@article{stein_khachariya_mecouch_mita_reddy_tweedie_sierakowski_kamler_bockowski_kohn_et al._2023, title={Analysis of Vertical GaN JBS and p-n Diodes by Mg Ion Implantation and Ultrahigh-Pressure Annealing}, volume={12}, ISSN={["1557-9646"]}, url={https://doi.org/10.1109/TED.2023.3339592}, DOI={10.1109/TED.2023.3339592}, abstractNote={We report on vertical GaN junction barrier Schottky (JBS) diodes formed by Mg ion implantation and ultrahigh -pressure annealing (UHPA). The static ON-state characteristics of the diodes show an ideality factor of 1.05, a turn-on voltage of ~0.7 V, a current rectification ratio of $\sim 10^{11}$ , and a low differential specific ON-resistance that scales with Schottky stripe width in fair agreement with the analytical model. The reverse leakage dependence on Schottky stripe width also agrees well with the analytical model. Implanted p-n junction diodes fabricated on the same wafer exhibit avalanche breakdown in reverse bias with a positive temperature coefficient, but the forward current is limited by a series barrier. Temperature-dependent current–voltage measurements of th p-n diodes verify the presence of the implanted p-n junction and reveal an additional 0.43-eV barrier, which we hypothesize arises from a p-Schottky contact and forms a second diode back-to-back with the p-n junction. This interpretation is supported by analysis of the capacitance–voltage characteristics of the implanted p-n diodes, epitaxial p-n diodes fabricated with intentional p-Schottky contacts, and comparison to TCAD simulations. Ultimately, the presence of the p-Schottky contact does not hinder JBS diode operation. The use of diffusion-aware designs and/or diffusion reduction represents future directions for Mg implantation technology in GaN power devices.}, journal={IEEE TRANSACTIONS ON ELECTRON DEVICES}, author={Stein, Shane R. and Khachariya, Dolar and Mecouch, Will and Mita, Seiji and Reddy, Pramod and Tweedie, James and Sierakowski, Kacper and Kamler, Grzegorz and Bockowski, Michal and Kohn, Erhard and et al.}, year={2023}, month={Dec} }
 @article{rathkanthiwar_reddy_quinones_loveless_kamiyama_bagheri_khachariya_eldred_moody_mita_et al._2023, title={Anderson transition in compositionally graded p-AlGaN}, volume={134}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/5.0176419}, DOI={10.1063/5.0176419}, abstractNote={Mg-doped, graded AlGaN films showed the formation of an impurity band and high, temperature-invariant p-conductivity even for doping levels well below the Mott transition. However, compensating point defects disrupted the impurity band, resulting in an Anderson transition from the impurity band to valence band conduction and a more than tenfold reduction in room-temperature conductivity. This is the first demonstration of Anderson-like localization in AlGaN films.}, number={19}, journal={JOURNAL OF APPLIED PHYSICS}, author={Rathkanthiwar, Shashwat and Reddy, Pramod and Quinones, Cristyan E. and Loveless, James and Kamiyama, Masahiro and Bagheri, Pegah and Khachariya, Dolar and Eldred, Tim and Moody, Baxter and Mita, Seiji and et al.}, year={2023}, month={Nov} }
 @article{quinones_khachariya_bagheri_reddy_mita_kirste_rathkanthiwar_tweedie_pavlidis_kohn_et al._2023, title={Demonstration of near-ideal Schottky contacts to Si-doped AlN}, volume={123}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/5.0174524}, DOI={10.1063/5.0174524}, abstractNote={Near-ideal behavior in Schottky contacts to Si-doped AlN was observed as evidenced by a low ideality factor of 1.5 at room temperature. A temperature-independent Schottky barrier height of 1.9 eV was extracted from temperature-dependent I–V measurements. An activation energy of ∼300 meV was observed in the series resistance, which corresponded to the ionization energy of the deep Si donor state. Both Ohmic and Schottky contacts were stable up to 650 °C, with around four orders of magnitude rectification at this elevated temperature. These results demonstrate the potential of AlN as a platform for power devices capable of operating in extreme environments.}, number={17}, journal={APPLIED PHYSICS LETTERS}, author={Quinones, C. E. and Khachariya, D. and Bagheri, P. and Reddy, P. and Mita, S. and Kirste, R. and Rathkanthiwar, S. and Tweedie, J. and Pavlidis, S. and Kohn, E. and et al.}, year={2023}, month={Oct} }
 @article{bagheri_quinones-garcia_khachariya_loveless_guan_rathkanthiwar_reddy_kirste_mita_tweedie_et al._2023, title={High conductivity in Ge-doped AlN achieved by a non-equilibrium process}, volume={122}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/5.0146439}, DOI={10.1063/5.0146439}, abstractNote={Highly conductive Ge-doped AlN with conductivity of 0.3 (Ω cm)−1 and electron concentration of 2 × 1018 cm−3 was realized via a non-equilibrium process comprising ion implantation and annealing at a moderate thermal budget. Similar to a previously demonstrated shallow donor state in Si-implanted AlN, Ge implantation also showed a shallow donor behavior in AlN with an ionization energy ∼80 meV. Ge showed a 3× higher conductivity than its Si counterpart for a similar doping level. Photoluminescence spectroscopy indicated that higher conductivity for Ge-doped AlN was achieved primarily due to lower compensation. This is the highest n-type conductivity reported for AlN doped with Ge to date and demonstration of technologically useful conductivity in Ge-doped AlN.}, number={14}, journal={APPLIED PHYSICS LETTERS}, author={Bagheri, Pegah and Quinones-Garcia, Cristyan and Khachariya, Dolar and Loveless, James and Guan, Yan and Rathkanthiwar, Shashwat and Reddy, Pramod and Kirste, Ronny and Mita, Seiji and Tweedie, James and et al.}, year={2023}, month={Apr} }
 @article{rathkanthiwar_reddy_moody_quinones-garcia_bagheri_khachariya_dalmau_mita_kirste_collazo_et al._2023, title={High p-conductivity in AlGaN enabled by polarization field engineering}, volume={122}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/5.0143427}, DOI={10.1063/5.0143427}, abstractNote={High p-conductivity (0.7 Ω−1 cm−1) was achieved in high-Al content AlGaN via Mg doping and compositional grading. A clear transition between the valence band and impurity band conduction mechanisms was observed. The transition temperature depended strongly on the compositional gradient and to some degree on the Mg doping level. A model is proposed to explain the role of the polarization field in enhancing the conductivity in Mg-doped graded AlGaN films and the transition between the two conduction types. This study offers a viable path to technologically useful p-conductivity in AlGaN.}, number={15}, journal={APPLIED PHYSICS LETTERS}, author={Rathkanthiwar, Shashwat and Reddy, Pramod and Moody, Baxter and Quinones-Garcia, Cristyan and Bagheri, Pegah and Khachariya, Dolar and Dalmau, Rafael and Mita, Seiji and Kirste, Ronny and Collazo, Ramon and et al.}, year={2023}, month={Apr} }
 @article{stein_khachariya_mita_breckenridge_tweedie_reddy_sierakowski_kamler_bockowski_kohn_et al._2023, title={Schottky contacts on ultra-high-pressure-annealed GaN with high rectification ratio and near-unity ideality factor}, volume={16}, ISSN={["1882-0786"]}, DOI={10.35848/1882-0786/acc443}, abstractNote={We investigate the electrical characteristics of Ni Schottky contacts on n-type GaN films that have undergone ultra-high-pressure annealing (UHPA), a key processing step for activating implanted Mg. Contacts deposited on these films exhibit low rectification and high leakage current compared to contacts on as-grown films. By employing an optimized surface treatment to restore the GaN surface following UHPA, we obtain Schottky contacts with a high rectification ratio of ∼109, a near-unity ideality factor of 1.03, and a barrier height of ∼0.9 eV. These characteristics enable the development of GaN junction barrier Schottky diodes employing Mg implantation and UHPA.}, number={3}, journal={APPLIED PHYSICS EXPRESS}, author={Stein, Shane R. and Khachariya, Dolar and Mita, Seiji and Breckenridge, M. Hayden and Tweedie, James and Reddy, Pramod and Sierakowski, Kacper and Kamler, Grzegorz and Bockowski, Michal and Kohn, Erhard and et al.}, year={2023}, month={Mar} }
 @article{wang_kirste_mita_washiyama_mecouch_reddy_collazo_sitar_2022, title={<p>The role of Ga supersaturation on facet formation in the epitaxial lateral overgrowth of GaN</p>}, volume={120}, ISSN={["1077-3118"]}, DOI={10.1063/5.0077628}, abstractNote={In this paper, facet formation of (0001) {112¯0} {112¯2} facets during epitaxial lateral overgrowth (ELO) of GaN is investigated for different Ga vapor supersaturations. The ELO was conducted via metalorganic chemical vapor deposition on patterned GaN/sapphire templates with SiO2 masks aligned along the ⟨11¯00⟩ direction of GaN. Scanning electron microscopy was used to characterize the cross section shapes of the ELO GaN islands. A correlation of supersaturation, facet formation, and the shape of the ELO GaN islands is found. It is shown that {112¯2} facets are favored under high Ga vapor supersaturation, while {112¯0} facets are favored under low Ga vapor supersaturation. A qualitative model based on Wulff construction and density functional theory calculation is proposed to illustrate the mechanism of the facet formation of the ELO GaN islands.}, number={3}, journal={APPLIED PHYSICS LETTERS}, author={Wang, Ke and Kirste, Ronny and Mita, Seiji and Washiyama, Shun and Mecouch, Will and Reddy, Pramod and Collazo, Ramon and Sitar, Zlatko}, year={2022}, month={Jan} }
 @article{rathkanthiwar_graziano_tweedie_mita_kirste_collazo_sitar_2022, title={Crystallographic Tilt in Aluminum Gallium Nitride Epilayers Grown on Miscut Aluminum Nitride Substrates}, volume={10}, ISSN={["1862-6270"]}, DOI={10.1002/pssr.202200323}, abstractNote={Heteroepitaxial crystallographic tilt has been investigated as a possible strain‐relief mechanism in Al‐rich (Al>50%) AlGaN heteroepitaxial layers grown on single‐crystal (0001) AlN substrates with varying miscuts from 0.05° to 4.30°. The magnitude of the elastic lattice deformation‐induced tilt increases monotonically with the miscut angle, tightly following the Nagai tilt model. Although tilt angles as high as 0.1° are recorded, reciprocal space mapping (RSM) broadening and wafer bow measurements do not show any significant changes as a function of the heteroepitaxial tilt angle. While crystallographic tilting has been shown to be effective in controlling strain in some other heteroepitaxial systems, it does not provide any appreciable strain relief of the compressive strain in AlGaN/AlN heteroepitaxy.}, journal={PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS}, author={Rathkanthiwar, Shashwat and Graziano, Milena B. and Tweedie, James and Mita, Seiji and Kirste, Ronny and Collazo, Ramon and Sitar, Zlatko}, year={2022}, month={Oct} }
