@article{peterson_xiao_ford_kraus_shannon_2021, title={Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma}, volume={5}, DOI={10.1088/1361-6595/ac02b2}, journal={Plasma Sources Science and Technology}, publisher={IOP Publishing}, author={Peterson, D and Xiao, Y and Ford, K and Kraus, P and Shannon, S}, year={2021}, month={Jun} }
 @article{xiao_du_smith_nam_lee_lee_shannon_2021, title={Focus ring geometry influence on wafer edge voltage distribution for plasma processes}, DOI={10.1116/6.0000981}, journal={Journal of Vacuum Science & Technology A}, author={Xiao, Yuhua and Du, Yao and Smith, Carl and Nam, Sang Ki and Lee, Hoki and Lee, Jang-Yeob and Shannon, Steven}, year={2021}, month={Jul} }
 @article{qu_lanham_shannon_nam_kushner_2020, title={Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]}, DOI={10.1063/5.0023888}, journal={Journal of Applied Physics}, author={Qu, Chenhui and Lanham, Steven J. and Shannon, Steven C. and Nam, Sang Ki and Kushner, Mark J.}, year={2020}, month={Aug} }
 @article{qu_lanham_shannon_nam_kushner_2020, title={Power matching to pulsed inductively coupled plasmas}, DOI={10.1063/5.0002522}, journal={Journal of Applied Physics}, author={Qu, Chenhui and Lanham, Steven J. and Shannon, Steven C. and Nam, Sang Ki and Kushner, Mark J.}, year={2020}, month={Apr} }
 @article{peterson_ford_brandon_shannon_koh_chua_bera_tian_rauf_kraus_2020, title={Radiofrequency phase resolved electron density measurements with the hairpin resonator probe}, volume={53}, ISBN={1361-6463}, DOI={10.1088/1361-6463/ab6944}, number={14}, journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS}, author={Peterson, D. J. and Ford, K. and Brandon, J. and Shannon, S. C. and Koh, T. and Chua, T. C. and Bera, K. and Tian, W. and Rauf, S. and Kraus, P. A.}, year={2020} }
 @article{list_ma_arora_donnelly_shannon_2019, title={Complex transients in power modulated inductively-coupled chlorine plasmas}, volume={28}, ISBN={1361-6595}, ISSN={1361-6595}, url={http://dx.doi.org/10.1088/1361-6595/ab000c}, DOI={10.1088/1361-6595/ab000c}, number={2}, journal={Plasma Sources Science and Technology}, publisher={IOP Publishing}, author={List, Tyler and Ma, Tianyu and Arora, Priyanka and Donnelly, Vincent M and Shannon, Steven}, year={2019}, month={Feb}, pages={025005} }
 @article{zafar_martin_shannon_2019, title={Doppler-free, Stark broadened profiles at low plasma densities in helium}, volume={230}, ISBN={1879-1352}, ISSN={0022-4073}, url={http://dx.doi.org/10.1016/j.jqsrt.2019.03.020}, DOI={10.1016/j.jqsrt.2019.03.020}, journal={Journal of Quantitative Spectroscopy and Radiative Transfer}, publisher={Elsevier BV}, author={Zafar, Abdullah and Martin, Elijah and Shannon, Steve}, year={2019}, month={Jun}, pages={48–55} }
 @book{icenhour_lindsay_martineau_shannon_2019, title={Electromagnetics Simulations with Vector-valued Finite Elements in MOOSE}, number={INL/CON-18-52320-Rev000}, journal={Idaho National Laboratory Report}, author={Icenhour, C.T. and Lindsay, A.D. and Martineau, R.C. and Shannon, S}, year={2019} }
 @article{ford_peterson_brandon_nam_walker_shannon_2019, title={Measurement of localized plasma perturbation with hairpin resonator probes}, volume={26}, ISSN={1070-664X 1089-7674}, url={http://dx.doi.org/10.1063/1.5065509}, DOI={10.1063/1.5065509}, number={1}, journal={Physics of Plasmas}, publisher={AIP Publishing}, author={Ford, Kristopher and Peterson, David J. and Brandon, Joel and Nam, Sang Ki and Walker, Dustin and Shannon, Steven C.}, year={2019}, month={Jan}, pages={013510} }
