Works (7)
2009 article
Erbium Silicide Formation on Si[sub 1−x]C[sub x] Epitaxial Layers
Alptekin, E., Ozturk, M. C., Misra, V., Cho, Y., Kim, Y., & Chopra, S. (2009, January 1). Journal of The Electrochemical Society, Vol. 156, pp. H378–383.
2007 patent
Methods of fabricating strained semiconductor-on-insulator field-effect transistors and related devices
Washington, DC: U.S. Patent and Trademark Office.
2007 article
Quantitative nanoscale local strain profiling in embedded SiGe metal-oxide-semiconductor structures
Zhao, W., Duscher, G., Rozgonyi, G., Zikry, M. A., Chopra, S., & Ozturk, M. C. (2007, May 7). Applied Physics Letters, Vol. 90.
Contributors: W. Zhao n, G. Duscher n, G. Rozgonyi n, M. Zikry n , n & M. Ozturk n
2007 article
The effects of nickel germanosilicide contacts on the biaxial compressive stress in thin epitaxial silicon-germanium alloys on silicon
Chopra, S., Ozturk, M. C., Misra, V., Ren, Z., & McNeil, L. E. (2007, October 1). Applied Physics Letters, Vol. 91.
2006 article
Analysis of boron strain compensation in silicon-germanium alloys by Raman spectroscopy
Chopra, S., Ozturk, M. C., Misra, V., McGuire, K., & McNeil, L. E. (2006, May 15). Applied Physics Letters, Vol. 88.
2006 patent
Carbon nanotube based resonant-circuit sensor
Washington, DC: U.S. Patent and Trademark Office.
2006 article
Critical thickness of heavily boron-doped silicon-germanium alloys
Chopra, S., Ozturk, M. C., Misra, V., McGuire, K., & McNeil, L. E. (2006, November 13). Applied Physics Letters, Vol. 89.