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I. and Ragaglia, C. and Stauf, G.}, year={2005}, pages={75–81} } @misc{maria_kingon_2005, title={Methods of controlling oxygen partial pressure during annealing of a perovskite dielectric layer}, volume={6,936,301}, publisher={Washington, DC: U.S. Patent and Trademark Office}, author={Maria, J.-P. and Kingon, A. I.}, year={2005} } @misc{maria_kingon_dunn_streiffer_cheek_zhang_savic_2005, title={Multi-layer conductor-dielectric oxide structure}, volume={6,841,080}, number={2005 Jan. 11}, publisher={Washington, DC: U.S. Patent and Trademark Office}, author={Maria, J.-P. and Kingon, A. and Dunn, G. J. and Streiffer, S. and Cheek, K. and Zhang, M.-X. and Savic, J.}, year={2005} } @article{sivasubramani_kim_gnade_wallace_edge_schlom_craft_maria_2005, title={Outdiffusion of La and Al from amorphous LaAlO3 in direct contact with Si(001)}, volume={86}, DOI={10.1063/1.1928316}, number={20}, journal={Applied Physics Letters}, author={Sivasubramani, P. and Kim, M. J. and Gnade, B. E. and Wallace, R. M. and Edge, L. F. and Schlom, D. G. and Craft, H. S. and Maria, J. P.}, year={2005} } @article{laughlin_ihlefeld_maria_2005, title={Preparation of sputtered (Ba-x,Sr1-x)TiO3 thin films directly on copper}, volume={88}, DOI={10.1111/j.1551-2916.2005.00488.x}, number={9}, journal={Journal of the American Ceramic Society}, author={Laughlin, B. and Ihlefeld, J. and Maria, J. P.}, year={2005}, pages={2652–2654} } @inproceedings{victor_ghosh_boyette_maria_steer_kingon_stauf_2004, title={A voltage controlled oscillator using barium strontium titanate (BST) thin film varactor}, ISBN={0780384512}, DOI={10.1109/rawcon.2004.1389079}, booktitle={Proceedings of the 2004 IEEE Radio and Wireless Conference (RAWCON), Atlanta}, publisher={Piscataway, NJ: IEEE}, author={Victor, A. and Ghosh, D. and Boyette, B. and Maria, J.-P. and Steer, M. B. and Kingon, A. I. and Stauf, G.}, year={2004}, pages={91–94} } @article{kim_kingon_maria_croswell_2004, title={Ca-doped lead zirconate titanate thin film capacitors on base metal nickel on copper foil}, volume={19}, DOI={10.1557/jmr.2004.0387}, number={10}, journal={Journal of Materials Research}, author={Kim, T. and Kingon, A. I. and Maria, J. P. and Croswell, R. T.}, year={2004}, pages={2841–2848} } @article{lucovsky_maria_phillips_2004, title={Interfacial strain-induced self-organization in semiconductor dielectric gate stacks. II. Strain-relief at internal dielectric interfaces between SiO2 and alternative gate dielectrics}, volume={22}, number={4}, journal={Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures}, author={Lucovsky, G. and Maria, J. P. and Phillips, J. C.}, year={2004}, pages={2097–2104} } @misc{maria_kingon_2004, title={Lanthanum oxide-based dielectrics for integrated circuit capacitors}, volume={6,753,567}, number={2004 June 22}, publisher={Washington, DC: U.S. Patent and Trademark Office}, author={Maria, J.-P. and Kingon, A. I.}, year={2004} } @inproceedings{nath_ghosh_maria_steer_kingon_stauf_2004, title={Microwave properties of BST thin film interdigital capacitors on low cost alumina substrates}, ISBN={1580539920}, booktitle={Proceedings of the 34th European Microwave Conference (EuMc), Amsterdam}, publisher={London: Horizon House}, author={Nath, J. and Ghosh, D. and Maria, J.-P. and Steer, M. B. and Kingon, A. I. and Stauf, G. 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I.}, year={2002}, pages={340–342} } @article{tombak_maria_ayguavives_jin_stauf_kingon_mortazawi_2002, title={Tunable barium strontium titanate thin film capacitors for RF and microwave applications}, volume={12}, DOI={10.1109/7260.975716}, number={1}, journal={IEEE Microwave and Wireless Components Letters}, author={Tombak, A. and Maria, J. P. and Ayguavives, F. T. and Jin, Z. and Stauf, G. T. and Kingon, A. I. and Mortazawi, A.}, year={2002}, pages={3–5} } @article{park_maria_cuomo_chang_muth_kolbas_nemanich_carlson_bumgarner_2002, title={X-ray and Raman analyses of GaN produced by ultrahigh-rate magnetron sputter epitaxy}, volume={81}, DOI={10.1063/1.1506781}, number={10}, journal={Applied Physics Letters}, author={Park, M. and Maria, J. P. and Cuomo, J. J. and Chang, Y. C. and Muth, J. F. and Kolbas, R. M. and Nemanich, R. J. and Carlson, E. and Bumgarner, J.