 @article{coumou_smith_peterson_shannon_2019, title={Time-Resolved Electron Density Measurement Characterization of E–H-Modes for Inductively Coupled Plasma Instabilities}, volume={47}, ISBN={1939-9375}, ISSN={0093-3813 1939-9375}, url={http://dx.doi.org/10.1109/TPS.2019.2909476}, DOI={10.1109/TPS.2019.2909476}, number={5}, journal={IEEE Transactions on Plasma Science}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Coumou, David J. and Smith, Shaun T. and Peterson, David J. and Shannon, Steven C.}, year={2019}, month={May}, pages={2102–2109} }
 @article{zafar_martin_shannon_2018, title={High resolution magnetic field measurements in hydrogen and helium plasmas using active laser spectroscopy}, volume={89}, ISSN={0034-6748 1089-7623}, url={http://dx.doi.org/10.1063/1.5039334}, DOI={10.1063/1.5039334}, number={10}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Zafar, Abdullah and Martin, Elijah and Shannon, Steve}, year={2018}, month={Oct}, pages={10D126} }
 @article{poulose_goeckner_shannon_coumou_overzet_2017, title={Driving frequency fluctuations in pulsed capacitively coupled plasmas}, volume={71}, ISSN={1434-6060 1434-6079}, url={http://dx.doi.org/10.1140/epjd/e2017-80096-7}, DOI={10.1140/epjd/e2017-80096-7}, number={9}, journal={The European Physical Journal D}, publisher={Springer Nature}, author={Poulose, John and Goeckner, Matthew and Shannon, Steven and Coumou, David and Overzet, Lawrence}, year={2017}, month={Sep} }
 @article{peterson_kraus_chua_larson_shannon_2017, title={Electron neutral collision frequency measurement with the hairpin resonator probe}, volume={26}, ISSN={1361-6595}, url={http://dx.doi.org/10.1088/1361-6595/aa80fa}, DOI={10.1088/1361-6595/aa80fa}, number={9}, journal={Plasma Sources Science and Technology}, publisher={IOP Publishing}, author={Peterson, David J and Kraus, Philip and Chua, Thai Cheng and Larson, Lynda and Shannon, Steven C}, year={2017}, month={Aug}, pages={095002} }
 @article{talley_shannon_chen_verboncoeur_2017, title={IEDF distortion and resolution considerations for RFEA operation at high voltages}, volume={26}, ISSN={1361-6595}, url={http://dx.doi.org/10.1088/1361-6595/aa9465}, DOI={10.1088/1361-6595/aa9465}, number={12}, journal={Plasma Sources Science and Technology}, publisher={IOP Publishing}, author={Talley, M L and Shannon, S and Chen, L and Verboncoeur, J P}, year={2017}, month={Nov}, pages={125001} }
 @book{mededovic thagard_sankaran_kushner_shannon_2017, title={Science challenges in low-temperature plasma science and engineering: Enabling a future based on electricity through non-equalibrium plasma chemistry}, institution={National Science Foundation}, author={Mededovic Thagard, S. and Sankaran, M. and Kushner, M.J and Shannon, S.}, year={2017} }
 @article{tangpatjaroen_grierson_shannon_jakes_szlufarska_2017, title={Size Dependence of Nanoscale Wear of Silicon Carbide}, volume={9}, ISSN={1944-8244 1944-8252}, url={http://dx.doi.org/10.1021/acsami.6b13283}, DOI={10.1021/acsami.6b13283}, number={2}, journal={ACS Applied Materials & Interfaces}, publisher={American Chemical Society (ACS)}, author={Tangpatjaroen, Chaiyapat and Grierson, David and Shannon, Steve and Jakes, Joseph E. and Szlufarska, Izabela}, year={2017}, month={Jan}, pages={1929–1940} }
 @article{zafar_martin_shannon_isler_caughman_2016, title={A temporally and spatially resolved electron density diagnostic method for the edge plasma based on Stark broadening}, volume={87}, ISSN={0034-6748 1089-7623}, url={http://dx.doi.org/10.1063/1.4955484}, DOI={10.1063/1.4955484}, number={11}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Zafar, A. and Martin, E. H. and Shannon, S. C. and Isler, R. C. and Caughman, J. B. O.}, year={2016}, month={Jul}, pages={11E505} }
