Seung Keun Song
College of Engineering
Works (5)
Updated: July 5th, 2023 15:18
2022 journal article
The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2
JOURNAL OF APPLIED PHYSICS, 132(24).
aip.scitation.org (publisher PDF)
Sources: Web Of Science, ORCID
Added: January 23, 2023
2021 journal article
Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching
ACS NANO, 15(7), 12276–12285.
author keywords: area-selective deposition; etching; patterning; orthogonal; self-aligned
Sources: Web Of Science, ORCID
Added: August 23, 2021
2021 journal article
Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2
RSC ADVANCES, 11(61), 38839–38848.
Sources: Web Of Science, ORCID
Added: December 20, 2021
2020 journal article
Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching
JOURNAL OF APPLIED PHYSICS, 128(10).
Sources: Web Of Science, ORCID
Added: October 12, 2020
2019 journal article
Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2
CHEMISTRY OF MATERIALS, 31(13), 4793–4804.
Sources: Web Of Science, ORCID
Added: July 29, 2019