 @article{bagheri_klump_washiyama_breckenridge_kim_guan_khachariya_quinones-garcia_sarkar_rathkanthiwar_et al._2022, title={Doping and compensation in heavily Mg doped Al-rich AlGaN films}, volume={120}, ISSN={["1077-3118"]}, DOI={10.1063/5.0082992}, abstractNote={Record low resistivities of 10 and 30 Ω cm and room-temperature free hole concentrations as high as 3 × 1018 cm−3 were achieved in bulk doping of Mg in Al0.6Ga0.4N films grown on AlN single crystalline wafer and sapphire. The highly conductive films exhibited a low ionization energy of 50 meV and impurity band conduction. Both high Mg concentration (>2 × 1019 cm−3) and low compensation were required to achieve impurity band conduction and high p-type conductivity. The formation of VN-related compensators was actively suppressed by chemical potential control during the deposition process. This work overcomes previous limitations in p-type aluminum gallium nitride (p-AlGaN) and offers a technologically viable solution to high p-conductivity in AlGaN and AlN.}, number={8}, journal={APPLIED PHYSICS LETTERS}, author={Bagheri, Pegah and Klump, Andrew and Washiyama, Shun and Breckenridge, M. Hayden and Kim, Ji Hyun and Guan, Yan and Khachariya, Dolar and Quinones-Garcia, Cristyan and Sarkar, Biplab and Rathkanthiwar, Shashwat and et al.}, year={2022}, month={Feb} }
 @article{bagheri_quinones-garcia_khachariya_rathkanthiwar_reddy_kirste_mita_tweedie_collazo_sitar_2022, title={High electron mobility in AlN:Si by point and extended defect management}, volume={132}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/5.0124589}, DOI={10.1063/5.0124589}, abstractNote={High room temperature n-type mobility, exceeding 300 cm2/Vs, was demonstrated in Si-doped AlN. Dislocations and CN−1 were identified as the main compensators for AlN grown on sapphire and AlN single crystalline substrates, respectively, limiting the lower doping limit and mobility. Once the dislocation density was reduced by the growth on AlN wafers, C-related compensation could be reduced by controlling the process supersaturation and Fermi level during growth. While the growth on sapphire substrates supported only high doping ([Si] > 5 × 1018 cm−3) and low mobility (∼20 cm2/Vs), growth on AlN with proper compensation management enabled controlled doping at two orders of magnitude lower dopant concentrations. This work is of crucial technological importance because it enables the growth of drift layers for AlN-based power devices.}, number={18}, journal={JOURNAL OF APPLIED PHYSICS}, author={Bagheri, Pegah and Quinones-Garcia, Cristyan and Khachariya, Dolar and Rathkanthiwar, Shashwat and Reddy, Pramod and Kirste, Ronny and Mita, Seiji and Tweedie, James and Collazo, Ramon and Sitar, Zlatko}, year={2022}, month={Nov} }
 @article{reddy_mecouch_breckenridge_khachariya_bagheri_kim_guan_mita_moody_tweedie_et al._2022, title={Large-Area, Solar-Blind, Sub-250 nm Detection AlGaN Avalanche Photodiodes Grown on AlN Substrates}, volume={3}, ISSN={["1862-6270"]}, url={https://doi.org/10.1002/pssr.202100619}, DOI={10.1002/pssr.202100619}, abstractNote={Herein, Al‐rich AlGaN‐based avalanche photodiodes (APDs) grown on single crystal AlN substrates high ultraviolet‐C sensitivity for λ < 200 nm are fabricated, while exhibiting blindness to λ > 250 nm. A maximum quantum efficiency of 68% and peak gain of 320 000 are estimated resulting in a figure of merit of ≈220 000 in devices with ϕ = 100 μm. As expected, a decrease in gain with increase in device size is observed and a gain of ≈20 000 is estimated in devices with ϕ = 400 μm. Overall, two orders of magnitude higher performance are observed in APDs on single crystal AlN substrates compared to those on sapphire.}, journal={PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS}, publisher={Wiley}, author={Reddy, Pramod and Mecouch, Will and Breckenridge, M. Hayden and Khachariya, Dolar and Bagheri, Pegah and Kim, Ji Hyun and Guan, Yan and Mita, Seiji and Moody, Baxter and Tweedie, James and et al.}, year={2022}, month={Mar} }
 @article{rathkanthiwar_szymanski_khachariya_bagheri_kim_mita_reddy_kohn_pavlidis_kirste_et al._2022, title={Low resistivity, p-type, N-Polar GaN achieved by chemical potential control}, volume={15}, ISSN={["1882-0786"]}, DOI={10.35848/1882-0786/ac8273}, abstractNote={We report on low resistivity (1.1 Ω cm) in p-type bulk doping of N-polar GaN grown by metalorganic chemical vapor deposition. High nitrogen chemical potential growth, facilitated by high process supersaturation, was instrumental in reducing the incorporation of compensating oxygen as well as nitrogen-vacancy-related point defects. This was confirmed by photoluminescence studies and temperature-dependent Hall effect measurements. The suppressed compensation led to an order of magnitude improvement in p-type conductivity with the room-temperature hole concentration and mobility measuring 6 × 1017 cm−3 and 9 cm2 V−1 s−1, respectively. These results are paramount in the pathway towards N-polar GaN power and optoelectronic devices.}, number={8}, journal={APPLIED PHYSICS EXPRESS}, author={Rathkanthiwar, Shashwat and Szymanski, Dennis and Khachariya, Dolar and Bagheri, Pegah and Kim, Ji Hyun and Mita, Seiji and Reddy, Pramod and Kohn, Erhard and Pavlidis, Spyridon and Kirste, Ronny and et al.}, year={2022}, month={Aug} }
 @article{jadhav_bagheri_klump_khachariya_mita_reddy_rathkanthiwar_kirste_collazo_sitar_et al._2022, title={On electrical analysis of Al-rich p-AlGaN films for III-nitride UV light emitters}, volume={37}, ISSN={["1361-6641"]}, url={https://doi.org/10.1088/1361-6641/ac3710}, DOI={10.1088/1361-6641/ac3710}, abstractNote={In this work, an alternative scheme to estimate the resistivity and ionization energy of Al-rich p-AlGaN epitaxial films is developed using two large-area ohmic contacts. Accordingly, the resistivities measured using current–voltage measurements were observed to corroborate the Hall measurements in the Van der Pauw configuration. A free hole concentration of ∼1.5 × 1017 cm−3 and low ionization energy of ∼65 meV in Mg-doped Al0.7Ga0.3N films is demonstrated. Nearly an order of magnitude lower hydrogen concentration than Mg in the as-grown AlGaN films is thought to reduce the Mg passivation and enable higher hole concentrations in Al-rich p-AlGaN films, compared to p-GaN films. The alternate methodology proposed in this work is expected to provide a simpler pathway to evaluate the electrical characteristics of Al-rich p-AlGaN films for future III-nitride ultraviolet light emitters.}, number={1}, journal={SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, publisher={IOP Publishing}, author={Jadhav, Aakash and Bagheri, Pegah and Klump, Andrew and Khachariya, Dolar and Mita, Seiji and Reddy, Pramod and Rathkanthiwar, Shashwat and Kirste, Ronny and Collazo, Ramon and Sitar, Zlatko and et al.}, year={2022}, month={Jan} }
 @article{rathkanthiwar_bagheri_khachariya_mita_pavlidis_reddy_kirste_tweedie_sitar_collazo_2022, title={Point-defect management in homoepitaxially grown Si-doped GaN by MOCVD for vertical power devices}, volume={15}, ISSN={["1882-0786"]}, DOI={10.35848/1882-0786/ac6566}, abstractNote={We demonstrate controlled Si doping in the low doping range of 5 × 1015–2.5 × 1016 cm−3 with mobility >1000 cm2 V−1 s−1 in GaN films grown by metalorganic chemical vapor deposition. The carbon-related compensation and mobility collapse were prevented by controlling the electrochemical potential near the growth surface via chemical potential control (CPC) and defect quasi-Fermi level (dQFL) point-defect management techniques. While the CPC was targeted to reduce the net CN concentration, the dQFL control was used to reduce the fraction of C atoms with the compensating configuration, i.e. CN−1. The low compensating acceptor concentration was confirmed via temperature-dependent Hall effect analysis and capacitance–voltage measurements.}, number={5}, journal={APPLIED PHYSICS EXPRESS}, author={Rathkanthiwar, Shashwat and Bagheri, Pegah and Khachariya, Dolar and Mita, Seiji and Pavlidis, Spyridon and Reddy, Pramod and Kirste, Ronny and Tweedie, James and Sitar, Zlatko and Collazo, Ramon}, year={2022}, month={May} }
 @article{rathkanthiwar_dycus_mita_kirste_tweedie_collazo_sitar_2022, title={Pseudomorphic growth of thick Al0.6Ga0.4N epilayers on AlN substrates}, volume={120}, ISSN={["1077-3118"]}, DOI={10.1063/5.0092937}, abstractNote={We report on the absence of strain relaxation mechanism in Al0.6Ga0.4N epilayers grown on (0001) AlN substrates for thickness as large as 3.5  μm, three-orders of magnitude beyond the Matthews–Blakeslee critical thickness for the formation of misfit dislocations (MDs). A steady-state compressive stress of 3–4 GPa was observed throughout the AlGaN growth leading to a large lattice bow (a radius of curvature of 0.5 m−1) for the thickest sample. Despite the large lattice mismatch-induced strain energy, the epilayers exhibited a smooth and crack-free surface morphology. These results point to the presence of a large barrier for nucleation of MDs in Al-rich AlGaN epilayers. Compositionally graded AlGaN layers were investigated as potential strain relief layers by the intentional introduction of MDs. While the graded layers abetted MD formation, the inadequate length of these MDs correlated with insignificant strain relaxation. This study emphasizes the importance of developing strain management strategies for the implementation of the single-crystal AlN substrate platform for III-nitride deep-UV optoelectronics and power electronics.}, number={20}, journal={APPLIED PHYSICS LETTERS}, author={Rathkanthiwar, Shashwat and Dycus, J. Houston and Mita, Seiji and Kirste, Ronny and Tweedie, James and Collazo, Ramon and Sitar, Zlatko}, year={2022}, month={May} }