 @article{li_zhang_qiao_yu_peterson_zafar_kumar_curtarolo_hunte_shannon_et al._2016, title={All The Catalytic Active Sites of MoS2 for Hydrogen Evolution}, volume={138}, ISSN={0002-7863 1520-5126}, url={http://dx.doi.org/10.1021/jacs.6b05940}, DOI={10.1021/jacs.6b05940}, number={51}, journal={Journal of the American Chemical Society}, publisher={American Chemical Society (ACS)}, author={Li, Guoqing and Zhang, Du and Qiao, Qiao and Yu, Yifei and Peterson, David and Zafar, Abdullah and Kumar, Raj and Curtarolo, Stefano and Hunte, Frank and Shannon, Steve and et al.}, year={2016}, month={Dec}, pages={16632–16638} }
 @article{imada_ishimaru_xue_zhang_shannon_weber_2016, title={Amorphization resistance of nano-engineered SiC under heavy ion irradiation}, volume={478}, ISSN={0022-3115}, url={http://dx.doi.org/10.1016/j.jnucmat.2016.06.031}, DOI={10.1016/j.jnucmat.2016.06.031}, journal={Journal of Nuclear Materials}, publisher={Elsevier BV}, author={Imada, Kenta and Ishimaru, Manabu and Xue, Haizhou and Zhang, Yanwen and Shannon, Steven C. and Weber, William J.}, year={2016}, month={Sep}, pages={310–314} }
 @article{chen_zhang_wang_crespillo_fontana_graham_duscher_shannon_weber_2016, title={Dose dependence of helium bubble formation in nano-engineered SiC at 700 °C}, volume={472}, ISSN={0022-3115}, url={http://dx.doi.org/10.1016/j.jnucmat.2016.01.029}, DOI={10.1016/j.jnucmat.2016.01.029}, journal={Journal of Nuclear Materials}, publisher={Elsevier BV}, author={Chen, C.-H. and Zhang, Y. and Wang, Y. and Crespillo, M.L. and Fontana, C.L. and Graham, J.T. and Duscher, G. and Shannon, S.C. and Weber, W.J.}, year={2016}, month={Apr}, pages={153–160} }
 @article{lindsay_graves_shannon_2016, title={Fully coupled simulation of the plasma liquid interface and interfacial coefficient effects}, volume={49}, ISSN={0022-3727 1361-6463}, url={http://dx.doi.org/10.1088/0022-3727/49/23/235204}, DOI={10.1088/0022-3727/49/23/235204}, number={23}, journal={Journal of Physics D: Applied Physics}, publisher={IOP Publishing}, author={Lindsay, Alexander D and Graves, David B and Shannon, Steven C}, year={2016}, month={May}, pages={235204} }
 @book{shannon_eapen_maria_weber_2016, title={Novel Engineered Refractory Materials for Advanced Reactor Applications}, url={http://dx.doi.org/10.2172/1246903}, DOI={10.2172/1246903}, institution={Office of Scientific and Technical Information  (OSTI)}, author={Shannon, Steven and Eapen, Jacob and Maria, Jon-Paul and Weber, William}, year={2016}, month={Mar} }
 @article{imada_ishimaru_sato_xue_zhang_shannon_weber_2015, title={Atomistic structures of nano-engineered SiC and radiation-induced amorphization resistance}, volume={465}, ISSN={0022-3115}, url={http://dx.doi.org/10.1016/j.jnucmat.2015.06.036}, DOI={10.1016/j.jnucmat.2015.06.036}, journal={Journal of Nuclear Materials}, publisher={Elsevier BV}, author={Imada, Kenta and Ishimaru, Manabu and Sato, Kazuhisa and Xue, Haizhou and Zhang, Yanwen and Shannon, Steven and Weber, William J.}, year={2015}, month={Oct}, pages={433–437} }
 @article{zhang_zafar_coumou_shannon_kushner_2015, title={Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas}, volume={117}, ISSN={0021-8979 1089-7550}, url={http://dx.doi.org/10.1063/1.4922631}, DOI={10.1063/1.4922631}, number={23}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Zhang, Yiting and Zafar, Abdullah and Coumou, David J. and Shannon, Steven C. and Kushner, Mark J.}, year={2015}, month={Jun}, pages={233302} }
