@article{szymanski_wang_kaess_kirste_mita_reddy_sitar_collazo_2022, title={Systematic oxygen impurity reduction in smooth N-polar GaN by chemical potential control}, volume={37}, ISSN={["1361-6641"]}, DOI={10.1088/1361-6641/ac3638}, abstractNote={Abstract}, number={1}, journal={SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, author={Szymanski, Dennis and Wang, Ke and Kaess, Felix and Kirste, Ronny and Mita, Seiji and Reddy, Pramod and Sitar, Zlatko and Collazo, Ramon}, year={2022}, month={Jan} } @article{washiyama_reddy_kaess_kirste_mita_collazo_sitar_2018, title={A thermodynamic supersaturation model for the growth of aluminum gallium nitride by metalorganic chemical vapor deposition}, volume={124}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/1.5045058}, DOI={10.1063/1.5045058}, abstractNote={A thermodynamic supersaturation model for growth of AlGaN by metalorganic chemical vapor deposition was developed for experimentally accessible growth parameters. The derived non-linear relationships enabled us to estimate Ga and Al supersaturation during AlGaN growth for given growth conditions. Calculations revealed that the GaN phase was close to chemical equilibrium, while the Al supersaturation was as high as 1010 for typical growth conditions. Such a disparity in the supersaturation of reaction species plays a significant role in the stability of the growth of the resulting ternary alloy. The agreement between experiment and simulation suggests that the parasitic gas phase reactions between trimethylaluminum and NH3 were not significant at low NH3 flow rates/partial pressures, indicating that, under these conditions, the AlGaN growth was thermodynamically limited.}, number={11}, journal={JOURNAL OF APPLIED PHYSICS}, author={Washiyama, Shun and Reddy, Pramod and Kaess, Felix and Kirste, Ronny and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko}, year={2018}, month={Sep} } @article{reddy_washiyama_mecouch_hernandez-balderrama_kaess_breckenridge_sarkar_haidet_franke_kohn_et al._2018, title={Plasma enhanced chemical vapor deposition of SiO2 and SiNx on AlGaN: Band offsets and interface studies as a function of Al composition}, volume={36}, ISSN={["1520-8559"]}, DOI={10.1116/1.5050501}, abstractNote={In this work, the authors characterized the interface of plasma enhanced chemical vapor deposition (PECVD) dielectrics, SiO2 and SiNx with AlGaN as a function of Al composition. SiO2 is found to exhibit type I straddled band alignment with positive conduction and valence band offsets for all Al compositions. However, the interface Fermi level is found to be pinned within the bandgap, indicating a significant density of interface states. Hence, SiO2 is found to be suitable for insulating layers or electrical isolation on AlGaN with breakdown fields between 4.5 and 6.5 MV cm−1, but an additional passivating interlayer between SiO2 and AlGaN is necessary for passivation on Al-rich AlGaN. In contrast, Si-rich PECVD SiNx is found to exhibit type II staggered band alignment with positive conduction band offsets and negative valence band offsets for Al compositions <40% and type I straddled band alignment with negative conduction and valence band offsets for Al compositions >40% and is, hence, found to be unsuitable for insulating layers or electrical isolation on Al-rich AlGaN in general. In contrast to passivating stoichiometric LPCVD Si3N4, no evidence for interface state reduction by depositing SiNx on AlGaN is observed.}, number={6}, journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A}, author={Reddy, Pramod and Washiyama, Shun and Mecouch, Will and Hernandez-Balderrama, Luis H. and Kaess, Felix and Breckenridge, M. Hayden and Sarkar, Biplab and Haidet, Brian B. and Franke, Alexander and Kohn, Erhard and et al.}, year={2018}, month={Nov} } @article{blumenschein_slomski_paskov_kaess_breckenridge_muth_paskova_2018, title={Thermal conductivity of bulk and thin film beta-Ga2O3 measured by the 3 omega technique}, volume={10533}, ISSN={["1996-756X"]}, DOI={10.1117/12.2288267}, abstractNote={Thermal conductivity of undoped and Sn-doped β-Ga2O3 bulk and single-crystalline thin films have been measured by the 3ω technique. The bulk samples were grown by edge-defined film-field growth (EFG) method, while the thin films were grown on c-plane sapphire by pulsed-laser deposition (PLD). All samples were with (-201) surface orientation. Thermal conductivity of bulk samples was calculated along the in-plane and cross-plane crystallographic directions, yielding a maximum value of ~ 29 W/m-K in the [010] direction at room