2017 journal article
Thermal Selective Vapor Etching of TiO2: Chemical Vapor Etching via WF6 and Self-Limiting Atomic Layer Etching Using WF6 and BCl3
CHEMISTRY OF MATERIALS, 29(16), 6653–6665.
2016 journal article
Copper Benzenetricarboxylate Metal-Organic Framework Nucleation Mechanisms on Metal Oxide Powders and Thin Films formed by Atomic Layer Deposition
ACS APPLIED MATERIALS & INTERFACES, 8(14), 9514–9522.
Contributors: J. Zhao n, P. Williams n, H. Walls *, S. Shepherd*, M. Losego n, G. Peterson, G. Parsons n n,
2016 journal article
Understanding inherent substrate selectivity during atomic layer deposition: Effect of surface preparation, hydroxyl density, and metal oxide composition on nucleation mechanisms during tungsten ALD
JOURNAL OF CHEMICAL PHYSICS, 146(5).
Contributors: M. King n & G. Parsons n n,
2016 journal article
Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition
CHEMISTRY OF MATERIALS, 28(1), 117–126.
Contributors: B. Kalanyan n, n, S. Atanasov n, M. Ritz n & G. Parsons n
2015 journal article
Facile Conversion of Hydroxy Double Salts to Metal-Organic Frameworks Using Metal Oxide Particles and Atomic Layer Deposition Thin-Film Templates
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 137(43), 13756–13759.
Contributors: J. Zhao n, W. Nunn n, n, Y. Lin n, M. Dickey n , C. Oldham n, H. Walls *, G. Peterson, M. Losego *, G. Parsons n
2015 journal article
Platinum-Free Cathode for Dye-Sensitized Solar Cells Using Poly(3,4-ethylenedioxythiophene) (PEDOT) Formed via Oxidative Molecular Layer Deposition
ACS APPLIED MATERIALS & INTERFACES, 7(7), 3866–3870.
Contributors: D. Kim n, S. Atanasov n, n, K. Lee n & G. Parsons n
2015 journal article
Rapid visible color change and physical swelling during water exposure in triethanolamine-metalcone films formed by molecular layer deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).
Contributors: C. Oldham n & G. Parsons n n,
2015 journal article
Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates
ADVANCED MATERIALS INTERFACES, 3(2).
Contributors: E. Dandley n, n, Z. Zhu *, A. Yoon*, L. Sheet* & G. Parsons n
2014 journal article
Conformal and highly adsorptive metal-organic framework thin films via layer-by-layer growth on ALD-coated fiber mats
JOURNAL OF MATERIALS CHEMISTRY A, 3(4), 1458–1464.
Contributors: J. Zhao n, B. Gong n, W. Nunn n, n, E. Stevens n, F. Sidi n, P. Williams n, C. Oldham n
2014 journal article
Highly adsorptive, MOF-functionalized nonwoven fiber mats for hazardous gas capture enabled by atomic layer deposition
Advanced Materials Interfaces, 1(4).
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