 @article{khachariya_mita_reddy_dangi_dycus_bagheri_breckenridge_sengupta_rathkanthiwar_kirste_et al._2022, title={Record >10 MV/cm mesa breakdown fields in Al0.85Ga0.15N/Al0.6Ga0.4N high electron mobility transistors on native AlN substrates}, volume={120}, ISSN={["1077-3118"]}, DOI={10.1063/5.0083966}, abstractNote={The ultra-wide bandgap of Al-rich AlGaN is expected to support a significantly larger breakdown field compared to GaN, but the reported performance thus far has been limited by the use of foreign substrates. In this Letter, the material and electrical properties of Al0.85Ga0.15N/Al0.6Ga0.4N high electron mobility transistors (HEMT) grown on a 2-in. single crystal AlN substrate are investigated, and it is demonstrated that native AlN substrates unlock the potential for Al-rich AlGaN to sustain large fields in such devices. We further study how Ohmic contacts made directly to a Si-doped channel layer reduce the knee voltage and increase the output current density. High-quality AlGaN growth is confirmed via scanning transmission electron microscopy, which also reveals the absence of metal penetration at the Ohmic contact interface and is in contrast to established GaN HEMT technology. Two-terminal mesa breakdown characteristics with 1.3 μm separation possess a record-high breakdown field strength of ∼11.5 MV/cm for an undoped Al0.6Ga0.4N-channel layer. The breakdown voltages for three-terminal devices measured with gate-drain distances of 4 and 9 μm are 850 and 1500 V, respectively.}, number={17}, journal={APPLIED PHYSICS LETTERS}, author={Khachariya, Dolar and Mita, Seiji and Reddy, Pramod and Dangi, Saroj and Dycus, J. Houston and Bagheri, Pegah and Breckenridge, M. Hayden and Sengupta, Rohan and Rathkanthiwar, Shashwat and Kirste, Ronny and et al.}, year={2022}, month={Apr} }
 @article{szymanski_wang_kaess_kirste_mita_reddy_sitar_collazo_2022, title={Systematic oxygen impurity reduction in smooth N-polar GaN by chemical potential control}, volume={37}, ISSN={["1361-6641"]}, DOI={10.1088/1361-6641/ac3638}, abstractNote={Process chemical potential control and dislocation reduction were implemented to control oxygen concentration in N-polar GaN layers grown on sapphire substrates via metal organic chemical vapor deposition (MOCVD). As process supersaturation was changed from ∼30 to 3400, the formation energy of the oxygen point defect increased, which resulted in a 25-fold decrease in oxygen incorporation. Reducing dislocations by approximately a factor of 4 (to ∼109 cm−3) allowed for further reduction of oxygen incorporation to the low-1017 cm−3 range. Smooth N-polar GaN layers with low oxygen content were achieved by a two-step process, whereas first a 1 µm thick smooth N-polar layer with high oxygen concentration was grown, followed by low oxygen concentration layer grown at high supersaturation.}, number={1}, journal={SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, author={Szymanski, Dennis and Wang, Ke and Kaess, Felix and Kirste, Ronny and Mita, Seiji and Reddy, Pramod and Sitar, Zlatko and Collazo, Ramon}, year={2022}, month={Jan} }
 @article{khachariya_stein_mecouch_breckenridge_rathkanthiwar_mita_moody_reddy_tweedie_kirste_et al._2022, title={Vertical GaN junction barrier Schottky diodes with near-ideal performance using Mg implantation activated by ultra-high-pressure annealing}, volume={15}, ISSN={["1882-0786"]}, DOI={10.35848/1882-0786/ac8f81}, abstractNote={We report a kV class, low ON-resistance, vertical GaN junction barrier Schottky (JBS) diode with selective-area p-regions formed via Mg implantation followed by high-temperature, ultra-high pressure (UHP) post-implantation activation anneal. The JBS has an ideality factor of 1.03, a turn-on voltage of 0.75 V, and a specific differential ON-resistance of 0.6 mΩ·cm2. The breakdown voltage of the JBS diode is 915 V, corresponding to a maximum electric field of 3.3 MV cm−1. These results underline that high-performance GaN JBS can be realized using Mg implantation and high-temperature UHP post-activation anneal.}, number={10}, journal={APPLIED PHYSICS EXPRESS}, author={Khachariya, Dolar and Stein, Shane and Mecouch, Will and Breckenridge, M. Hayden and Rathkanthiwar, Shashwat and Mita, Seiji and Moody, Baxter and Reddy, Pramod and Tweedie, James and Kirste, Ronny and et al.}, year={2022}, month={Oct} }
 @article{bagheri_kim_washiyama_reddy_klump_kirste_mita_collazo_sitar_2021, title={A pathway to highly conducting Ge-doped AlGaN}, volume={130}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/5.0071791}, DOI={10.1063/5.0071791}, abstractNote={Ge doping in AlGaN was studied over a wide dopant concentration range. For high Ge concentrations, the formation of VIII–nGeIII was determined to be the main point defect limiting the conductivity. It was shown that the complex formation could be suppressed by controlling chemical potentials during growth, leading to a higher maximum achievable carrier concentration and selective stabilization of a certain complex type. Chemical potential of the growth species was varied by changing the V/III ratio and growth temperature. Free carrier concentrations as high as 4 × 1019 cm−3 were achieved in Al0.4Ga0.6N:Ge grown on sapphire substrates under “metal-rich” conditions. The ability to control the onset of self-compensation and to stabilize a certain charge state of the compensating defect is of great technological importance for application of AlGaN in various devices.}, number={20}, journal={JOURNAL OF APPLIED PHYSICS}, author={Bagheri, Pegah and Kim, Ji Hyun and Washiyama, Shun and Reddy, Pramod and Klump, Andrew and Kirste, Ronny and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko}, year={2021}, month={Nov} }
 @article{breckenridge_tweedie_reddy_guan_bagheri_szymanski_mita_sierakowski_bockowski_collazo_et al._2021, title={High Mg activation in implanted GaN by high temperature and ultrahigh pressure annealing}, volume={118}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/5.0038628}, DOI={10.1063/5.0038628}, abstractNote={We demonstrate high p-type conductivity and hole concentrations >1018 cm−3 in Mg-implanted GaN. The implantation was performed at room temperature and by post-implantation annealing at 1 GPa of N2 and in a temperature range of 1200–1400 °C. The high pressure thermodynamically stabilized the GaN surface without the need of a capping layer. We introduce a “diffusion budget,” related to the diffusion length, as a convenient engineering parameter for comparing samples annealed at different temperatures and for different times. Although damage recovery, as measured by XRD, was achieved at relatively low diffusion budgets, these samples did not show p-type conductivity. Further analyses showed heavy compensation by the implantation-induced defects. Higher diffusion budgets resulted in a low Mg ionization energy (∼115 meV) and almost complete Mg activation. For even higher diffusion budgets, we observed significant loss of Mg to the surface and a commensurate reduction in the hole conductivity. High compensation at low diffusion budgets and loss of Mg at high diffusion budgets present a unique challenge for shallow implants. A direct control of the formation of compensating defects arising from the implantation damage may be necessary to achieve both hole conductivity and low Mg diffusion.}, number={2}, journal={APPLIED PHYSICS LETTERS}, publisher={AIP Publishing}, author={Breckenridge, M. Hayden and Tweedie, James and Reddy, Pramod and Guan, Yan and Bagheri, Pegah and Szymanski, Dennis and Mita, Seiji and Sierakowski, Kacper and Bockowski, Michal and Collazo, Ramon and et al.}, year={2021}, month={Jan} }
 @article{breckenridge_bagheri_guo_sarkar_khachariya_pavlidis_tweedie_kirste_mita_reddy_et al._2021, title={High n-type conductivity and carrier concentration in Si-implanted homoepitaxial AlN}, volume={118}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/5.0042857}, DOI={10.1063/5.0042857}, abstractNote={We demonstrate Si-implanted AlN with high conductivity (>1 Ω−1 cm−1) and high carrier concentration (5 × 1018 cm−3). This was enabled by Si implantation into AlN with a low threading dislocation density (TDD) (<103 cm−2), a non-equilibrium damage recovery and dopant activation annealing process, and in situ suppression of self-compensation during the annealing. Low TDD and active suppression of VAl-nSiAl complexes via defect quasi Fermi level control enabled low compensation, while low-temperature, non-equilibrium annealing maintained the desired shallow donor state with an ionization energy of ∼70 meV. The realized n-type conductivity and carrier concentration are over one order of magnitude higher than that reported thus far and present a major technological breakthrough in doping of AlN.}, number={11}, journal={APPLIED PHYSICS LETTERS}, author={Breckenridge, M. Hayden and Bagheri, Pegah and Guo, Qiang and Sarkar, Biplab and Khachariya, Dolar and Pavlidis, Spyridon and Tweedie, James and Kirste, Ronny and Mita, Seiji and Reddy, Pramod and et al.}, year={2021}, month={Mar} }
 @article{bagheri_reddy_mita_szymanski_kim_guan_khachariya_klump_pavlidis_kirste_et al._2021, title={On the Ge shallow-to-deep level transition in Al-rich AlGaN}, volume={130}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/5.0059037}, DOI={10.1063/5.0059037}, abstractNote={Contrary to the arsenides where donors undergo stable DX transition, we find that Ge in AlGaN does not suffer from the DX transition; instead, it undergoes a shallow donor (30 meV) to deep donor (150 meV) transition at ∼50% Al content in the alloy. This finding is of profound technological importance as it removes fundamental doping limitations in AlGaN and AlN imposed by the presumed DX−1 acceptor state. The charge state of Ge below and above the transition was determined by co-doping with Si, which remains a shallow donor in AlGaN for up to 80% Al. It was found that Ge occupied a donor state with a (0/+) thermodynamic transition for AlGaN alloys below and above the transition. Ge as a shallow donor was completely ionized at room temperature; however, the ionization of the deep donor required elevated temperatures, commensurate with its higher ionization energy. This behavior is not unique to Ge; preliminary findings show that Si and O in AlGaN may behave similarly.}, number={5}, journal={JOURNAL OF APPLIED PHYSICS}, author={Bagheri, Pegah and Reddy, Pramod and Mita, Seiji and Szymanski, Dennis and Kim, Ji Hyun and Guan, Yan and Khachariya, Dolar and Klump, Andrew and Pavlidis, Spyridon and Kirste, Ronny and et al.}, year={2021}, month={Aug} }