}, year={2002}, pages={1797–1799} } @article{ayguavives_jin_tombak_maria_mortazawi_kingon_2001, title={Contribution of dielectric and metallic losses in RF/microwave tunable varactors using (Ba,Sr)TiO3 thin films}, volume={39}, number={1-4}, journal={Integrated Ferroelectrics}, author={Ayguavives, F. and Jin, Z. and Tombak, A. and Maria, J. P. and Mortazawi, A. and Kingon, A. I.}, year={2001}, pages={1343–1352} } @article{baumann_streiffer_bai_ghosh_auciello_thompson_stemmer_rao_eom_xu_et al._2001, title={Epitaxial Pb(Mg1/3Nb2/3)O-3-PbTiO3 thin films grown by MOCVD}, volume={35}, number={1-4}, journal={Integrated Ferroelectrics}, author={Baumann, P. K. and Streiffer, S. K. and Bai, G. R. and Ghosh, K. and Auciello, O. and Thompson, C. and Stemmer, S. and Rao, R. A. and Eom, C. 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H. and Dunn, G. and Kingon, A.}, year={2001}, pages={2436–2438} } @article{chen_roeder_kim_maria_kingon_2001, title={Metalorganic chemical vapor deposition Pb(Zr,Ti)O-3 and selected lower electrode structures as a pathway to integrated piezoelectric microelectromechanical systems}, volume={19}, DOI={10.1116/1.1401747}, number={5}, journal={Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures}, author={Chen, I. S. and Roeder, J. F. and Kim, D. J. and Maria, J. P. and Kingon, A. I.}, year={2001}, pages={1833–1840} } @article{stemmer_maria_kingon_2001, title={Structure and stability of La2O3/SiO2 layers on Si(001)}, volume={79}, DOI={10.1063/1.1383268}, number={1}, journal={Applied Physics Letters}, author={Stemmer, S. and Maria, J. P. and Kingon, A. I.}, year={2001}, pages={102–104} } @article{stauf_ragaglia_roeder_vestyck_maria_ayguavives_kingon_mortazawi_tombak_2001, title={Thick electrodes for high frequency high Q tunable ferroelectric thin film varactors}, volume={39}, DOI={10.1080/10584580108011955}, number={1-4}, journal={Integrated Ferroelectrics}, author={Stauf, G. T. and Ragaglia, C. and Roeder, J. F. and Vestyck, D. and Maria, J. P. and Ayguavives, T. and Kingon, A. and Mortazawi, A. and Tombak, A.}, year={2001}, pages={1271–1280} } @article{kingon_maria_streiffer_2000, title={Alternative dielectrics to silicon dioxide for memory and logic devices}, volume={406}, DOI={10.1038/35023243}, number={6799}, journal={Nature}, author={Kingon, A. I. and Maria, J. P. and Streiffer, S. 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J.}, year={2000}, pages={8031–8034} } @article{kim_kim_im_streiffer_auciello_maria_kingon_1999, title={Impact of changes in the Pt heterostructure bottom electrodes on the ferroelectric properties of SBT thin films}, volume={26}, DOI={10.1080/10584589908215626}, number={1-4}, journal={Integrated Ferroelectrics}, author={Kim, S. H. and Kim, D. J. and Im, J. and Streiffer, S. K. and Auciello, O. and Maria, J. P. and Kingon, A. I.}, year={1999}, pages={955–970} } @article{kim_kim_maria_kingon_1999, title={Influences on imprint failure of SrBi2Ta2O9 thin film capacitors}, volume={25}, number={1-4}, journal={Integrated Ferroelectrics}, author={Kim, D. J. and Kim, S. H. and Maria, J. P. and Kingon, A. I.}, year={1999}, pages={691–701} } @article{maiwa_maria_christman_kim_streiffer_kingon_1999, title={Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients}, volume={24}, DOI={10.1080/10584589908215586}, number={1-4}, journal={Integrated Ferroelectrics}, author={Maiwa, H. and Maria, J. P. and Christman, J. A. and Kim, S. H. and Streiffer, K. and Kingon, A. I.}, year={1999}, pages={139–146} } @article{maiwa_christman_kim_kim_maria_chen_streiffer_kingon_1999, title={Measurement of piezoelectric displacements of Pb(Zr, Ti)O-3 thin films using a double-beam interferometer}, volume={38}, DOI={10.1143/jjap.38.5402}, number={9B}, journal={Japanese Journal of Applied Physics. Part 1, Regular Papers, Short Notes & Review Papers}, author={Maiwa, H. and Christman, J. A. and Kim, S. H. and Kim, D. J. and Maria, J. P. and Chen, B. and Streiffer, S. K. and Kingon, A. I.}, year={1999}, pages={5402–5405} }