2014 journal article

Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive

IEEE Transactions on Plasma Science, 42(7), 1880–1893.

By: D. Coumou*, D. Clark n, T. Kummerer, M. Hopkins*, D. Sullivan* & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018