Works (1)
Updated: July 5th, 2023 15:42
2014 journal article
Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive
IEEE Transactions on Plasma Science, 42(7), 1880–1893.
Contributors: D. Coumou*, D. Clark n, n, M. Hopkins*, D. Sullivan* & S. Shannon n
author keywords: Automatic control; digital control; digital filters; frequency-locked loops; ion energy distribution function (IEDF); phase frequency detector; phase-locked loops; plasma density; plasma properties; plasma sheaths; plasmas; radio frequency (RF); real-time systems; RF signals
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
13. Climate Action
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018
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