2017 journal article
Thermal selective vapor etching of TiO2: Chemical vapor etching via WF6 and self-limiting atomic layer etching using WF6 and BCl3
Chemistry of Materials, 29(16), 6653–6665.
2017 journal article
Understanding inherent substrate selectivity during atomic layer deposition: Effect of surface preparation, hydroxyl density, and metal oxide composition on nucleation mechanisms during tungsten ALD
Journal of Chemical Physics, 146(5).
2016 journal article
Copper benzenetricarboxylate metal-organic framework nucleation mechanisms on metal oxide powders and thin films formed by atomic layer deposition
ACS Applied Materials & Interfaces, 8(14), 9514–9522.
2016 journal article
Rapid visible color change and physical swelling during water exposure in triethanolamine-metalcone films formed by molecular layer deposition
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 34(1).
2016 journal article
Using hydrogen to expand the inherent substrate selectivity window during tungsten atomic layer deposition
Chemistry of Materials, 28(1), 117–126.
2016 journal article
Wafer-scale selective-area deposition of nanoscale metal oxide features using vapor saturation into patterned poly(methyl methacrylate) templates
Advanced Materials Interfaces, 3(2).
2015 journal article
Conformal and highly adsorptive metal-organic framework thin films via layer-by-layer growth on ALD-coated fiber mats
Journal of Materials Chemistry A, 3(4), 1458–1464.
2015 journal article
Facile conversion of hydroxy double salts to metal-organic frameworks using metal oxide particles and atomic layer deposition thin-film templates
Journal of the American Chemical Society, 137(43), 13756–13759.
2015 journal article
Platinum-free cathode for dye-sensitized solar cells using poly(3,4-ethylenedioxythiophene) (PEDOT) formed via oxidative molecular layer deposition
ACS Applied Materials & Interfaces, 7(7), 3866–3870.
2014 journal article
Highly adsorptive, MOF-functionalized nonwoven fiber mats for hazardous gas capture enabled by atomic layer deposition
Advanced Materials Interfaces, 1(4).