@article{lee_broughton_hsain_song_edgington_horgan_dowden_bednar_lee_parsons_et al._2022, title={The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2}, volume={132}, ISSN={["1089-7550"]}, DOI={10.1063/5.0128038}, number={24}, journal={JOURNAL OF APPLIED PHYSICS}, author={Lee, Younghwan and Broughton, Rachel A. and Hsain, H. Alex and Song, Seung Keun and Edgington, Patrick G. and Horgan, Madison D. and Dowden, Amy and Bednar, Amanda and Lee, Dong Hyun and Parsons, Gregory N. and et al.}, year={2022}, month={Dec} }
 @article{song_kim_margavio_parsons_2021, title={Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching}, volume={15}, ISSN={["1936-086X"]}, DOI={10.1021/acsnano.1c04086}, number={7}, journal={ACS NANO}, author={Song, Seung Keun and Kim, Jung-Sik and Margavio, Hannah R. M. and Parsons, Gregory N.}, year={2021}, month={Jul}, pages={12276–12285} }
 @article{limbu_adhikari_song_chitara_tang_parsons_yan_2021, title={Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2}, volume={11}, ISSN={["2046-2069"]}, DOI={10.1039/d1ra07787b}, number={61}, journal={RSC ADVANCES}, author={Limbu, Tej B. and Adhikari, Bikram and Song, Seung Keun and Chitara, Basant and Tang, Yongan and Parsons, Gregory N. and Yan, Fei}, year={2021}, month={Dec}, pages={38839–38848} }
 @article{saare_song_kim_parsons_2020, title={Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching}, volume={128}, ISSN={["1089-7550"]}, DOI={10.1063/5.0013552}, number={10}, journal={JOURNAL OF APPLIED PHYSICS}, author={Saare, Holger and Song, Seung Keun and Kim, Jung-Sik and Parsons, Gregory N.}, year={2020}, month={Sep} }
 @article{song_saare_parsons_2019, title={Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2}, volume={31}, ISSN={["1520-5002"]}, DOI={10.1021/acs.chemmater.9b01143}, number={13}, journal={CHEMISTRY OF MATERIALS}, author={Song, Seung Keun and Saare, Holger and Parsons, Gregory N.}, year={2019}, month={Jul}, pages={4793–4804} }