Works (1)

Updated: July 5th, 2023 15:42

2014 journal article

Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive

IEEE Transactions on Plasma Science, 42(7), 1880–1893.

By: D. Coumou*, D. Clark n, T. Kummerer n, M. Hopkins*, D. Sullivan* & S. Shannon n

co-author countries: Ireland 🇮🇪 United States of America 🇺🇸

Contributors: D. Coumou*, D. Clark n, T. Kummerer n, M. Hopkins*, D. Sullivan* & S. Shannon n

author keywords: Automatic control; digital control; digital filters; frequency-locked loops; ion energy distribution function (IEDF); phase frequency detector; phase-locked loops; plasma density; plasma properties; plasma sheaths; plasmas; radio frequency (RF); real-time systems; RF signals
Sources: Web Of Science, ORCID, Crossref
Added: August 6, 2018