@article{nye_van dongen_oka_furutani_parsons_de simone_delabie_2022, title={Improving polymethacrylate EUV resists with TiO2 area-selective deposition}, volume={12055}, ISBN={["978-1-5106-4985-9"]}, ISSN={["1996-756X"]}, DOI={10.1117/12.2613815}, journal={ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX}, author={Nye, Rachel A. and Van Dongen, Kaat and Oka, Hironori and Furutani, Hajime and Parsons, Gregory and De Simone, Danilo and Delabie, Annelies}, year={2022} } @article{nye_song_van dongen_delabie_parsons_2022, title={Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition}, volume={121}, ISSN={["1077-3118"]}, DOI={10.1063/5.0106132}, number={8}, journal={APPLIED PHYSICS LETTERS}, author={Nye, Rachel A. and Song, Seung Keun and Van Dongen, Kaat and Delabie, Annelies and Parsons, Gregory N.}, year={2022}, month={Aug} } @article{nye_wang_uhlenbrock_smythe_parsons_2021, title={In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors}, ISSN={["1477-9234"]}, DOI={10.1039/d1dt03689k}, journal={DALTON TRANSACTIONS}, author={Nye, Rachel A. and Wang, Siyao and Uhlenbrock, Stefan and Smythe, John A., III and Parsons, Gregory N.}, year={2021}, month={Dec} } @article{matveev_dlott_hanusova_maria_nye_parsons_2020, series={AIP Conference Proceedings}, title={Shock Initiation of Reactive Nanolaminates}, volume={2272}, ISBN={0094-243X}, DOI={10.1063/12.0000877}, journal={SHOCK COMPRESSION OF CONDENSED MATTER - 2019}, author={Matveev, Sergey M. and Dlott, Dana D. and Hanusova, Petra and Maria, Jon-Paul and Nye, Rachel and Parsons, Gregory}, year={2020}, collection={AIP Conference Proceedings} } @article{nye_kelliher_gaskins_hopkins_parsons_2020, title={Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis}, volume={32}, ISBN={1520-5002}, DOI={10.1021/acs.chemmater.9b04702}, number={4}, journal={CHEMISTRY OF MATERIALS}, author={Nye, Rachel A. and Kelliher, Andrew P. and Gaskins, John T. and Hopkins, Patrick E. and Parsons, Gregory N.}, year={2020}, pages={1553–1563} }