Works (1)
Updated: July 5th, 2023 15:56
2006 journal article
Alicyclic photoresists for CO2-based next-generation microlithography: A tribute to James E. McGrath
POLYMER, 47(11), 4012–4017.
author keywords: condensed CO2; addition polymerization; photoresist synthesis
UN Sustainable Development Goal Categories
9. Industry, Innovation and Infrastructure
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
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