 @article{martin_goniche_klepper_hillairet_isler_bottereau_colas_ekedahl_panayotis_pegourie_et al._2015, title={Electric field determination in the plasma-antenna boundary of a lower-hybrid wave launcher in Tore Supra through dynamic Stark-effect spectroscopy}, volume={57}, ISSN={0741-3335 1361-6587}, url={http://dx.doi.org/10.1088/0741-3335/57/6/065011}, DOI={10.1088/0741-3335/57/6/065011}, number={6}, journal={Plasma Physics and Controlled Fusion}, publisher={IOP Publishing}, author={Martin, E H and Goniche, M and Klepper, C C and Hillairet, J and Isler, R C and Bottereau, C and Colas, L and Ekedahl, A and Panayotis, S and Pegourie, B and et al.}, year={2015}, month={Apr}, pages={065011} }
 @article{lindsay_anderson_slikboer_shannon_graves_2015, title={Momentum, heat, and neutral mass transport in convective atmospheric pressure plasma-liquid systems and implications for aqueous targets}, volume={48}, ISSN={0022-3727 1361-6463}, url={http://dx.doi.org/10.1088/0022-3727/48/42/424007}, DOI={10.1088/0022-3727/48/42/424007}, number={42}, journal={Journal of Physics D: Applied Physics}, publisher={IOP Publishing}, author={Lindsay, Alexander and Anderson, Carly and Slikboer, Elmar and Shannon, Steven and Graves, David}, year={2015}, month={Sep}, pages={424007} }
 @book{kushner_adamovich_aydil_baalrud_barnat_graves_donnelly_economou_eden_gekelman_et al._2014, title={A low temperature plasma science program: Discovery science for societal benefit}, journal={FESAC Strategic Planning Panel}, author={Kushner, M.J and Adamovich, Igor and Aydil, Eray and Baalrud, Scott D. and Barnat, Edward and Graves, David B. and Donnelly, Vincent and Economou, Demetre J. and Eden, J. Gary and Gekelman, Walter and et al.}, year={2014} }
 @article{zhang_varga_ishimaru_edmondson_xue_liu_moll_namavar_hardiman_shannon_et al._2014, title={Competing effects of electronic and nuclear energy loss on microstructural evolution in ionic-covalent materials}, volume={327}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/j.nimb.2013.10.095}, DOI={10.1016/j.nimb.2013.10.095}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Zhang, Y. and Varga, T. and Ishimaru, M. and Edmondson, P.D. and Xue, H. and Liu, P. and Moll, S. and Namavar, F. and Hardiman, C. and Shannon, S. and et al.}, year={2014}, month={May}, pages={33–43} }
 @article{jamison_zheng_shannon_allen_morgan_szlufarska_2014, title={Experimental and ab initio study of enhanced resistance to amorphization of nanocrystalline silicon carbide under electron irradiation}, volume={445}, ISSN={0022-3115}, url={http://dx.doi.org/10.1016/j.jnucmat.2013.11.010}, DOI={10.1016/j.jnucmat.2013.11.010}, number={1-3}, journal={Journal of Nuclear Materials}, publisher={Elsevier BV}, author={Jamison, Laura and Zheng, Ming-Jie and Shannon, Steve and Allen, Todd and Morgan, Dane and Szlufarska, Izabela}, year={2014}, month={Feb}, pages={181–189} }
 @article{lindsay_byrns_king_andhvarapou_fields_knappe_fonteno_shannon_2014, title={Fertilization of Radishes, Tomatoes, and Marigolds Using a Large-Volume Atmospheric Glow Discharge}, volume={34}, ISSN={0272-4324 1572-8986}, url={http://dx.doi.org/10.1007/s11090-014-9573-x}, DOI={10.1007/s11090-014-9573-x}, number={6}, journal={Plasma Chemistry and Plasma Processing}, publisher={Springer Science and Business Media LLC}, author={Lindsay, Alex and Byrns, Brandon and King, Wesley and Andhvarapou, Asish and Fields, Jeb and Knappe, Detlef and Fonteno, William and Shannon, Steven}, year={2014}, month={Aug}, pages={1271–1290} }
 @article{coumou_clark_kummerer_hopkins_sullivan_shannon_2014, title={Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive}, volume={42}, ISSN={0093-3813 1939-9375}, url={http://dx.doi.org/10.1109/TPS.2014.2326600}, DOI={10.1109/tps.2014.2326600}, number={7}, journal={IEEE Transactions on Plasma Science}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Coumou, David J. and Clark, David Hamilton and Kummerer, Theresa and Hopkins, Michael and Sullivan, Donal and Shannon, Steven}, year={2014}, month={Jul}, pages={1880–1893} }
