Seung Keun Song

College of Engineering

2020 journal article

Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

JOURNAL OF APPLIED PHYSICS, 128(10).

By: H. Saare, S. Song, J. Kim & G. Parsons

Source: Web Of Science
Added: October 12, 2020

2019 journal article

Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2

CHEMISTRY OF MATERIALS, 31(13), 4793–4804.

By: S. Song, H. Saare & G. Parsons

Source: Web Of Science
Added: July 29, 2019