Seung Keun Song

College of Engineering

Works (5)

Updated: July 5th, 2023 15:18

2022 journal article

The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2

JOURNAL OF APPLIED PHYSICS, 132(24).

By: Y. Lee  n, R. Broughton n, H. Hsain  n, S. Song n, P. Edgington n, M. Horgan n, A. Dowden  n, A. Bednar  n ...

Sources: Web Of Science, ORCID
Added: January 23, 2023

2021 journal article

Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching

ACS NANO, 15(7), 12276–12285.

By: S. Song n, J. Kim n, H. Margavio n & G. Parsons n 

author keywords: area-selective deposition; etching; patterning; orthogonal; self-aligned
TL;DR: This work introduces low-temperature chemically self-aligned film growth via simultaneous thin film deposition and etching in adjacent regions on a nanopatterned surface and shows capacity for self- aligned dielectric patterning via favorable deposition of AlF3 on Al2O3 with simultaneous atomic layer etching of sacrificial ZnO. (via Semantic Scholar)
Sources: Web Of Science, ORCID
Added: August 23, 2021

2021 journal article

Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2

RSC ADVANCES, 11(61), 38839–38848.

By: T. Limbu*, B. Adhikari*, S. Song n, B. Chitara*, Y. Tang *, G. Parsons n , F. Yan *

Sources: Web Of Science, ORCID
Added: December 20, 2021

2020 journal article

Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

JOURNAL OF APPLIED PHYSICS, 128(10).

By: H. Saare n, S. Song n, J. Kim n & G. Parsons n 

UN Sustainable Development Goal Categories
6. Clean Water and Sanitation (OpenAlex)
Sources: Web Of Science, ORCID
Added: October 12, 2020

2019 journal article

Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2

CHEMISTRY OF MATERIALS, 31(13), 4793–4804.

By: S. Song n, H. Saare n & G. Parsons n 

Sources: Web Of Science, ORCID
Added: July 29, 2019

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