 @article{washiyama_mirrielees_bagheri_baker_kim_guo_kirste_guan_breckenridge_klump_et al._2021, title={Self-compensation in heavily Ge doped AlGaN: A comparison to Si doping}, volume={118}, ISSN={["1077-3118"]}, DOI={10.1063/5.0035957}, abstractNote={Self-compensation in Ge- and Si-doped Al0.3Ga0.7N has been investigated in terms of the formation of III vacancy and donor-vacancy complexes. Both Ge- and Si-doped AlGaN layers showed a compensation knee behavior with impurity compensation (low doping regime), compensation plateau (medium doping regime), and self-compensation (high doping regime). A maximum free carrier concentration of 4–5 × 1019 cm−3 was obtained by Ge doping, whereas Si doping resulted in only half of that value, ∼2 × 1019 cm−3. A DFT calculation with the grand canonical thermodynamics model was developed to support the hypothesis that the difference in self-compensation arises from the difference in the formation energies of the VIII-n•donor complexes relative to their onsite configurations. The model suggested that the VIII-2•donor and VIII-3•donor complexes were responsible for self-compensation for both Ge- and Si-doped AlGaN. However, a lower free carrier concentration in Si-doped samples was due to a high VIII-3•Si concentration, resulting from a lower energy of formation of VIII-3•Si.}, number={4}, journal={APPLIED PHYSICS LETTERS}, author={Washiyama, Shun and Mirrielees, Kelsey J. and Bagheri, Pegah and Baker, Jonathon N. and Kim, Ji-Hyun and Guo, Qiang and Kirste, Ronny and Guan, Yan and Breckenridge, M. Hayden and Klump, Andrew J. and et al.}, year={2021}, month={Jan} }
 @article{reddy_khachariya_mecouch_breckenridge_bagheri_guan_kim_pavlidis_kirste_mita_et al._2021, title={Study on avalanche breakdown and Poole-Frenkel emission in Al-rich AlGaN grown on single crystal AlN}, volume={119}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/5.0062831}, DOI={10.1063/5.0062831}, abstractNote={We demonstrate that theoretical breakdown fields can be realized in practically dislocation free Al-rich AlGaN p-n junctions grown on AlN single crystal substrates. Furthermore, we also demonstrate a leakage current density in AlGaN that is independent of the device area, indicating a bulk leakage phenomenon and not surface or mesa-edge related. Accordingly, we identified the Poole–Frenkel emission from two types of point-defect traps in AlGaN as the primary source of reverse leakage before breakdown. Mg-doped AlGaN exhibited leakage currents due to a shallow trap at ∼0.16 eV in contrast with leakage currents observed in Si-doped AlGaN due to a deep trap at ∼1.8 eV.}, number={18}, journal={APPLIED PHYSICS LETTERS}, author={Reddy, Pramod and Khachariya, Dolar and Mecouch, Will and Breckenridge, M. Hayden and Bagheri, Pegah and Guan, Yan and Kim, Ji Hyun and Pavlidis, Spyridon and Kirste, Ronny and Mita, Seiji and et al.}, year={2021}, month={Nov} }
 @article{kim_bagheri_washiyama_klump_kirste_mita_reddy_collazo_sitar_2021, title={Temperature dependence of electronic bands in Al/GaN by utilization of invariant deep defect transition energies}, volume={119}, ISSN={["1077-3118"]}, DOI={10.1063/5.0055409}, abstractNote={We show experimentally that deep point defect levels in GaN, AlN, and AlGaN are constant with respect to the vacuum level and can be used as invariant internal energy references. This offered a convenient and quick way to assess band shifts and impurity levels as a function of temperature via photoluminescence. For AlGaN, we determined that the band shift in the temperature range of 3–600 K occurred primarily in the valence band and that the lowering of the conduction band edge was comparatively small. The valence band shift (as a fraction of the Varshni bandgap shift) in AlGaN varies from ∼70% in AlN to ∼90% in GaN.}, number={2}, journal={APPLIED PHYSICS LETTERS}, author={Kim, Ji Hyun and Bagheri, Pegah and Washiyama, Shun and Klump, Andrew and Kirste, Ronny and Mita, Seiji and Reddy, Pramod and Collazo, Ramon and Sitar, Zlatko}, year={2021}, month={Jul} }
 @article{al-tawhid_shafe_bagheri_guan_reddy_mita_moody_collazo_sitar_ahadi_2021, title={Weak localization and dimensional crossover in compositionally graded AlxGa1-xN}, volume={118}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/5.0042098}, DOI={10.1063/5.0042098}, abstractNote={The interaction between the itinerant carriers, lattice dynamics, and defects is a problem of long-standing fundamental interest for developing quantum theory of transport. Here, we study this interaction in the compositionally and strain-graded AlGaN heterostructures grown on AlN substrates. The results provide direct evidence that a dimensional crossover (2D–3D) occurs with increasing temperature as the dephasing scattering events reduce the coherence length. These heterostructures show a robust polarization-induced 3D electron gas and a metallic-like behavior down to liquid helium temperature. Using magnetoresistance measurements, we analyze the evolution of the interaction between charge carriers, lattice dynamics, and defects as a function of temperature. A negative longitudinal magnetoresistance emerges at low temperatures, in line with the theory of weak localization. A weak localization fit to near zero-field magneto-conductance indicates a coherence length that is larger than the elastic mean free path and film thickness ( l φ > t > l e l), suggesting a 2D weak localization in a three-dimensional electron gas. Our observations allow for a clear and detailed picture of two distinct localization mechanisms that affect carrier transport at low temperature.}, number={8}, journal={APPLIED PHYSICS LETTERS}, publisher={AIP Publishing}, author={Al-Tawhid, Athby and Shafe, Abdullah-Al and Bagheri, Pegah and Guan, Yan and Reddy, Pramod and Mita, Seiji and Moody, Baxter and Collazo, Ramon and Sitar, Zlatko and Ahadi, Kaveh}, year={2021}, month={Feb} }
 @article{hauwiller_stowe_eldred_mita_collazo_sitar_lebeau_2020, title={Cathodoluminescence of silicon doped aluminum nitride with scanning transmission electron microscopy}, volume={8}, ISSN={["2166-532X"]}, DOI={10.1063/5.0019863}, abstractNote={Here, we apply cathodoluminescence in scanning transmission electron microscopy to infer the influence of dislocation strain fields on the formation of point defect complexes in Si doped AlN. In addition to identifying non-radiative recombination centers, tracking Si related defect emission energies reveals a red-shift at threading dislocations. We discuss these results in the context of multiple Si-vacancy defect complexes that can form and the influence of local strain on their formation energies. By correlating the electronic and structural properties at the nanoscale, cathodoluminescence elucidates the inhomogeneity of defect complexes in Si doped AlN and offers the potential for strain engineering to control the defect energy formation landscape.}, number={9}, journal={APL MATERIALS}, author={Hauwiller, Matthew R. and Stowe, David and Eldred, Timothy B. and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko and LeBeau, James}, year={2020}, month={Sep} }
 @article{washiyama_guan_mita_collazo_sitar_2020, title={Recovery kinetics in high temperature annealed AlN heteroepitaxial films}, volume={127}, ISSN={["1089-7550"]}, DOI={10.1063/5.0002891}, abstractNote={Based on the experimental dislocation annihilation rates, vacancy core diffusion-controlled dislocation climb was found as a dominant recovery mechanism in high temperature annealing of AlN heteroepitaxial films. Dislocation annihilation mechanisms via dislocation glide (with or without kinks) and vacancy bulk diffusion were found to be less significant. Cross-slip was also ruled out as a possible mechanism as a majority of dislocations in heteroepitaxial AlN films are threading edge dislocations. While dislocation climb through both vacancy bulk and core diffusion could offer a plausible explanation of the recovery process, the activation energy for the vacancy core diffusion-controlled dislocation climb was relatively low (4.3 ± 0.1 eV), as estimated from an Arrhenius plot. The validity of the vacancy core diffusion mechanism was also supported by a large vacancy mean free path (∼240 nm), which was comparable to the sample thickness and thus the average dislocation length. Finally, the experimentally observed dislocation density reduction as a function of the annealing temperature and time was in good agreement with the vacancy core diffusion mechanism.}, number={11}, journal={JOURNAL OF APPLIED PHYSICS}, author={Washiyama, Shun and Guan, Yan and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko}, year={2020}, month={Mar} }
