2014 journal article

Ion energy distribution skew control using phase-locked harmonic RF bias driveion energy distribution skew control using phase-locked harmonic RF bias drive

IEEE Transactions on Plasma Science, 42(7), 1880–1893.

By: D. Coumou, D. Clark, T. Kummerer, M. Hopkins, D. Sullivan & S. Shannon

Source: NC State University Libraries
Added: August 6, 2018