@article{zdanowicz_dow_scattergood_youssef_2013, title={Nanostructure fabrication on germanium and silicon by nanocoining imprint technique}, volume={37}, ISSN={["1873-2372"]}, DOI={10.1016/j.precisioneng.2013.05.004}, abstractNote={Germanium (Ge) and silicon (Si) material response to indentation with a nanostructured die is investigated. A diamond die attached to a high speed actuator previously used to create large arrays of nanofeatures on metallic surfaces was used to create nanofeatures on Ge and Si samples. The pressure induced transformation of Ge and Si from a diamond cubic brittle phase to a more ductile beta-tin metallic phase due to the nanofeatures on the die was investigated. Results using the dynamic nanocoining method showed chip-like deformation around the individual nanofeatures indicative of the beta-tin phase transformation at the nanofeature level. Micro-Raman measurements confirmed the metallic transition from evidence including metastable and amorphous phases after indentation. Indents created using a common linear indentation method exhibited similar behavior. The Si nanofeature deformation was compared to electroless (EL) nickel and the deformation differed as dictated by the mechanism of material flow. Although not observed in Si, fracture occurred in some Ge indents at higher loads as a result of the lower fracture toughness compared to Si.}, number={4}, journal={PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY}, author={Zdanowicz, Erik and Dow, Thomas A. and Scattergood, Ronald O. and Youssef, Khaled}, year={2013}, month={Oct}, pages={871–879} } @article{zdanowicz_dow_scattergood_2012, title={Rapid fabrication of nanostructured surfaces using nanocoining}, volume={23}, ISSN={["0957-4484"]}, DOI={10.1088/0957-4484/23/41/415303}, abstractNote={A new process for creating high quality ordered arrays of nanofeatures called nanocoining is presented. A diamond die with a structured area of nanofeatures (1600 features in a 20 μm × 20 μm area) is used to physically transfer features to a mold surface. The die is attached to an actuator capable of producing an elliptical tool-path, the dimensions of which are process dependent and enable the die to match velocity with the moving mold during contact to avoid dragging the nanostructured area along the mold surface (smear). Nanocoining process parameters are discussed which enable indents to be indexed precisely to completely cover target areas. Techniques for die alignment and depth control are also required to create large areas (339 mm2) of nanofeatures in short times (∼20 min). Nanocoining experiments were performed at 1 kHz (1000 indents or 1.6 million features per second) on a flat electroless nickel sample. UV curable replicates were then created from the nickel mold and both the mold and replicate were examined in an SEM and AFM.}, number={41}, journal={NANOTECHNOLOGY}, author={Zdanowicz, Erik and Dow, Thomas A. and Scattergood, Ronald O.}, year={2012}, month={Oct} }