periodic nanostructures using liquid immersion Lloyd's mirror interference lithography

OPTICS LETTERS, 38(14), 2531–2534.

By: A. Bagal n & C. Chang n

TL;DR: A liquid immersion Lloyd's mirror interference lithography system to fabricate subwavelength periodic nanostructures and successfully fabricated a grating structure with 112 nm period using a laser with 325 nm wavelength, attaining a numerical aperture of 1.45. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

2013 journal article

Study on dielectric and piezoelectric properties of 0.7 Pb(Mg1/3Nb2/3)O-3-0.3 PbTiO3 single crystal with nano-patterned composite electrode

JOURNAL OF APPLIED PHYSICS, 114(11).

TL;DR: The results indicate that nano-patterned composite electrode and backswitching poling has a great potential in domain engineering of relaxor single crystals for advanced devices. (via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018

2013 journal article

Three-Dimensional Nanolithography Using Light Scattering from Colloidal Particles

ACS NANO, 7(7), 6212–6218.

By: X. Zhang n, J. Elek n & C. Chang n

author keywords: nanolithography; three-dimensional nanostructures; colloids; self-assembly; light scattering
MeSH headings : Colloids / chemistry; Colloids / radiation effects; Crystallization / methods; Light; Materials Testing; Molecular Imprinting / methods; Nanostructures / chemistry; Nanostructures / radiation effects; Nanostructures / ultrastructure; Particle Size; Photography / methods
TL;DR: The use of light scattering from colloidal particles to fabricate complex hollow nanostructures that can be used to trap nanomaterial, and they are demonstrated to have the ability to trap 50 nm silica nanoparticles. (via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018

2012 journal article

Nanotextured Silica Surfaces with Robust Superhydrophobicity and Omnidirectional Broadband Supertransmissivity

ACS NANO, 6(5), 3789–3799.

author keywords: high aspect ratio nanostructure; wetting; antireflective; enhanced transmission; antifogging; self-cleaning
TL;DR: A systematic approach to concurrent design of optimal structures in the fluidic and optical domains and a fabrication procedure that achieves the desired aspect ratios and periodicities with few defects and large pattern area are reported. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

2011 journal article

Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands

Applied Optics, 50(10), 1364.

By: R. Heilmann*, M. Ahn*, A. Bruccoleri*, C. Chang*, E. Gullikson*, P. Mukherjee*, M. Schattenburg*

TL;DR: Measurements of the diffraction efficiency of 200-nm-period freestanding blazed transmission gratings for wavelengths in the 0.96 to 19.4 nm range show efficiencies in the range of ∼50-100% of theoretical predictions when taking the effects of the support mesh into account. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2011 journal article

From Two-Dimensional Colloidal Self-Assembly to Three-Dimensional Nanolithography

Nano Letters, 11(6), 2533–2537.

By: C. Chang*, L. Tian, W. Hesse, H. Gao, H. Choi, J. Kim, M. Siddiqui, G. Barbastathis*

author keywords: 3D nanostructures; colloidal assembly; nanosphere lithography; phase lithography
MeSH headings : Colloids / chemistry; Nanostructures / chemistry; Nanotechnology / methods; Particle Size; Surface Properties
TL;DR: A 3D nanolithography process that utilizes self-assembled nanospheres to create a periodic array of focal spots, which are then replicated across multiple depth in a transparent medium according to the Talbot effect is presented. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2011 journal article

Nanostructured gradient-index antireflection diffractive optics

Optics Letters, 36(12), 2354.

By: C. Chang*, J. Dominguez-Caballero*, H. Choi* & G. Barbastathis*

TL;DR: The fabrication and characterization of a nanostructured diffractive element with near-zero reflection losses is described, and the proposed principles can be applied to improve the performance of any diffractive structures, potentially leading to more efficient Fresnel lenses, holographic elements, and integrated optical systems. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2010 journal article

Assembling nanoparticle catalysts with nanospheres for periodic carbon nanotube structure growth

Nanotechnology, 22(3), 035301.

By: C. Chang*, H. In*, S. Takahashi*, M. Deterre*, H. Choi*, K. Gotrik*, G. Barbastathis*

TL;DR: A novel method to grow carbon nanotubes in a periodic structure using a simple one-step self-assembly process that eliminates the need for lithography and material deposition, greatly reducing the fabrication complexity and cost. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2010 journal article

Design and optimization of broadband wide-angle antireflection structures for binary diffractive optics

Optics Letters, 35(7), 907.

TL;DR: A class of antireflecting structures that can effectively suppress reflections for binary diffractive optics is proposed that may lead to more efficient diffractive devices for applications in thin-film photovoltaic, waveguide coupler, and holographic optical elements. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2010 journal article

High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths

Optics Letters, 35(15), 2615.

By: D. Voronov*, M. Ahn*, E. Anderson*, R. Cambie*, C. Chang*, E. Gullikson*, R. Heilmann*, F. Salmassi* ...

TL;DR: Measurements are reported that show, for a 5000l/mm grating diffracting in the third order, a diffraction efficiency of 37.6% at a wavelength of 13.6nm. (via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Crossref
Added: January 19, 2020

2010 conference paper

Ultra-high Resolution Optics for EUV and Soft X-ray Inelastic Scattering

Presented at the SRI 2009, 10TH INTERNATIONAL CONFERENCE ON RADIATION INSTRUMENTATION.

