@article{stein_khachariya_mecouch_mita_reddy_tweedie_sierakowski_kamler_bockowski_kohn_et al._2023, title={Analysis of Vertical GaN JBS and p-n Diodes by Mg Ion Implantation and Ultrahigh-Pressure Annealing}, volume={12}, ISSN={["1557-9646"]}, url={https://doi.org/10.1109/TED.2023.3339592}, DOI={10.1109/TED.2023.3339592}, abstractNote={We report on vertical GaN junction barrier Schottky (JBS) diodes formed by Mg ion implantation and ultrahigh -pressure annealing (UHPA). The static ON-state characteristics of the diodes show an ideality factor of 1.05, a turn-on voltage of ~0.7 V, a current rectification ratio of $\sim 10^{11}$ , and a low differential specific ON-resistance that scales with Schottky stripe width in fair agreement with the analytical model. The reverse leakage dependence on Schottky stripe width also agrees well with the analytical model. Implanted p-n junction diodes fabricated on the same wafer exhibit avalanche breakdown in reverse bias with a positive temperature coefficient, but the forward current is limited by a series barrier. Temperature-dependent current–voltage measurements of th p-n diodes verify the presence of the implanted p-n junction and reveal an additional 0.43-eV barrier, which we hypothesize arises from a p-Schottky contact and forms a second diode back-to-back with the p-n junction. This interpretation is supported by analysis of the capacitance–voltage characteristics of the implanted p-n diodes, epitaxial p-n diodes fabricated with intentional p-Schottky contacts, and comparison to TCAD simulations. Ultimately, the presence of the p-Schottky contact does not hinder JBS diode operation. The use of diffusion-aware designs and/or diffusion reduction represents future directions for Mg implantation technology in GaN power devices.}, number={3}, journal={IEEE TRANSACTIONS ON ELECTRON DEVICES}, author={Stein, Shane R. and Khachariya, Dolar and Mecouch, Will and Mita, Seiji and Reddy, Pramod and Tweedie, James and Sierakowski, Kacper and Kamler, Grzegorz and Bockowski, Michal and Kohn, Erhard and et al.}, year={2023}, month={Dec} }
 @article{wang_kirste_mita_washiyama_mecouch_reddy_collazo_sitar_2022, title={<p>The role of Ga supersaturation on facet formation in the epitaxial lateral overgrowth of GaN</p>}, volume={120}, ISSN={["1077-3118"]}, url={http://www.scopus.com/inward/record.url?eid=2-s2.0-85123754060&partnerID=MN8TOARS}, DOI={10.1063/5.0077628}, abstractNote={In this paper, facet formation of (0001) {112¯0} {112¯2} facets during epitaxial lateral overgrowth (ELO) of GaN is investigated for different Ga vapor supersaturations. The ELO was conducted via metalorganic chemical vapor deposition on patterned GaN/sapphire templates with SiO2 masks aligned along the ⟨11¯00⟩ direction of GaN. Scanning electron microscopy was used to characterize the cross section shapes of the ELO GaN islands. A correlation of supersaturation, facet formation, and the shape of the ELO GaN islands is found. It is shown that {112¯2} facets are favored under high Ga vapor supersaturation, while {112¯0} facets are favored under low Ga vapor supersaturation. A qualitative model based on Wulff construction and density functional theory calculation is proposed to illustrate the mechanism of the facet formation of the ELO GaN islands.}, number={3}, journal={APPLIED PHYSICS LETTERS}, author={Wang, Ke and Kirste, Ronny and Mita, Seiji and Washiyama, Shun and Mecouch, Will and Reddy, Pramod and Collazo, Ramon and Sitar, Zlatko}, year={2022}, month={Jan} }
 @article{reddy_mecouch_breckenridge_khachariya_bagheri_kim_guan_mita_moody_tweedie_et al._2022, title={Large-Area, Solar-Blind, Sub-250 nm Detection AlGaN Avalanche Photodiodes Grown on AlN Substrates}, volume={3}, ISSN={["1862-6270"]}, url={https://doi.org/10.1002/pssr.202100619}, DOI={10.1002/pssr.202100619}, abstractNote={Herein, Al‐rich AlGaN‐based avalanche photodiodes (APDs) grown on single crystal AlN substrates high ultraviolet‐C sensitivity for λ < 200 nm are fabricated, while exhibiting blindness to λ > 250 nm. A maximum quantum efficiency of 68% and peak gain of 320 000 are estimated resulting in a figure of merit of ≈220 000 in devices with ϕ = 100 μm. As expected, a decrease in gain with increase in device size is observed and a gain of ≈20 000 is estimated in devices with ϕ = 400 μm. Overall, two orders of magnitude higher performance are observed in APDs on single crystal AlN substrates compared to those on sapphire.}, number={6}, journal={PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS}, publisher={Wiley}, author={Reddy, Pramod and Mecouch, Will and Breckenridge, M. Hayden and Khachariya, Dolar and Bagheri, Pegah and Kim, Ji Hyun and Guan, Yan and Mita, Seiji and Moody, Baxter and Tweedie, James and et al.}, year={2022}, month={Mar} }
 @article{khachariya_stein_mecouch_breckenridge_rathkanthiwar_mita_moody_reddy_tweedie_kirste_et al._2022, title={Vertical GaN junction barrier Schottky diodes with near-ideal performance using Mg implantation activated by ultra-high-pressure annealing}, volume={15}, ISSN={["1882-0786"]}, url={http://www.scopus.com/inward/record.url?eid=2-s2.0-85139392288&partnerID=MN8TOARS}, DOI={10.35848/1882-0786/ac8f81}, abstractNote={Abstract
               We report a kV class, low ON-resistance, vertical GaN junction barrier Schottky (JBS) diode with selective-area p-regions formed via Mg implantation followed by high-temperature, ultra-high pressure (UHP) post-implantation activation anneal. The JBS has an ideality factor of 1.03, a turn-on voltage of 0.75 V, and a specific differential ON-resistance of 0.6 mΩ·cm2. The breakdown voltage of the JBS diode is 915 V, corresponding to a maximum electric field of 3.3 MV cm−1. These results underline that high-performance GaN JBS can be realized using Mg implantation and high-temperature UHP post-activation anneal.}, number={10}, journal={APPLIED PHYSICS EXPRESS}, author={Khachariya, Dolar and Stein, Shane and Mecouch, Will and Breckenridge, M. Hayden and Rathkanthiwar, Shashwat and Mita, Seiji and Moody, Baxter and Reddy, Pramod and Tweedie, James and Kirste, Ronny and et al.}, year={2022}, month={Oct} }