Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive
IEEE Transactions on Plasma Science, 42(7), 1880–1893.
By: D. Coumou*, D. Clark n, T. Kummerer n, M. Hopkins*, D. Sullivan* & S. Shannon n
co-author countries:Ireland 🇮🇪United States of America 🇺🇸
Contributors: D. Coumou*, D. Clark n, T. Kummerer n, M. Hopkins*, D. Sullivan* & S. Shannon n
author keywords: Automatic control; digital control; digital filters; frequency-locked loops; ion energy distribution function (IEDF); phase frequency detector; phase-locked loops; plasma density; plasma properties; plasma sheaths; plasmas; radio frequency (RF); real-time systems; RF signals