By: D. Voronov, R. Cambie, M. Ahn, E. Anderson, C. Chang*, E. Gullikson, R. Heilmann, F. Salmassi ...

Event: SRI 2009, 10TH INTERNATIONAL CONFERENCE ON RADIATION INSTRUMENTATION

author keywords: blazed gratings; multilayer EUV; soft x-rays; lithography; anisotropic etch
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Crossref
Added: February 18, 2020

2009 journal article

Self-assembled ferrofluid lithography: patterning micro and nanostructures by controlling magnetic nanoparticles

Nanotechnology, 20(49), 495301.

By: C. Chang*, C. Tan, J. Miao & G. Barbastathis

TL;DR: An alternative self-assembly process to pattern different geometries with user-defined tunability across the micro and nanoscale, presenting itself as a promising nanomanufacturing tool. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2008 journal article

Design of a double-pass shear mode acousto-optic modulator

Review of Scientific Instruments, 79(3), 033104.

By: C. Chang*, R. Heilmann*, M. Schattenburg* & P. Glenn*

TL;DR: The design of a compact double-pass shear mode acousto-optic modulator for high power operation in the UV is presented, using a spherical mirror retroreflector in the second pass to correct for beam deflection, and changes in beam position and angle during frequency tuning can be eliminated. (via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Crossref
Added: January 19, 2020

2008 journal article

Fabrication of 50 nm period gratings with multilevel interference lithography

Optics Letters, 33(14), 1572.

TL;DR: A multilevel interference lithography process to fabricate 50 nm period gratings using light with a 351.1 nm wavelength that presents a general scheme for overlaying periodic structures and can be used to Fabricate more complex periodic structures. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2008 journal article

Spatial-frequency multiplication with multilevel interference lithography

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 26(6), 2135–2138.

Source: Crossref
Added: January 19, 2020

2007 journal article

Phase control in multiexposure spatial frequency multiplication

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 25(6), 2439.

TL;DR: The authors report a technique that achieves accurate phase control over large areas during spatial frequency multiplication by utilizing a surrounding alignment grating. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2006 journal article

Describing isotropic and anisotropic out-of-plane deformations in thin cubic materials by use of Zernike polynomials

Applied Optics, 45(3), 432.

By: C. Chang*, M. Akilian* & M. Schattenburg*

TL;DR: Isotropic and anisotropic out-of-plane deformations induced by thin-film residual stress on thin cubic materials are studied and an analytical expression can be derived for the biaxial stiffness modulus for all directions in any given cubic crystal plane. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2006 journal article

Efficiency of a grazing-incidence off-plane grating in the soft-x-ray region

Applied Optics, 45(8), 1680.

By: J. Seely, L. Goray, B. Kjornrattanawanich*, J. Laming*, G. Holland*, K. Flanagan*, R. Heilmann*, C. Chang*, M. Schattenburg*, A. Rasmussen*

TL;DR: Efficiency measurements of a grazing-incidence diffraction grating in the off-plane mount were performed using polarized synchrotron radiation, offering the possibility of performing unique science studies of astrophysical, solar, and laboratory sources by exploiting the polarization sensitivity of the off -plane grating. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2006 journal article

Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating

Applied Optics, 45(8), 1676.

By: M. Kowalski*, R. Heilmann*, M. Schattenburg*, C. Chang*, F. Berendse* & W. Hunter*

TL;DR: The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile, which presents opportunities to instrument designs for high-resolution EUV spectroscopy in astrophysics where high efficiency in high orders is desirable. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

2005 journal article

Doppler writing and linewidth control for scanning beam interference lithography

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 23(6), 2640.

By: J. Montoya*, C. Chang*, R. Heilmann* & M. Schattenburg*

UN Sustainable Development Goal Categories
4. Quality Education (OpenAlex)
Source: Crossref
Added: January 19, 2020

2004 journal article

High fidelity blazed grating replication using nanoimprint lithography

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 22(6), 3260.

By: C. Chang*, J. Montoya*, M. Akilian*, A. Lapsa*, R. Heilmann*, M. Schattenburg*, M. Li*, K. Flanagan* ...

Source: Crossref
Added: January 19, 2020

2003 journal article

Fabrication of sawtooth diffraction gratings using nanoimprint lithography

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 21(6), 2755.

By: C. Chang*, R. Heilmann*, R. Fleming*, J. Carter*, E. Murphy*, M. Schattenburg*, T. Bailey, J. Ekerdt, R. Frankel, R. Voisin

Source: Crossref
Added: January 19, 2020

2003 journal article

Nanometer-level repeatable metrology using the Nanoruler

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 21(6), 3097.

By: P. Konkola*, C. Chen*, R. Heilmann*, C. Joo*, J. Montoya*, C. Chang*, M. Schattenburg*

TL;DR: The Nanonruler’s metrology system that is based on digital frequency synthesizers, acousto-optics, and heterodyne phase sensing is presented, used to assess the fringe-to-substrate placement stability and the accuracy of the feedback signals. (via Semantic Scholar)
Source: Crossref
Added: January 19, 2020

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