2024 journal article

A Novel Monolithic MEMS Array for E-Nose Applications


By: Y. Zhou n, J. Dieffenderfer n, M. Aleem n, B. Lee* & V. Misra n

author keywords: Sensor arrays; Sensitivity; Heating systems; Temperature sensors; Temperature measurement; Sensor phenomena and characterization; Sensor systems; Sensor phenomena; sensor materials; sensor signal processing; sensor systems
Sources: Web Of Science, ORCID, NC State University Libraries
Added: February 2, 2024

2023 article

Performance of A Monolithic E-Nose Array Integrating MEMS and ALD Processing


By: Y. Zhou n, J. Dieffenderfer n, E. Sennik n, M. Aleem n, J. Speight n, S. Vasisht n, O. Oralkan n, B. Lee*, V. Misra n

author keywords: Gas Sensor; ALD; Metal Oxide; MOx; E-Nose; Monolithic Array; VOC; Nitrogen Dioxide; Carbon Monoxide; Ethanol; Mixture; MEMS; BEOL; Microheater; Dry Etching; SnO2
Sources: Web Of Science, NC State University Libraries
Added: February 12, 2024

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