2013 journal article

Temperature-dependent material properties of Z-shaped MEMS thermal actuators made of single crystalline silicon

Journal of Micromechanics and Microengineering, 23(12).

By: J. Ouyang, M. McDonald & Y. Zhu

Source: NC State University Libraries
Added: August 6, 2018

2012 journal article

Z-shaped MEMS thermal actuators: Piezoresistive self-sensing and Preliminary Results for Feedback Control

Journal of Microelectromechanical Systems, 21(3), 596–604.

By: J. Ouyang & Y. Zhu

Source: NC State University Libraries
Added: August 6, 2018