temperature. A slight thermal conductivity decrease was observed in the Sn-doped bulk samples, which was attributed to enhanced phonon-impurity scattering. The differential 3ω method was used for β-Ga2O3 thin film samples due to the small film thickness. Results show that both undoped and Sndoped films have a much lower thermal conductivity than that of the bulk samples, which is consistent with previous reports in the literature showing a linear relationship between thermal conductivity and film thickness. Similarly to bulk samples, Sn-doped thin films have exhibited a thermal conductivity decrease. However, this decrease was found to be much greater in thin film samples, and increased with Sn doping concentration. A correlation between thermal conductivity and defect/dislocation density was made for the undoped thin films.}, journal={OXIDE-BASED MATERIALS AND DEVICES IX}, author={Blumenschein, N. and Slomski, M. and Paskov, P. P. and Kaess, F. and Breckenridge, M. H. and Muth, J. F. and Paskova, T.}, year={2018} } @article{sarkar_reddy_kaess_haidet_tweedie_mita_kirste_kohn_collazo_sitar_et al._2017, title={(Invited) Material Considerations for the Development of III-nitride Power Devices}, volume={80}, ISBN={["978-1-62332-476-6"]}, ISSN={["1938-6737"]}, url={http://www.scopus.com/inward/record.url?eid=2-s2.0-85033580489&partnerID=MN8TOARS}, DOI={10.1149/08007.0029ecst}, abstractNote={With advancement in growth of native III-nitride substrates, remarkable progress has been made to extend the functionality of GaN based power electronic devices. The low dislocation epitaxial films grown on native substrates outperforms the films grown on foreign substrates. However, several material considerations has to be incorporated in order to exploit the full potential of GaN and AlxGa1-xN (0 Eg(Si3N4). Further, no band bending is observed in AlGaN for x ≤ 0.6 and a reduced band bending (by ∼1 eV in comparison to that at free surface) is observed for x > 0.6. The Fermi level in silicon nitride is found to be at 3 eV with respect to its valence band, which is likely due to silicon (≡Si0/−1) dangling bonds. The presence of band bending for x > 0.6 is seen as a likely consequence of Fermi level alignment at Si3N4/AlGaN hetero-interface and not due to interface states. Photoelectron spectroscopy results are corroborated by current-voltage-temperature and capacitance-voltage measurements. A shift in the interface Fermi level (before band bending at equilibrium) from the conduction band in Si3N4/n-GaN to the valence band in Si3N4/p-GaN is observed, which strongly indicates a reduction in mid-gap interface states. Hence, stoichiometric silicon nitride is found to be a feasible passivation and dielectric insulation material for AlGaN at any composition.}, number={14}, journal={JOURNAL OF APPLIED PHYSICS}, publisher={AIP Publishing}, author={Reddy, Pramod and Washiyama, Shun and Kaess, Felix and Breckenridge, M. Hayden and Hernandez-Balderrama, Luis H. and Haidet, Brian B. and Alden, Dorian and Franke, Alexander and Sarkar, Biplab and Kohn, Erhard and et al.}, year={2016}, month={Apr} } @article{reddy_hoffmann_kaess_bryan_bryan_bobea_klump_tweedie_kirste_mita_et al._2016, title={Point defect reduction in wide bandgap semiconductors by defect quasi Fermi level control}, volume={120}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/1.4967397}, DOI={10.1063/1.4967397}, abstractNote={A theoretical framework for a general approach to reduce point defect density in materials via control of defect quasi Fermi level (dQFL) is presented. The control of dQFL is achieved via excess minority carrier generation. General guidelines for controlling dQFL that lead to a significant reduction in compensating point defects in any doped material is proposed. The framework introduces and incorporates the effects of various factors that control the efficacy of the defect reduction process such as defect level, defect formation energy, bandgap, and excess minority carrier density. Modified formation energy diagrams are proposed, which illustrate the effect of the quasi Fermi level control on the defect formation energies. These formation energy diagrams provide powerful tools to determine the feasibility and requirements to produce the desired reduction in specified point defects. An experimental study of the effect of excess minority carriers on point defect incorporation in GaN and AlGaN shows an excellent quantitative agreement with the theoretical predictions. Illumination at energies larger than the bandgap is employed as a means to generate excess minority carriers. The case studies with CN in Si doped GaN, H and VN in Mg doped GaN and VM-2ON in Si doped Al0.65Ga0.35N revealed a significant reduction in impurities in agreement with the proposed theory. Since compensating point defects control the material performance (this is particularly challenging in wide and ultra wide bandgap materials), dQFL control is a highly promising technique with wide scope and may be utilized to improve the properties of various materials systems and performance of devices based upon them.