@inproceedings{polit_dong_2012, title={Design of a high-bandwidth XY nanopositioning stage for high-throughput micro/nano manufacturing}, booktitle={Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2010, vol 3, pts A and B}, author={Polit, S. and Dong, J. Y.}, year={2012}, pages={709–718} }
 @article{polit_dong_2011, title={Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing}, volume={16}, ISSN={["1941-014X"]}, url={http://www.scopus.com/inward/record.url?eid=2-s2.0-79956125765&partnerID=MN8TOARS}, DOI={10.1109/tmech.2010.2052107}, abstractNote={This paper presents the design analysis fabrication and testing of a high-bandwidth piezo-driven parallel kinematic nanopositioning XY stage. The monolithic stage design has two axes and each axis is composed of a doubly clamped beam and a parallelogram hybrid flexure with compliant beams and circular flexure hinges. The doubly clamped beam that is actuated by a piezoelectric actuator acts as a linear prismatic axis. The parallelogram hybrid flexures are used to decouple the actuation effect from the other axis. The mechanism design decouples the motion in the X- and Y-directions and restricts parasitic rotations in the XY plane while allowing for an increased bandwidth with linear kinematics in the operating region. Kinematic and dynamic analysis shows that the mechanical structure of the stage has decoupled motion in XY-direction while achieving high bandwidth and good linearity. The stage is actuated by piezoelectric stack actuators, and two capacitive gauges were added to the system to build a closed-loop positioning system. The results from frequency tests show that the resonant frequencies of the two vibrational modes are over 8 kHz. The stage is capable of about 15 μm of motion along each axis with a resolution of about 1 nm. Due to parallel kinematic mechanism design, a uniform performance is achieved across the workspace. A PI controller is implemented for the stage and a closed-loop bandwidth of 2 kHz is obtained.}, number={4}, journal={IEEE-ASME TRANSACTIONS ON MECHATRONICS}, author={Polit, Sebastian and Dong, Jingyan}, year={2011}, month={Aug}, pages={724–733} }
 @article{polit_dong_2009, title={Design of high-bandwidth high-precision flexure-based nanopositioning modules}, volume={28}, ISSN={["1878-6642"]}, url={http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000278240700004&KeyUID=WOS:000278240700004}, DOI={10.1016/j.jmsy.2010.01.001}, abstractNote={This paper presents the design of a single degree-of-freedom high-bandwidth high-precision nanopositioning module for high-throughput nanomanufacturing applications. Compared with widely used lumped-compliance mechanisms (using notch-flexure hinges) and distributed-compliance mechanisms (using compliant flexure beams), this nanopositioning module adopts a hybrid compliant-notch-flexure-based structure. This flexure design decouples the performance requirements for the structural bandwidth and parasitic accuracy that are correlated in the lumped-compliance mechanisms and distributed-compliance mechanisms. The parallelogram hybrid compliant-notch-flexure-based structure enables simultaneous achievement of a higher structural bandwidth and a smaller parasitic motion. The behavior of the nanopositioning module is analyzed theoretically with respect to its design parameters and performance objectives. Finite element analysis is adapted to study the dynamic responses and parasitic displacement of the designed nanopositioning module. The results from the theoretical and FEA analysis demonstrate the effectiveness of the hybrid compliant-notch-flexure design over commonly used lumped-compliance mechanisms and distributed-compliance mechanisms, especially when a high structural bandwidth is required for high-throughput nanomanufacturing applications.}, number={2-3}, journal={JOURNAL OF MANUFACTURING SYSTEMS}, author={Polit, Sebastian and Dong, Jingyan}, year={2009}, month={Jul}, pages={71–77} }