 @article{alden_troha_kirste_mita_guo_hoffmann_zgonik_collazo_sitar_2019, title={Quasi-phase-matched second harmonic generation of UV light using AlN waveguides}, volume={114}, ISSN={["1077-3118"]}, DOI={10.1063/1.5087058}, abstractNote={As an alternative to electrically injected diodes, UV light emission can be obtained via second harmonic generation (SHG). In weakly birefringent materials such as aluminum nitride (AlN), the phase matching of the driving and second harmonic waves can be achieved by the quasi-phase-matching (QPM) technique, where the polarity of the material is periodically changed commensurate with the coherence wavelength. QPM also allows the use of the highest nonlinear susceptibility, and therefore, higher conversion efficiencies are possible. In this work, the QPM SHG of UV light in AlN lateral polar structure-based waveguides is demonstrated. The peak intensity of the frequency doubled laser light was measured at 344 nm and 472 nm wavelengths, in agreement with dispersion-based theoretical predictions. These results confirm the potential of III-nitride-based lateral polar structures for quasi-phase-matched nonlinear optics and for frequency doubling media for UV light generation.As an alternative to electrically injected diodes, UV light emission can be obtained via second harmonic generation (SHG). In weakly birefringent materials such as aluminum nitride (AlN), the phase matching of the driving and second harmonic waves can be achieved by the quasi-phase-matching (QPM) technique, where the polarity of the material is periodically changed commensurate with the coherence wavelength. QPM also allows the use of the highest nonlinear susceptibility, and therefore, higher conversion efficiencies are possible. In this work, the QPM SHG of UV light in AlN lateral polar structure-based waveguides is demonstrated. The peak intensity of the frequency doubled laser light was measured at 344 nm and 472 nm wavelengths, in agreement with dispersion-based theoretical predictions. These results confirm the potential of III-nitride-based lateral polar structures for quasi-phase-matched nonlinear optics and for frequency doubling media for UV light generation.}, number={10}, journal={APPLIED PHYSICS LETTERS}, author={Alden, Dorian and Troha, Tinkara and Kirste, Ronny and Mita, Seiji and Guo, Qiang and Hoffmann, Axel and Zgonik, Marko and Collazo, Ramon and Sitar, Zlatko}, year={2019}, month={Mar} }
 @article{guo_kirste_mita_tweedie_reddy_washiyama_breckenridge_collazo_sitar_2019, title={The polarization field in Al-rich AlGaN multiple quantum wells}, volume={58}, ISSN={["1347-4065"]}, DOI={10.7567/1347-4065/ab07a9}, abstractNote={This paper investigates the quantum confined Stark effect in AlGaN multiple quantum well structures with a high Al content grown on single-crystalline AlN substrates. The quantitative relationship between the quantum well structure parameters, photogenerated carrier density, built-in electric field and ground-level emission is discussed. It is found that the electric field strength increases from 0.5 MV cm−1 to almost 3 MV cm−1 when the Al content in the quantum well barriers is increased from 65% to 100%, which is consistent with the theory of spontaneous and piezoelectric polarization in III-nitrides. In addition, the built-in electric field increases significantly with increasing barrier thickness. Based on these results, the electric field in an Al0.55Ga0.45N single quantum well with AlN cladding is predicted to be around 5 MV cm−1.}, journal={JAPANESE JOURNAL OF APPLIED PHYSICS}, author={Guo, Qiang and Kirste, Ronny and Mita, Seiji and Tweedie, James and Reddy, Pramod and Washiyama, Shun and Breckenridge, M. Hayden and Collazo, Ramon and Sitar, Zlatko}, year={2019}, month={Jun} }
 @article{dycus_washiyama_eldred_guan_kirste_mita_sitar_collazo_lebeau_2019, title={The role of transient surface morphology on composition control in AlGaN layers and wells}, volume={114}, ISSN={["1077-3118"]}, DOI={10.1063/1.5063933}, abstractNote={The mechanisms governing “compositional pulling” during the growth of AlxGa1−xN wells are investigated. Gallium-rich AlxGa1−xN wells grown on high dislocation density AlN/sapphire templates exhibit asymmetric and diffuse composition profiles, while those grown on low dislocation density native AlN substrates do not. Furthermore, strain in all AlxGa1−xN wells is found to be pseudomorphic, ruling it out as the dominating driving force. Rather, the high threading dislocation density of the AlN template is considered to play the defining role. We propose that a transient surface morphology is introduced during dislocation mediated spiral growth, which, in conjunction with process supersaturation, determines the Ga incorporation. These findings provide insights into compositional pulling in high Ga content AlxGa1−xN grown on AlN and provide a route to grow thicker wells with very abrupt interfaces on native AlN substrates.The mechanisms governing “compositional pulling” during the growth of AlxGa1−xN wells are investigated. Gallium-rich AlxGa1−xN wells grown on high dislocation density AlN/sapphire templates exhibit asymmetric and diffuse composition profiles, while those grown on low dislocation density native AlN substrates do not. Furthermore, strain in all AlxGa1−xN wells is found to be pseudomorphic, ruling it out as the dominating driving force. Rather, the high threading dislocation density of the AlN template is considered to play the defining role. We propose that a transient surface morphology is introduced during dislocation mediated spiral growth, which, in conjunction with process supersaturation, determines the Ga incorporation. These findings provide insights into compositional pulling in high Ga content AlxGa1−xN grown on AlN and provide a route to grow thicker wells with very abrupt interfaces on native AlN substrates.}, number={3}, journal={APPLIED PHYSICS LETTERS}, author={Dycus, J. Houston and Washiyama, Shun and Eldred, Tim B. and Guan, Yan and Kirste, Ronny and Mita, Seiji and Sitar, Zlatko and Collazo, Ramon and LeBeau, James M.}, year={2019}, month={Jan} }
 @article{washiyama_reddy_kaess_kirste_mita_collazo_sitar_2018, title={A thermodynamic supersaturation model for the growth of aluminum gallium nitride by metalorganic chemical vapor deposition}, volume={124}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/1.5045058}, DOI={10.1063/1.5045058}, abstractNote={A thermodynamic supersaturation model for growth of AlGaN by metalorganic chemical vapor deposition was developed for experimentally accessible growth parameters. The derived non-linear relationships enabled us to estimate Ga and Al supersaturation during AlGaN growth for given growth conditions. Calculations revealed that the GaN phase was close to chemical equilibrium, while the Al supersaturation was as high as 1010 for typical growth conditions. Such a disparity in the supersaturation of reaction species plays a significant role in the stability of the growth of the resulting ternary alloy. The agreement between experiment and simulation suggests that the parasitic gas phase reactions between trimethylaluminum and NH3 were not significant at low NH3 flow rates/partial pressures, indicating that, under these conditions, the AlGaN growth was thermodynamically limited.A thermodynamic supersaturation model for growth of AlGaN by metalorganic chemical vapor deposition was developed for experimentally accessible growth parameters. The derived non-linear relationships enabled us to estimate Ga and Al supersaturation during AlGaN growth for given growth conditions. Calculations revealed that the GaN phase was close to chemical equilibrium, while the Al supersaturation was as high as 1010 for typical growth conditions. Such a disparity in the supersaturation of reaction species plays a significant role in the stability of the growth of the resulting ternary alloy. The agreement between experiment and simulation suggests that the parasitic gas phase reactions between trimethylaluminum and NH3 were not significant at low NH3 flow rates/partial pressures, indicating that, under these conditions, the AlGaN growth was thermodynamically limited.}, number={11}, journal={JOURNAL OF APPLIED PHYSICS}, author={Washiyama, Shun and Reddy, Pramod and Kaess, Felix and Kirste, Ronny and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko}, year={2018}, month={Sep} }
 @article{dycus_mirrielees_grimley_kirste_mita_sitar_collazo_irving_lebeau_2018, title={Structure of Ultrathin Native Oxides on III-Nitride Surfaces}, volume={10}, ISSN={["1944-8252"]}, DOI={10.1021/acsami.8b00845}, abstractNote={When pristine material surfaces are exposed to air, highly reactive broken bonds can promote the formation of surface oxides with structures and properties differing greatly from bulk. Determination of the oxide structure is often elusive through the use of indirect diffraction methods or techniques that probe only the outermost layer. As a result, surface oxides forming on widely used materials, such as group III-nitrides, have not been unambiguously resolved, even though critical properties can depend sensitively on their presence. In this study, aberration corrected scanning transmission electron microscopy reveals directly, and with depth dependence, the structure of ultrathin native oxides that form on AlN and GaN surfaces. Through atomic resolution imaging and spectroscopy, we show that the oxide layers are comprised of tetrahedra-octahedra cation-oxygen units, in an arrangement similar to bulk θ-Al2O3 and β-Ga2O3. By applying density functional theory, we show that the observed structures are more stable than previously proposed surface oxide models. We place the impact of these observations in the context of key III-nitride growth, device issues, and the recent discovery of two-dimensional nitrides.}, number={13}, journal={ACS APPLIED MATERIALS & INTERFACES}, author={Dycus, J. Houston and Mirrielees, Kelsey J. and Grimley, Everett D. and Kirste, Ronny and Mita, Seiji and Sitar, Zlatko and Collazo, Ramon and Irving, Douglas L. and LeBeau, James M.}, year={2018}, month={Apr}, pages={10607–10611} }
 @article{sarkar_reddy_kaess_haidet_tweedie_mita_kirste_kohn_collazo_sitar_et al._2017, title={(Invited) Material Considerations for the Development of III-nitride Power Devices}, volume={80}, ISBN={["978-1-62332-476-6"]}, ISSN={["1938-6737"]}, url={http://www.scopus.com/inward/record.url?eid=2-s2.0-85033580489&partnerID=MN8TOARS}, DOI={10.1149/08007.0029ecst}, abstractNote={With advancement in growth of native III-nitride substrates, remarkable progress has been made to extend the functionality of GaN based power electronic devices. The low dislocation epitaxial films grown on native substrates outperforms the films grown on foreign substrates. However, several material considerations has to be incorporated in order to exploit the full potential of GaN and AlxGa1-xN (0<x≤1) based power devices. This paper presents a review report on the development of III-nitride power devices grown on foreign and native (GaN and AlN) substrates. Discussion on state-of-the art epitaxial material quality, contact formation and surface treatments films are presented.}, number={7}, journal={GALLIUM NITRIDE AND SILICON CARBIDE POWER TECHNOLOGIES 7}, author={Sarkar, B. and Reddy, Pramod and Kaess, F. and Haidet, B.B. and Tweedie, J. and Mita, S. and Kirste, R. and Kohn, E. and Collazo, R. and Sitar, Z. and et al.}, year={2017}, pages={29–36} }