}, number={18}, journal={JOURNAL OF APPLIED PHYSICS}, publisher={AIP Publishing}, author={Reddy, P. and Hoffmann, M. P. and Kaess, F. and Bryan, Z. and Bryan, I. and Bobea, M. and Klump, A. and Tweedie, J. and Kirste, R. and Mita, S. and et al.}, year={2016}, month={Nov} } @article{franke_hoffmann_hernandez-balderrama_kaess_bryan_washiyama_bobea_tweedie_kirste_gerhold_et al._2016, title={Strain engineered high reflectivity DBRs in the deep UV}, volume={9748}, ISSN={["1996-756X"]}, DOI={10.1117/12.2211700}, abstractNote={The maximum achievable reflectivity of current III-nitride Bragg reflectors in the UV-C spectral range is limited due to plastic relaxation of thick multilayer structures. Cracking due to a large mismatch of the thermal expansion and lattice constants between AlxGa1-xN/AlyGa1-yN alloys of different composition and the substrate at the heterointerface is the common failure mode. Strain engineering and strain relaxation concepts by the growth on a strain reduced Al0.85Ga0.15N template and the implementation of low temperature interlayers is demonstrated. A significant enhancement of the maximum reflectivity above 97% at a resonance wavelength of 270 nm due to an increase of the critical thickness of our AlN/Al0.65Ga0.35N DBRs to 1.45 μm (25.5 pairs) prove their potential. By comparing the growth of identical Bragg reflectors on different pseudo-templates, the accumulated mismatch strain energy in the DBR, not the dislocation density provided by the template/substrate, was identified to limit the critical thickness. To further enhance the reflectivity low temperature interlays were implemented into the DBR to partially relief the misfit strain. Relaxation is enabled by the nucleation of small surface domains facilitating misfit dislocation injection and glide. Detailed structural and optical investigations will be conducted to prove the influence of the LT-AlN interlayers on the strain state, structural integrity and reflectivity properties. Coherent growth and no structural and optical degradation of the Bragg mirror properties was observed proving the fully applicability of the relaxation concept to fabricate thick high reflectivity DBR and vertical cavity laser structures.}, journal={GALLIUM NITRIDE MATERIALS AND DEVICES XI}, author={Franke, A. and Hoffmann, P. and Hernandez-Balderrama, L. and Kaess, F. and Bryan, I. and Washiyama, S. and Bobea, M. and Tweedie, J. and Kirste, R. and Gerhold, M. and et al.}, year={2016} } @article{kaess_reddy_alden_klump_hernandez-balderrama_franke_kirste_hoffmann_collazo_sitar_et al._2016, title={The effect of illumination power density on carbon defect configuration in silicon doped GaN}, volume={120}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/1.4972468}, DOI={10.1063/1.4972468}, abstractNote={A study of efficacy of point defect reduction via Fermi level control during growth of GaN:Si as a function of above bandgap illumination power density and hence excess minority carrier density is presented. Electrical characterization revealed an almost two-fold increase in carrier concentration and a three-fold increase in mobility by increasing the illumination power density from 0 to 1 W cm−2, corroborating a decrease in compensation and ionic impurity scattering. The effect was further supported by the photoluminescence studies, which showed a monotonic decrease in yellow luminescence (attributed to CN) as a function of illumination power density. Secondary ion mass spectroscopy studies showed no effect of illumination on the total incorporation of Si or C. Thus, it is concluded that Fermi level management changed the configuration of the C impurity as the CN−1 configuration became energetically less favorable due to excess minority carriers.}, number={23}, journal={JOURNAL OF APPLIED PHYSICS}, publisher={AIP Publishing}, author={Kaess, Felix and Reddy, Pramod and Alden, Dorian and Klump, Andrew and Hernandez-Balderrama, Luis H. and Franke, Alexander and Kirste, Ronny and Hoffmann, Axel and Collazo, Ramón and Sitar, Zlatko and et al.}, year={2016}, month={Dec} }