Displaying works 21 - 23 of 23 in total
Sorted by most recent date added to the index first, which may not be the same as publication date order.
1999 journal article
Growth of selective silicon epitaxy using disilane and chlorine on heavily implanted substrates - I. Role of implanted BF2
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(8), 3070–3078.
1999 journal article
Low thermal budget surface preparation for selective epitaxy a study on process robustness
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(4), 1557–1564.
1999 journal article
Effects of oxygen during selective silicon epitaxial growth using disilane and chlorine
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(6), 2344–2352.
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