 @article{reddy_kaess_tweedie_kirste_mita_collazo_sitar_2017, title={Defect quasi Fermi level control-based C-N reduction in GaN: Evidence for the role of minority carriers}, volume={111}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/1.5000720}, DOI={10.1063/1.5000720}, abstractNote={Compensating point defect reduction in wide bandgap semiconductors is possible by above bandgap illumination based defect quasi Fermi level (dQFL) control. The point defect control technique employs excess minority carriers that influence the dQFL of the compensator, increase the corresponding defect formation energy, and consequently are responsible for point defect reduction. Previous studies on various defects in GaN and AlGaN have shown good agreement with the theoretical model, but no direct evidence for the role of minority carriers was provided. In this work, we provide direct evidence for the role of minority carriers in reducing point defects by studying the predicted increase in work done against defect (CN−1) formation with the decrease in the Fermi level (free carrier concentration) in Si doped GaN at a constant illumination intensity. Comparative defect photoluminescence measurements on illuminated and dark regions of GaN show an excellent quantitative agreement with the theory by exhibiting ...}, number={15}, journal={APPLIED PHYSICS LETTERS}, publisher={AIP Publishing}, author={Reddy, Pramod and Kaess, Felix and Tweedie, James and Kirste, Ronny and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko}, year={2017}, month={Oct} }
 @article{sarkar_mita_reddy_klump_kaess_tweedie_bryan_bryan_kirste_kohn_et al._2017, title={High free carrier concentration in p-GaN grown on AlN substrates}, volume={111}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/1.4995239}, DOI={10.1063/1.4995239}, abstractNote={A high free hole concentration in III-nitrides is important for next generation optoelectronic and high power electronic devices. The free hole concentration exceeding 1018 cm−3 and resistivity as low as 0.7 Ω cm are reported for p-GaN layers grown by metalorganic vapor phase epitaxy on single crystal AlN substrates. Temperature dependent Hall measurements confirmed a much lower activation energy, 60–80 mV, for p-GaN grown on AlN as compared to sapphire substrates; the lowering of the activation energy was due to screening of Coulomb potential by free carriers. It is also shown that a higher doping density (more than 5 × 1019 cm−3) can be achieved in p-GaN/AlN without the onset of self-compensation.}, number={3}, journal={APPLIED PHYSICS LETTERS}, publisher={AIP Publishing}, author={Sarkar, Biplab and Mita, Seiji and Reddy, Pramod and Klump, Andrew and Kaess, Felix and Tweedie, James and Bryan, Isaac and Bryan, Zachary and Kirste, Ronny and Kohn, Erhard and et al.}, year={2017}, month={Jul} }
 @article{losego_paisley_craft_lam_sachet_mita_collazo_sitar_maria_2016, title={Selective area epitaxy of magnesium oxide thin films on gallium nitride surfaces}, volume={31}, ISSN={["2044-5326"]}, DOI={10.1557/jmr.2015.332}, abstractNote={Selective area growth of thin films reduces the number of steps in microfabrication processing and enables novel device structures. Here, we report, for the first time, selective area epitaxy of an oxide material on a GaN surface. Chlorination of the GaN surface via wet chemical processing is found effective to disrupt Mg adsorption and selectively prevent molecular beam epitaxy growth of MgO. MgO films grown on neighboring, nonchlorinated surfaces are epitaxial with a (111) MgO∥(0001) GaN crystallographic relationship. Better than 3 μm lateral resolution for the selective area growth of MgO on GaN is demonstrated.}, number={1}, journal={JOURNAL OF MATERIALS RESEARCH}, author={Losego, Mark D. and Paisley, Elizabeth A. and Craft, H. Spalding and Lam, Peter G. and Sachet, Edward and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko and Maria, Jon-Paul}, year={2016}, month={Jan}, pages={36–45} }
 @article{paisley_gaddy_lebeau_shelton_biegalski_christen_losego_mita_collazo_sitar_et al._2014, title={Smooth cubic commensurate oxides on gallium nitride}, volume={115}, ISSN={["1089-7550"]}, DOI={10.1063/1.4861172}, abstractNote={Smooth, commensurate alloys of ⟨111⟩-oriented Mg0.52Ca0.48O (MCO) thin films are demonstrated on Ga-polar, c+ [0001]-oriented GaN by surfactant-assisted molecular beam epitaxy and pulsed laser deposition. These are unique examples of coherent cubic oxide|nitride interfaces with structural and morphological perfection. Metal-insulator-semiconductor capacitor structures were fabricated on n-type GaN. A comparison of leakage current density for conventional and surfactant-assisted growth reveals a nearly 100× reduction in leakage current density for the surfactant-assisted samples. HAADF-STEM images of the MCO|GaN interface show commensurate alignment of atomic planes with minimal defects due to lattice mismatch. STEM and DFT calculations show that GaN c/2 steps create incoherent boundaries in MCO over layers which manifest as two in-plane rotations and determine consequently the density of structural defects in otherwise coherent MCO. This new understanding of interfacial steps between HCP and FCC crystals ...}, number={6}, journal={JOURNAL OF APPLIED PHYSICS}, author={Paisley, Elizabeth A. and Gaddy, Benjamin E. and LeBeau, James M. and Shelton, Christopher T. and Biegalski, Michael D. and Christen, Hans M. and Losego, Mark D. and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko and et al.}, year={2014}, month={Feb} }
 @article{bryan_hoffmann_tweedie_kirste_callsen_bryan_rice_bobea_mita_xie_et al._2013, title={Fermi Level Control of Point Defects During Growth of Mg-Doped GaN}, volume={42}, ISSN={["1543-186X"]}, DOI={10.1007/s11664-012-2342-9}, number={5}, journal={JOURNAL OF ELECTRONIC MATERIALS}, author={Bryan, Zachary and Hoffmann, Marc and Tweedie, James and Kirste, Ronny and Callsen, Gordon and Bryan, Isaac and Rice, Anthony and Bobea, Milena and Mita, Seiji and Xie, Jinqiao and et al.}, year={2013}, month={May}, pages={815–819} }
 @article{paisley_shelton_mita_collazo_christen_sitar_biegalski_maria_2012, title={Surfactant assisted growth of MgO films on GaN}, volume={101}, ISSN={["0003-6951"]}, DOI={10.1063/1.4748886}, abstractNote={Thin epitaxial films of 〈111〉 oriented MgO on [0001]-oriented GaN were grown by molecular beam epitaxy and pulsed laser deposition using the assistance of a vapor phase surfactant. In both cases, surfactant incorporation enabled layer-by-layer growth and a smooth terminal surface by stabilizing the {111} rocksalt facet. Metal-insulator-semiconductor capacitor structures were fabricated on n-type GaN. A comparison of leakage current density for conventional and surfactant-assisted growth reveals a nearly 100× reduction in leakage current density for the surfactant-assisted samples. These data verify numerous predictions regarding the role of H-termination in regulating the habit of rocksalt crystals.}, number={9}, journal={APPLIED PHYSICS LETTERS}, author={Paisley, E. A. and Shelton, T. C. and Mita, S. and Collazo, R. and Christen, H. M. and Sitar, Z. and Biegalski, M. D. and Maria, J. -P.}, year={2012}, month={Aug} }
 @article{xie_mita_hussey_rice_tweedie_lebeau_collazo_sitar_2011, title={On the strain in n-type GaN}, volume={99}, ISSN={["0003-6951"]}, DOI={10.1063/1.3647772}, abstractNote={It was demonstrated that Ge has the same effect as Si on the strain evolution in n-type GaN as measured by x-ray diffraction. Dislocation inclination, which causes tensile strain in n-type GaN, was clearly observed by transmission electron microscopy where Ge doping was introduced during epitaxial growth. This result is explained by the Fermi level effect model that indicates dislocation inclination due to the climbing process through Ga vacancies. Therefore, there is no dependence of dislocation inclination on dopant species.}, number={14}, journal={APPLIED PHYSICS LETTERS}, author={Xie, Jinqiao and Mita, Seiji and Hussey, Lindsay and Rice, Anthony and Tweedie, James and LeBeau, James and Collazo, Ramon and Sitar, Zlatko}, year={2011}, month={Oct} }
 @article{collazo_mita_xie_rice_tweedie_dalmau_sitar_wetzel_khan_2011, title={Progress on n-type doping of AlGaN alloys on AlN single crystal substrates for UV optoelectronic applications}, volume={8}, ISSN={["1862-6351"]}, DOI={10.1002/pssc.201000964}, abstractNote={As the building blocks of deep UV light emitting diode (LED) technology and high-power electronic devices, AlGaN alloys have attracted considerable attention. In this study, AlGaN films with varying compositions doped with Si were deposited on homoepitaxial AlN layers grown on AlN single crystal substrates. The room temperature resistivity of AlGaN alloys of different compositions grown on AlN and sapphire substrates with a constant Si doping level of 6x1018 cm-3 was compared. AlGaN films grown on AlN substrates consistently exhibited a lower n-type resistivity than those grown on sapphire. An n-type resistivity of 0.1 Ω cm was obtained for an AlGaN film with 80% Al content and a sheet resistance of 235 Ω/sq. for an AlGaN film with 70% Al content. The carrier activation energy as a function of Al content in AlGaN for these n-type films was measured. For compositions below 80% Al, the activation energy was around 15 meV due to impurity potential screening. For higher Al compositions, the carrier concentration was limited by a high compensation ratio, except for AlN, which has activation energy of 250 meV. (© 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)}, number={7-8}, journal={PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 7-8}, author={Collazo, Ramon and Mita, Seiji and Xie, Jinqiao and Rice, Anthony and Tweedie, James and Dalmau, Rafael and Sitar, Zlatko and Wetzel, C and Khan, A}, year={2011} }
