Seung Keun Song

Lee, Y., Broughton, R. A., Hsain, H. A., Song, S. K., Edgington, P. G., Horgan, M. D., … Jones, J. L. (2022). The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2. JOURNAL OF APPLIED PHYSICS, 132(24). https://doi.org/10.1063/5.0128038

Song, S. K., Kim, J.-S., Margavio, H. R. M., & Parsons, G. N. (2021). Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching. ACS NANO, 15(7), 12276–12285. https://doi.org/10.1021/acsnano.1c04086

Limbu, T. B., Adhikari, B., Song, S. K., Chitara, B., Tang, Y., Parsons, G. N., & Yan, F. (2021). Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2. RSC ADVANCES, 11(61), 38839–38848. https://doi.org/10.1039/d1ra07787b

Saare, H., Song, S. K., Kim, J.-S., & Parsons, G. N. (2020). Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching. JOURNAL OF APPLIED PHYSICS, 128(10). https://doi.org/10.1063/5.0013552

Song, S. K., Saare, H., & Parsons, G. N. (2019). Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2. CHEMISTRY OF MATERIALS, 31(13), 4793–4804. https://doi.org/10.1021/acs.chemmater.9b01143