 @article{chen_zhang_fu_wang_crespillo_liu_shannon_weber_2014, title={Irradiation-induced microstructural change in helium-implanted single crystal and nano-engineered SiC}, volume={453}, ISSN={0022-3115}, url={http://dx.doi.org/10.1016/j.jnucmat.2014.07.020}, DOI={10.1016/j.jnucmat.2014.07.020}, number={1-3}, journal={Journal of Nuclear Materials}, publisher={Elsevier BV}, author={Chen, C.H. and Zhang, Y. and Fu, E. and Wang, Y. and Crespillo, M.L. and Liu, C. and Shannon, S. and Weber, W.J.}, year={2014}, month={Oct}, pages={280–286} }
 @article{klepper_martin_isler_colas_goniche_hillairet_panayotis_pegourié_jacquot_lotte_et al._2014, title={Probing the plasma near high power wave launchers in fusion devices for static and dynamic electric fields (invited)}, volume={85}, ISSN={0034-6748 1089-7623}, url={http://dx.doi.org/10.1063/1.4890247}, DOI={10.1063/1.4890247}, number={11}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Klepper, C. C. and Martin, E. H. and Isler, R. C. and Colas, L. and Goniche, M. and Hillairet, J. and Panayotis, S. and Pegourié, B. and Jacquot, J. and Lotte, Ph. and et al.}, year={2014}, month={Nov}, pages={11E301} }
 @article{jamison_sridharan_shannon_szlufarska_2014, title={Temperature and irradiation species dependence of radiation response of nanocrystalline silicon carbide}, volume={29}, ISSN={0884-2914 2044-5326}, url={http://dx.doi.org/10.1557/jmr.2014.340}, DOI={10.1557/jmr.2014.340}, abstractNote={Abstract}, number={23}, journal={Journal of Materials Research}, publisher={Cambridge University Press (CUP)}, author={Jamison, Laura and Sridharan, Kumar and Shannon, Steve and Szlufarska, Izabela}, year={2014}, month={Dec}, pages={2871–2880} }
 @article{ishimaru_zhang_shannon_weber_2013, title={Origin of radiation tolerance in 3C-SiC with nanolayered planar defects}, volume={103}, ISSN={0003-6951 1077-3118}, url={http://dx.doi.org/10.1063/1.4813593}, DOI={10.1063/1.4813593}, number={3}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Ishimaru, Manabu and Zhang, Yanwen and Shannon, Steven and Weber, William J.}, year={2013}, month={Jul}, pages={033104} }
 @misc{vineet_karl_a_j_c_a_d_2013, title={Substrate Cleaning Chamber And Cleaning And Conditioning Methods}, number={US 8435379 B2}, author={Vineet, Mehta and Karl, Brown and A, Pipitone John and J, Hoffman Daniel and C, Shannon Steven and A, Miller Keith and D, Parkhe Vijay}, year={2013}, month={May} }
 @article{byrns_wooten_lindsay_shannon_2012, title={A VHF driven coaxial atmospheric air plasma: electrical and optical characterization}, volume={45}, ISSN={0022-3727 1361-6463}, url={http://dx.doi.org/10.1088/0022-3727/45/19/195204}, DOI={10.1088/0022-3727/45/19/195204}, number={19}, journal={Journal of Physics D: Applied Physics}, publisher={IOP Publishing}, author={Byrns, Brandon and Wooten, Daniel and Lindsay, Alexander and Shannon, Steven}, year={2012}, month={Apr}, pages={195204} }
 @article{zhang_ishimaru_varga_oda_hardiman_xue_katoh_shannon_weber_2012, title={Nanoscale engineering of radiation tolerant silicon carbide}, volume={14}, ISSN={1463-9076 1463-9084}, url={http://dx.doi.org/10.1039/C2CP42342A}, DOI={10.1039/c2cp42342a}, number={38}, journal={Physical Chemistry Chemical Physics}, publisher={Royal Society of Chemistry (RSC)}, author={Zhang, Yanwen and Ishimaru, Manabu and Varga, Tamas and Oda, Takuji and Hardiman, Chris and Xue, Haizhou and Katoh, Yutai and Shannon, Steven and Weber, William J.}, year={2012}, pages={13429} }
