Prithu Bhatnagar
College of Engineering
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Works (2)
Updated: July 6th, 2023 21:20
2022 journal article
Development of MEMS Process Compatible (Bi,Sb)(2)(Se,Te)(3)-Based Thin Films for Scalable Fabrication of Planar Micro-Thermoelectric Generators
MICROMACHINES, 13(9).
author keywords: thermoelectric generators; MEMS; thermoelectric thin films; thermal evaporation; bismuth telluride
www.mdpi.com (publisher PDF)
Source: Web Of Science
Added: October 3, 2022
2022 journal article
Process Considerations for selective doping of poly-Si thin films with spin-on dopants and nickel silicide formation for planar thermoelectric devices
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 150.
author keywords: Contact resistance; Microfabrication; Rapid thermal annealing; Semiconductor device doping; Silicon; Thermoelectric devices
Source: Web Of Science
Added: September 6, 2022
