Works (2)
2013 journal article
Temperature-dependent material properties of Z-shaped MEMS thermal actuators made of single crystalline silicon
Journal of Micromechanics and Microengineering, 23(12), 125036.
Contributors: Y. Zhu n *, M. McDonald &
2012 journal article
Z-Shaped MEMS Thermal Actuators: Piezoresistive Self-Sensing and Preliminary Results for Feedback Control
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21(3), 596–604.
Contributors: Y. Zhu n n &