Seung Keun Song

College of Engineering

2021 journal article

Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching

ACS NANO.

By: S. Song, J. Kim, H. Margavio & G. Parsons

Source: Web Of Science
Added: August 23, 2021

2020 journal article

Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

JOURNAL OF APPLIED PHYSICS, 128(10).

By: H. Saare, S. Song, J. Kim & G. Parsons

Source: Web Of Science
Added: October 12, 2020

2019 journal article

Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2

CHEMISTRY OF MATERIALS, 31(13), 4793–4804.

By: S. Song, H. Saare & G. Parsons

Source: Web Of Science
Added: July 29, 2019