 @article{losego_craft_paisley_mita_collazo_sitar_maria_2010, title={Critical examination of growth rate for magnesium oxide (MgO) thin films deposited by molecular beam epitaxy with a molecular oxygen flux}, volume={25}, ISSN={["0884-2914"]}, DOI={10.1557/jmr.2010.0096}, abstractNote={The authors report a study of molecular beam deposition of MgO films on amorphous SiO_2 and (0001) GaN surfaces over a large range of temperatures (25–400 °C) and molecular oxygen growth pressures (10^−7–10^−4 Torr). This study provides insight into the growth behavior of an oxide with volatile metal constituents. Unlike other materials containing volatile constituents (e.g., GaAs, PbTiO_3), all components of MgO become volatile at normal epitaxial growth temperatures (=250 °C). Consequently, defining which species is the adsorption controller becomes ambiguous. Different growth regimes are delineated by the critical substrate temperature for Mg re-evaporation and the Mg:O flux ratio. These regimes have impact on phase purity, quartz crystal microbalance calibration, and film microstructure. The universal decay in deposition rate above growth 10^−5 Torr O_2 is also considered. By introducing a third flux of inert argon gas, rate reduction is attributed to increased molecular scattering and not oxidation of the metal source.}, number={4}, journal={JOURNAL OF MATERIALS RESEARCH}, author={Losego, Mark D. and Craft, H. Spalding and Paisley, Elizabeth A. and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko and Maria, Jon-Paul}, year={2010}, month={Apr}, pages={670–679} }
 @article{rice_collazo_tweedie_xie_mita_sitar_2010, title={Linear dependency of Al-mole fraction with group-III precursor flows in AlxGa1-xN (0 <= x <= 1) deposition by LP OMVPE}, volume={312}, ISSN={["0022-0248"]}, DOI={10.1016/j.jcrysgro.2009.09.011}, abstractNote={AlxGa1−xN/GaN heterostructures (0≤x≤1) were deposited on (0 0 0 1)-sapphire by low-pressure (20 Torr) organometallic vapor phase epitaxy utilizing a range of group-III precursor and NH3 flow rates and a deposition temperature of 1050 °C. The Al-mole fraction of AlxGa1−xN layers was controlled by variations in the molar flows of triethylgallium (fTEG) and trimethylaluminum (fTMA). Characterization by X-ray diffraction confirmed that increasing the fTMA/fTEG ratio during deposition resulted in increased Al-mole fraction of AlxGa1−xN layers. A linear relationship between the experimental Al-mole fraction of AlxGa1−xN layers and the group-III precursor flows was obtained if a correction factor γ was introduced such that x=γfTMA/(γfTMA+fTEG). This correction factor was found to be independent of group-III precursor flows but dependent on NH3 partial pressure. The value of γ for these experiments decreased from 1.4 to 1.0 when the NH3 partial pressure was increased from 0.8 to 16.0 Torr during AlxGa1−xN deposition. The growth rate of AlxGa1−xN layers was found to be a linear combination of the independent AlN and GaN growth rates when equivalent fTMA and fTEG were utilized under the same deposition conditions.}, number={8}, journal={JOURNAL OF CRYSTAL GROWTH}, author={Rice, A. and Collazo, R. and Tweedie, J. and Xie, J. and Mita, S. and Sitar, Z.}, year={2010}, month={Apr}, pages={1321–1324} }
 @article{losego_fitting kourkoutis_mita_craft_muller_collazo_sitar_maria_2009, title={Epitaxial Ba0.5Sr0.5TiO3–GaN heterostructures with abrupt interfaces}, volume={311}, ISSN={0022-0248}, url={http://dx.doi.org/10.1016/j.jcrysgro.2008.11.085}, DOI={10.1016/j.jcrysgro.2008.11.085}, abstractNote={Abstract Epitaxial heterostructures incorporating the complex ferroelectric oxide Ba 0.5 Sr 0.5 TiO 3 (BST) and GaN were prepared using a combination of RF magnetron sputtering and metalorganic chemical vapor deposition for the respective layers. The heterostructures were grown on c -plane sapphire substrates and were characterized using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning transmission electron microscopy (STEM). This analysis showed that at substrate temperatures of 650 °C, BST films grow epitaxially on GaN with a {1 1 1} orientation and that the GaN–BST interface is smooth and abrupt, with disorder confined to grain boundaries and the interface plane. The film morphology is grainy indicating a 3-D growth mode. High-temperature post-deposition annealing studies suggest no interface reactions up to 900 °C. These results demonstrate that complex oxides like BST can be integrated with wide bandgap semiconductors like GaN and open exciting possibilities for new multifunctional devices.}, number={4}, journal={Journal of Crystal Growth}, publisher={Elsevier BV}, author={Losego, M.D. and Fitting Kourkoutis, L. and Mita, S. and Craft, H.S. and Muller, D.A. and Collazo, R. and Sitar, Z. and Maria, J.-P.}, year={2009}, month={Feb}, pages={1106–1109} }
 @article{mita_collazo_sitar_2009, title={Fabrication of a GaN lateral polarity junction by metalorganic chemical vapor deposition}, volume={311}, ISSN={["0022-0248"]}, DOI={10.1016/j.jcrysgro.2009.01.075}, abstractNote={A fabrication process for growth of GaN lateral polarity junctions consisting of Ga-polar and N-polar domains grown simultaneously side-by-side on c-plane sapphire was developed using the polarity control scheme. An ammonia-annealing step following deposition and patterning of a thin low-temperature AlN nucleation layer played a crucial role in avoiding mixed-polarity growth of the remaining AlN nucleation layer, as well as in nitriding the bare sapphire surface to facilitate growth of N-polar GaN. The achievement of both polar domains, free from inversion domains within a contiguous domain, led to Ga-polar domain exhibiting featureless morphology with highly resistive characteristics, while N-polar domains exhibited hexagonally faceted morphology and were highly conductive.}, number={10}, journal={JOURNAL OF CRYSTAL GROWTH}, author={Mita, S. and Collazo, R. and Sitar, Z.}, year={2009}, month={May}, pages={3044–3048} }
 @article{liu_collazo_mita_sitar_pennycook_duscher_2008, title={Direct Observation of Inversion Domain Boundaries of GaN onc-Sapphire at Sub-ångstrom Resolution}, volume={20}, ISSN={0935-9648 1521-4095}, url={http://dx.doi.org/10.1002/adma.200702522}, DOI={10.1002/adma.200702522}, abstractNote={Wide-bandgap III–nitrides have seen enormous success in modern electronic, optoelectronic, and even spintronic devices. Recently, interest has grown in manipulating the crystal polarity of GaN having a wurtzite structure, which provides a new degree of freedom for investigating III–nitrides and their novel devices. These studies include work on the inversion domain boundaries (IDBs) of GaN, which separate adjacent domains of different polarity. Ten years ago, Northrup et al. performed first-principles calculations of domain-boundary energies and proposed the structure shown in Figure 1, based on its very low energy (25 meV A ). Since then, no direct, indisputable test has been carried out to determine the exact boundary structure. At the same time, many unique properties have been observed at the IDBs. Among these is the remarkable effect, observed by Stutzmann et al. that the IDB can act as a rectifying junction when biased by two electrodes placed on adjacent Gaand N-face regions. The boundary between two adjacent domains with different polarity has been shown to be a very efficient radiative recombination center, which may have potential application for novel light-emitting devices. Meanwhile, it was found that the rectifying behavior of the IDBs can be explained by ab initio density functional calculations, assuming the IDBs have a structure as shown in Figure 1 (where a thin AlN layer is used to invert the polarity of GaN). However, the IDB structure has never been determined directly and their real structure remains unconfirmed. Here we show that we have determined directly the IDB structure, including the determination of GaN polarity, by aberration-corrected scanning transmission electron microscopy (STEM) at sub-Angstrom}, number={11}, journal={Advanced Materials}, publisher={Wiley}, author={Liu, Fude and Collazo, Ramon and Mita, Seiji and Sitar, Zlatko and Pennycook, Stephen J. and Duscher, Gerd}, year={2008}, month={Jun}, pages={2162–2165} }
 @article{losego_mita_collazo_sitar_maria_2008, title={Epitaxial growth of the metastable phase ytterbium monoxide on gallium nitride surfaces}, volume={310}, ISSN={["0022-0248"]}, DOI={10.1016/j.jcrysgro.2007.10.002}, abstractNote={Molecular beam deposition systems allow for unparalleled control of film composition and structure. This article addresses the capacity for controlling metal and oxidant fluxes in the Yb/O2 system to access the metastable phase ytterbium monoxide (YbO). Experiments exploring the growth of polycrystalline YbOx films by molecular beam deposition demonstrate that a 2:1 molar ratio of Yb:O2 fluxes is necessary to achieve preferential growth of the divalent oxide. Applying similar deposition conditions to a (0 0 1) GaN surface leads to the growth of epitaxial (1 1 1) YbO films. Similar to other rocksalt oxides grown on GaN surfaces, YbO films display a 3D growth mechanism that leads to a grainy morphology with crystallites of 50 nm lateral dimensions. Rocking curves in ω and φ have full-width half-maximum values of 1.77° and 4.1°, respectively; further improvements in crystal quality appear to be limited by the thermal stability of the YbO phase.}, number={1}, journal={JOURNAL OF CRYSTAL GROWTH}, author={Losego, Mark D. and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko and Maria, Jon-Paul}, year={2008}, month={Jan}, pages={51–56} }
 @article{mita_collazo_rice_dalmau_sitar_2008, title={Influence of gallium supersaturation on the properties of GaN grown by metalorganic chemical vapor deposition}, volume={104}, ISSN={["0021-8979"]}, DOI={10.1063/1.2952027}, abstractNote={A thermodynamic supersaturation model for gallium (Ga) was developed to describe GaN growth characteristics in low-pressure metalorganic chemical vapor deposition. The model takes into account the simplified GaN chemical reaction that occurs at the growth interface, Ga+NH3=GaN+3/2H2. The supersaturation was varied in two ways: (1) by the V/III ratio and (2) by the choice of the diluent gas. Two diluent gases were considered: H2, a commonly used diluent gas, and N2, a reaction inert gas. The choice of the diluent played a role in the degree of Ga supersaturation; since H2 is the product in the GaN formation, the addition of hydrogen significantly lowered the supersaturation. Atomic force microscopy revealed that surface morphology was associated with the different Ga supersaturation and the Burton–Cabrera–Frank model was used to relate it to the observed spiral size and terrace width. In addition to growth morphology, the degree of Ga supersaturation also influenced the carrier compensation level in n-type...}, number={1}, journal={JOURNAL OF APPLIED PHYSICS}, author={Mita, S. and Collazo, R. and Rice, A. and Dalmau, R. F. and Sitar, Z.}, year={2008}, month={Jul} }
