Works (9)
2003 journal article
Breakdown and reliability of p-MOS devices with stacked RPECVD oxide/nitride gate dielectric under constant voltage stress
MICROELECTRONICS RELIABILITY, 44(2), 207–212.
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2003 journal article
Structural dependence of breakdown characteristics and electrical degradation in ultrathin RPECVD oxide/nitride gate dielectrics under constant voltage stress
SOLID-STATE ELECTRONICS, 47(1), 71–76.
2000 journal article
1.6 nm oxide equivalent gate dielectrics using nitride/oxide (N/O) composites prepared by RPECVD/oxidation process
IEEE ELECTRON DEVICE LETTERS, 21(3), 116–118.
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2000 journal article
The performance and reliability of PMOSFET's with ultrathin silicon nitride/oxide stacked gate dielectrics with nitrided Si-SiO2 interfaces prepared by remote plasma enhanced CVD and post-deposition rapid thermal annealing
IEEE TRANSACTIONS ON ELECTRON DEVICES, 47(7), 1361–1369.
2000 journal article
Time-dependent dielectric wearout technique with temperature effect for reliability test of ultrathin (< 2.0 nm) single layer and dual layer gate oxides
Time-dependent dielectric wearout technique with temperature effect for reliability test of ultrathin (< 2.0 nm) single layer and dual layer gate oxides. MICROELECTRONICS RELIABILITY, 40(12), 1987–1995.
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1999 journal article
Bonding constraints and defect formation at interfaces between crystalline silicon and advanced single layer and composite gate dielectrics
APPLIED PHYSICS LETTERS, 74(14), 2005–2007.
1999 journal article
Time dependent dielectric wearout (TDDW) technique for reliability of ultrathin gate oxides
IEEE ELECTRON DEVICE LETTERS, 20(6), 262–264.
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1998 article
Optimization of nitrided gate dielectrics by plasma-assisted and rapid thermal processing
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 16, pp. 1721–1729.
1998 journal article
Ultrathin nitride/oxide (N/O) gate dielectrics for p(+)-polysilicon gated PMOSFET's prepared by a combined remote plasma enhanced CVD thermal oxidation process
IEEE ELECTRON DEVICE LETTERS, 19(10), 367–369.