2022 journal article
The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2
JOURNAL OF APPLIED PHYSICS, 132(24).
By: Y. Lee n, R. Broughton n, H. Hsain n, S. Song n, P. Edgington n, M. Horgan n, A. Dowden n, A. Bednar n ...and 4 other authors, including 2 NC State authors, D. Lee *, G. Parsons n , M. Park * & J. Jones n
2021 journal article
Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching
ACS NANO, 15(7), 12276–12285.
By: S. Song n, J. Kim n, H. Margavio n & G. Parsons n
Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2
RSC ADVANCES, 11(61), 38839–38848.
By: T. Limbu *, B. Adhikari*, S. Song n, B. Chitara*, Y. Tang*, G. Parsons n , F. Yan *
2020 journal article
Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching
JOURNAL OF APPLIED PHYSICS, 128(10).
By: H. Saare n, S. Song n, J. Kim n & G. Parsons n
2019 journal article
Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2
CHEMISTRY OF MATERIALS, 31(13), 4793–4804.
By: S. Song n, H. Saare n & G. Parsons n
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