 @article{craft_collazo_losego_mita_sitar_maria_2008, title={Spectroscopic analysis of the epitaxial CaO (111)-GaN (0002) interface}, volume={92}, ISSN={["0003-6951"]}, DOI={10.1063/1.2887878}, abstractNote={We report an x-ray photoelectron spectroscopy (XPS) study of the CaO∕GaN interface. Epitaxial films of CaO (111) were grown on GaN (0002) and analyzed in situ using XPS. We observe Stranski–Krastanov growth, in which CaO coalesces rapidly, then converts to a three-dimensional mode. Data suggest coalescence within the first nanometer of film growth, indicating growth behavior different from published reports of the analogous MgO–GaN system. We find 1.0±0.2eV for the valence band offset and a 2.5±0.2eV conduction band offset. The results are discussed in terms of their utility in oxide-nitride electronic devices.}, number={8}, journal={APPLIED PHYSICS LETTERS}, author={Craft, H. S. and Collazo, R. and Losego, M. D. and Mita, S. and Sitar, Z. and Maria, J. -P.}, year={2008}, month={Feb} }
 @article{dietz_alevli_atalay_durkaya_collazo_tweedie_mita_sitar_2008, title={The influence of substrate polarity on the structural quality of InN layers grown by high-pressure chemical vapor deposition}, volume={92}, ISSN={["0003-6951"]}, DOI={10.1063/1.2840192}, abstractNote={The influence of substrate polarity on the properties of InN layers grown by high-pressure chemical vapor deposition has been studied. The 2Θ-ω x-ray diffraction scans on InN layers deposited on polar GaN epilayers revealed single-phase InN(0002) with a full width at half maximum (FWHM) of around 200arcsec. InN layers grown on N-polar GaN exhibit larger FWHMs. Rocking curve analysis confirmed single-phase InN for both growth polarities, with FWHM values for ω-RC(002) at 2080arcsec for InN grown on Ga-polar templates. The A1(LO) Raman mode analysis shows higher free carrier concentrations in InN grown on N-polar templates, indicating that polarity affects the incorporation of impurities.}, number={4}, journal={APPLIED PHYSICS LETTERS}, author={Dietz, N. and Alevli, M. and Atalay, R. and Durkaya, G. and Collazo, R. and Tweedie, J. and Mita, S. and Sitar, Z.}, year={2008}, month={Jan} }
 @article{liu_collazo_mita_sitar_duscher_2008, title={Three-dimensional geometry of nanometer-scale AlN pits: A new template for quantum dots?}, volume={20}, DOI={10.1002/adma.200701288}, abstractNote={The exact 3D geometry of nanometer-scale AlN pits is determined by Z-contrast imaging. The figure shows the 3D geometry of an AlN nano-pit and its corresponding GaN quantum dot. An atomic-resolution Z-contrast image is displayed in false color to clearly show the Z-contrast of the image, while the other panel displays a schematic 3D view.}, number={1}, journal={Advanced Materials}, author={Liu, F. D. and Collazo, Ramon and Mita, S. and Sitar, Z. and Duscher, G.}, year={2008}, pages={134-} }
 @article{craft_collazo_losego_mita_sitar_maria_2007, title={Band offsets and growth mode of molecular beam epitaxy grown MgO (111) on GaN (0002) by x-ray photoelectron spectroscopy}, volume={102}, ISSN={["1089-7550"]}, DOI={10.1063/1.2785022}, abstractNote={MgO is a proposed dielectric for use as a tunneling barrier in devices integrating GaN and ferroelectric oxides. In this study, we present data regarding the growth mode and band offsets of MgO grown epitaxially on GaN (0002) surfaces using molecular beam epitaxy. Using in situ x-ray photoelectron spectroscopy (XPS) and molecular beam epitaxy, we determine, from sequential growth experiments, that the growth of MgO proceeds via the Volmer-Weber (three-dimensional) mode, and full coalescence of the film does not occur until approximately 12nm of MgO has been deposited. The observation of a three-dimensional growth mode is in agreement with previously published data. For the valence band offset, we find a value of 1.2±0.2eV, which corresponds to a 3.2eV conduction band offset. XPS measurements suggest a chemically abrupt interface and no effect on band lineup due to the slow coalescence behavior.}, number={7}, journal={JOURNAL OF APPLIED PHYSICS}, author={Craft, H. S. and Collazo, R. and Losego, M. D. and Mita, S. and Sitar, Z. and Maria, J.-P.}, year={2007}, month={Oct} }
 @article{losego_mita_collazo_sitar_maria_2007, title={Epitaxial calcium oxide films deposited on gallium nitride surfaces}, volume={25}, ISSN={["1071-1023"]}, DOI={10.1116/1.2710243}, abstractNote={Solid solutions of rocksalt oxides are proposed for lattice-matched dielectrics in gallium nitride (GaN) electronics. This article explores the epitaxial growth of the rocksalt oxide calcium oxide (CaO) by molecular beam epitaxy on gallium nitride surfaces. As a possible end member to a rocksalt oxide solid solution, it is important to understand the processing space that allows for epitaxial CaO growth. Exposing the GaN surface to the oxidant flux prior to the metal flux is shown to be critical in eliminating polycrystalline growth. The effect of deposition temperature, metal flux, and oxidant flux on the film’s epitaxial crystalline quality is also examined. Optimal epitaxial quality is found for growth temperatures of ⩾600°C and near oxygen pressures of 10−6Torr. Thermal stability of the CaO∕GaN interface is experimentally evaluated. No reaction phases are observed by x-ray diffraction up to 850°C in air and >1100°C in a reducing atmosphere. However, CaO films are found to be extremely reactive with H2...}, number={3}, journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B}, author={Losego, Mark D. and Mita, Seiji and Collazo, Ramon and Sitar, Zlatko and Maria, Jon-Paul}, year={2007}, pages={1029–1032} }
 @article{collazo_mita_rice_dalmau_sitar_2007, title={Simultaneous growth of a GaN p/n lateral polarity junction by polar selective doping}, volume={91}, ISSN={["1077-3118"]}, DOI={10.1063/1.2816893}, abstractNote={Differences in surface energy between the Ga-polar orientation and the N-polar orientation of GaN translate into a completely different behavior for the incorporation of intentional and unintentional impurities. Oxygen is found to be an impurity with higher concentrations in N-polar films than in Ga-polar films and is the cause for the high n-type carrier concentration observed in N-polar films. We fabricated a lateral p∕n junction in GaN by the simultaneous growth of p- and n-type regions, utilizing the doping selectivity of the two different polar domains. The N-polar domains were n type with a carrier concentration of 1.7×1019cm−3, predominantly due to high oxygen incorporation, while Ga-polar domains were p type with a carrier concentration of 1.7×1017cm−3. No significant difference in Mg incorporation was observed between the two polar domains. This junction showed the characteristics that define a p∕n junction: current rectification, electroluminescence, and the photovoltaic effect.}, number={21}, journal={APPLIED PHYSICS LETTERS}, author={Collazo, R. and Mita, S. and Rice, A. and Dalmau, R. F. and Sitar, Z.}, year={2007}, month={Nov} }
 @article{liu_collazo_mita_sitar_duscher_pennycook_2007, title={The mechanism for polarity inversion of GaN via a thin AlN layer: Direct experimental evidence}, volume={91}, ISSN={["1077-3118"]}, DOI={10.1063/1.2815748}, abstractNote={Lateral-polarity heterostructures of GaN on c sapphire were prepared by deposition and patterning of a thin low-temperature AlN nucleation layer. Adjacent macroscopic domains were found to have opposite polarity; domains grown on the AlN nucleation layer were Ga polar while those grown on the nitrided sapphire were N polar, as confirmed by convergent-beam electron diffraction and Z-contrast images. We directly determined the atomic interface structure between the AlN and c sapphire with an aberration-corrected scanning transmission electron microscope at ∼1.0A resolution. This is the direct experimental evidence for the origin of the polarity control in III nitrides. This understanding is an important step toward manipulating polarity in these semiconductors.}, number={20}, journal={APPLIED PHYSICS LETTERS}, author={Liu, Fude and Collazo, Ramon and Mita, Seiji and Sitar, Zlatko and Duscher, Gerd and Pennycook, Stephen J.}, year={2007}, month={Nov} }
 @article{dalmau_collazo_mita_sitar_2007, title={X-ray photoelectron spectroscopy characterization of aluminum nitride surface oxides: Thermal and hydrothermal evolution}, volume={36}, DOI={10.1007/s11664-006-0044-x}, number={4}, journal={Journal of Electronic Materials}, author={Dalmau, R. and Collazo, Ramon and Mita, S. and Sitar, Z.}, year={2007}, pages={414–419} }
 @article{collazo_mita_aleksov_schlesser_sitar_2006, title={Growth of Ga- and N- polar gallium nitride layers by metalorganic vapor phase epitaxy on sapphire wafers}, volume={287}, ISSN={["0022-0248"]}, DOI={10.1016/j.jcrysgro.2005.10.080}, abstractNote={Following an already established polarity control scheme for GaN thin films, we developed a process to simultaneously grow Ga- and N-polarity layers side by side on c-plane sapphire. The simultaneous growth is achieved by properly treating the AlN nucleation/buffer layer and subsequent substrate annealing. During this process, the growth is mass-transfer-limited, permitting the same growth rate for both types of polarity domains. Smooth domains of both polarity types (RMS roughness ∼1–2 nm) were obtained.}, number={2}, journal={JOURNAL OF CRYSTAL GROWTH}, author={Collazo, R and Mita, S and Aleksov, A and Schlesser, R and Sitar, Z}, year={2006}, month={Jan}, pages={586–590} }
 @inproceedings{hoffmann_gerhold_kirste_rice_akouala_xie_mita_collazo_sitar, title={Fabrication and characterization of lateral polar GaN structures for second harmonic generation}, volume={8631}, booktitle={Quantum sensing and nanophotonic devices x}, author={Hoffmann, M. P. and Gerhold, M. and Kirste, R. and Rice, A. and Akouala, C. R. and Xie, J. Q. Q. and Mita, S. and Collazo, R. and Sitar, Z.} }