2010 journal article

Impact of in situ oxygen plasma cleaning on the resistance of Ru and Au-Ru based rf microelectromechanical system contacts in vacuum

Journal of Applied Physics, 107(8).

By: M. Walker, C. Nordquist, D. Czaplewski, G. Patrizi, N. McGruer & J. Krim

Source: NC State University Libraries
Added: August 6, 2018

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