 @inbook{shannon_2012, place={Boca Raton FL}, title={Plasma-Assisted Pattern Transfer at the Nanoscale}, booktitle={Nanofabrication Handbook}, publisher={CRC Press Taylor and Francis Group}, author={Shannon, S.}, editor={Cabrini, Stephano and Kawata, SatoshiEditors}, year={2012}, pages={111–126} }
 @article{saghir_shannon_2012, title={The impact of Langmuir probe geometries on electron current collection and the integral relation for obtaining electron energy distribution functions}, volume={21}, ISSN={0963-0252 1361-6595}, url={http://dx.doi.org/10.1088/0963-0252/21/2/025003}, DOI={10.1088/0963-0252/21/2/025003}, number={2}, journal={Plasma Sources Science and Technology}, publisher={IOP Publishing}, author={Saghir, Ahmed El and Shannon, Steven}, year={2012}, month={Mar}, pages={025003} }
 @misc{improving plasma process uniformity across a wafer by apportioning power among plural vhf sources_2011, number={US 7879731 B2}, year={2011}, month={Feb} }
 @article{el saghir_shannon_2011, title={Limitations of Regularization Methods for the Reconstruction of Electron Velocity Distribution Function}, volume={39}, ISSN={0093-3813 1939-9375}, url={http://dx.doi.org/10.1109/TPS.2011.2125970}, DOI={10.1109/tps.2011.2125970}, number={4}, journal={IEEE Transactions on Plasma Science}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={El Saghir, A and Shannon, S}, year={2011}, month={Apr}, pages={1034–1037} }
 @misc{method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity_2011, number={US 7968469 B2}, year={2011}, month={Jun} }
 @misc{plasma process uniformity across a wafer by apportioning ground return path impedances among plural vhf sources_2011, number={US 7884025 B2}, year={2011}, month={Feb} }
 @misc{plasma process uniformity across a wafer by controlling a variable frequency coupled to a harmonic resonator_2011, number={US 8080479 B2}, year={2011}, month={Dec} }
 @misc{plasma process uniformity across a wafer by controlling rf phase between opposing electrodes_2011, number={US 8076247 B2}, year={2011}, month={Dec} }
 @article{el saghir_shannon_2011, title={Reduction of EEDF Measurement Distortion in Regularized Solutions of the Druyvesteyn Relation}, volume={39}, ISSN={0093-3813 1939-9375}, url={http://dx.doi.org/10.1109/TPS.2010.2090906}, DOI={10.1109/tps.2010.2090906}, number={1}, journal={IEEE Transactions on Plasma Science}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={El Saghir, Ahmed and Shannon, Steven}, year={2011}, month={Jan}, pages={596–602} }
 @article{el saghir_kennedy_shannon_2010, title={Electron Energy Distribution Function Extraction Using Integrated Step Function Response and Regularization Methods}, volume={38}, ISSN={0093-3813 1939-9375}, url={http://dx.doi.org/10.1109/TPS.2009.2036013}, DOI={10.1109/tps.2009.2036013}, number={2}, journal={IEEE Transactions on Plasma Science}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={El Saghir, A. and Kennedy, C. and Shannon, S.}, year={2010}, month={Feb}, pages={156–162} }
 @misc{c_2010, title={Method For Testing Plasma Reactor Multi-frequency Impedance Match Networks}, number={US 7812278 B2}, author={C, Shannon Steven}, year={2010}, month={Oct} }
 @misc{c_s_theodoros_j_g_s_alexander_jingbao_taeho_y_2010, title={Plasma Control Using Dual Cathode Frequency Mixing}, number={US 7838430 B2}, author={C, Shannon Steven and S, Grimard Dennis and Theodoros, Panagopoulos and J, Hoffman Daniel and G, Chafin Michael and S, Detrick Troy and Alexander, Paterson and Jingbao, Liu and Taeho, Shin and Y, Pu Bryan}, year={2010}, month={Nov} }
