Works (2)
Updated: July 5th, 2023 15:45
2013 journal article
Temperature-dependent material properties of Z-shaped MEMS thermal actuators made of single crystalline silicon
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 23(12).
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
2012 journal article
Z-Shaped MEMS Thermal Actuators: Piezoresistive Self-Sensing and Preliminary Results for Feedback Control
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21(3), 596–604.
author keywords: Feedback control; nanomechanical testing; piezoresistivity; self-sensing; thermal actuator; Z-shaped
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
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