Theresa Kummerer

Works (1)

Updated: July 5th, 2023 15:42

2014 journal article

Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive

IEEE Transactions on Plasma Science, 42(7), 1880–1893.

By: D. Coumou *, D. Clark n, T. Kummerer n, M. Hopkins*, D. Sullivan* & S. Shannon n 

Contributors: D. Coumou *, D. Clark n, T. Kummerer n, M. Hopkins*, D. Sullivan* & S. Shannon n 

author keywords: Automatic control; digital control; digital filters; frequency-locked loops; ion energy distribution function (IEDF); phase frequency detector; phase-locked loops; plasma density; plasma properties; plasma sheaths; plasmas; radio frequency (RF); real-time systems; RF signals
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