 @article{shannon_kinder_paterson_rauf_ventzek_2009, title={Guest Editorial Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing}, volume={37}, ISSN={0093-3813 1939-9375}, url={http://dx.doi.org/10.1109/TPS.2009.2027934}, DOI={10.1109/tps.2009.2027934}, number={9}, journal={IEEE Transactions on Plasma Science}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Shannon, Steven and Kinder, Ron and Paterson, Alex and Rauf, Shahid and Ventzek, Peter L. G.}, year={2009}, month={Sep}, pages={1662–1664} }
 @misc{c_alexander_theodoros_p_s_j_2009, title={Plasma Generation And Control Using Dual Frequency Rf Signals}, number={US 7510665 B2}, author={C, Shannon Steven and Alexander, Paterson and Theodoros, Panagopoulos and P, Holland John and S, Grimard Dennis and J, Hoffman Daniel}, year={2009}, month={Mar} }
 @article{shannon_kinder_paterson_rauf_ventzek_2009, title={Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing}, volume={37}, DOI={10.1109/TPS.2009.2027934}, number={9}, journal={Ieee Transactions on Plasma Science}, author={Shannon, Steven and Kinder, Ron and Paterson, Alex and Rauf, Shahid and Ventzek, Peter L. G.}, year={2009}, pages={1662–1664} }
 @misc{gyoo_j_c_h_wonseok_kwang-soo_2008, title={Dual Bias Frequency Plasma Reactor With Feedback Control Of E.s.c. Voltage Using Wafer Voltage Measurement At The Bias Supply Output}, number={US 7359177 B2}, author={Gyoo, Yang Jang and J, Hoffman Daniel and C, Shannon Steven and H, Burns Douglas and Wonseok, Lee and Kwang-soo, Kim}, year={2008}, month={Apr} }
 @misc{gyoo_j_c_h_wonseok_kwang-soo_2008, title={Method Of Feedback Control Of Esc Voltage Using Wafer Voltage Measurement At The Bias Supply Output}, number={US 7375947 B2}, author={Gyoo, Yang Jang and J, Hoffman Daniel and C, Shannon Steven and H, Burns Douglas and Wonseok, Lee and Kwang-soo, Kim}, year={2008}, month={May} }
 @misc{c_alex_theodoros_p_dennis_yashushi_2008, title={Plasma Generation And Control Using A Dual Frequency Rf Source}, number={US 7431857 B2}, author={C, Shannon Steven and Alex, Paterson and Theodoros, Panagopoulos and P, Holland John and Dennis, Grimard and Yashushi, Takakura}, year={2008}, month={Oct} }
 @article{carter_hoffman_shannon_ryan_buchberger_2007, title={Global Modeling of Magnetized Capacitive Discharges}, volume={35}, ISSN={0093-3813}, url={http://dx.doi.org/10.1109/TPS.2007.906124}, DOI={10.1109/TPS.2007.906124}, number={5}, journal={IEEE Transactions on Plasma Science}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Carter, Mark D. and Hoffman, Dan and Shannon, Steve and Ryan, Philip M. and Buchberger, D.}, year={2007}, month={Oct}, pages={1413–1419} }
 @misc{c_s_theodoros_j_g_s_alexander_jingbao_taeho_y_2007, title={Plasma Control Using Dual Cathode Frequency Mixing}, number={US 2007/0000611 A1}, author={C, Shannon Steven and S, Grimard Dennis and Theodoros, Panagopoulos and J, Hoffman Daniel and G, Chafin Michael and S, Detrick Troy and Alexander, Paterson and Jingbao, Liu and Taeho, Shin and Y, Pu Bryan}, year={2007}, month={Jan} }
 @misc{c_alex_theodoros_p_dennis_yashushi_2007, title={Plasma Generation And Control Using A Dual Frequency Rf Source}, number={US 2007/0006971 A1}, author={C, Shannon Steven and Alex, Paterson and Theodoros, Panagopoulos and P, Holland John and Dennis, Grimard and Yashushi, Takakura}, year={2007}, month={Jan} }
 @misc{c_alexander_theodoros_p_s_j_2006, title={Plasma Generation And Control Using Dual Frequency Rf Signals}, number={US 2006/0266735 A1}, author={C, Shannon Steven and Alexander, Paterson and Theodoros, Panagopoulos and P, Holland John and S, Grimard Dennis and J, Hoffman Daniel}, year={2006}, month={Nov} }
 @article{bera_hoffman_shannon_delgadino_ye_2005, title={Frequency optimization for capacitively coupled plasma source}, volume={33}, ISSN={0093-3813}, url={http://dx.doi.org/10.1109/TPS.2005.845934}, DOI={10.1109/TPS.2005.845934}, number={2}, journal={IEEE Transactions on Plasma Science}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Bera, K. and Hoffman, D. and Shannon, S. and Delgadino, G. and Ye, Yan}, year={2005}, month={Apr}, pages={382–383} }
 @misc{c_s_theodoros_j_g_s_alexander_jingbao_taeho_y_2005, title={Plasma Control Using Dual Cathode Frequency Mixing}, number={US 2005/0090118 A1}, author={C, Shannon Steven and S, Grimard Dennis and Theodoros, Panagopoulos and J, Hoffman Daniel and G, Chafin Michael and S, Detrick Troy and Alexander, Paterson and Jingbao, Liu and Taeho, Shin and Y, Pu Bryan}, year={2005}, month={Apr} }
 @misc{c_alex_theodoros_p_dennis_yashushi_2005, title={Plasma Generation And Control Using A Dual Frequency Rf Source}, number={US 2005/0034816 A1}, author={C, Shannon Steven and Alex, Paterson and Theodoros, Panagopoulos and P, Holland John and Dennis, Grimard and Yashushi, Takakura}, year={2005}, month={Feb} }
 @article{shannon_hoffman_yang_paterson_holland_2005, title={The impact of frequency mixing on sheath properties: Ion energy distribution and Vdc∕Vrf interaction}, volume={97}, ISSN={0021-8979 1089-7550}, url={http://dx.doi.org/10.1063/1.1905798}, DOI={10.1063/1.1905798}, number={10}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Shannon, Steven and Hoffman, Daniel and Yang, Jang-Gyoo and Paterson, Alex and Holland, John}, year={2005}, month={May}, pages={103304} }
 @article{holloway_shannon_sepke_brake_2001, title={A reconstruction algorithm for a spatially resolved plasma optical emission spectroscopy sensor}, volume={68}, ISSN={0022-4073}, url={http://dx.doi.org/10.1016/S0022-4073(00)00017-0}, DOI={10.1016/S0022-4073(00)00017-0}, number={1}, journal={Journal of Quantitative Spectroscopy and Radiative Transfer}, publisher={Elsevier BV}, author={Holloway, James Paul and Shannon, Steve and Sepke, Scott M. and Brake, M.L.}, year={2001}, month={Jan}, pages={101–115} }
 @article{collard_shannon_holloway_brake_2000, title={Optical emission reference data for the GEC reference cell}, volume={28}, ISSN={0093-3813}, url={http://dx.doi.org/10.1109/27.902246}, DOI={10.1109/27.902246}, number={6}, journal={IEEE Transactions on Plasma Science}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Collard, C. and Shannon, S. and Holloway, J.P. and Brake, M.L.}, year={2000}, pages={2187–2193} }
 @article{shannon_holloway_brake_1999, title={Spatially resolved fluorine actinometry}, volume={17}, ISSN={0734-2101 1520-8559}, url={http://dx.doi.org/10.1116/1.581933}, DOI={10.1116/1.581933}, number={5}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, publisher={American Vacuum Society}, author={Shannon, Steven and Holloway, James Paul and Brake, M. L.}, year={1999}, month={Sep}, pages={2703–2708} }
 @article{shannon_holloway_flippo_brake_1997, title={A spatially resolved optical emission sensor for plasma etch monitoring}, volume={71}, ISSN={0003-6951 1077-3118}, url={http://dx.doi.org/10.1063/1.119938}, DOI={10.1063/1.119938}, number={11}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Shannon, Steven and Holloway, James Paul and Flippo, Kirk and Brake, M. L.}, year={1997}, month={Sep}, pages={1467–1468} }
 @phdthesis{shannon, title={A Glow Discharge Tomography Sensor for Monitoring Etch Uniformity}, author={Shannon, S.} }
 @phdthesis{shannon, title={Spatially resolved analysis of plasma etch discharges using a novel optical emission spectroscopy sensor}, author={Shannon, S.} }