Works (13)

2004 journal article

A novel approach for determining the effective tunneling mass of electrons in HfO2 and other high-K alternative gate dielectrics for advanced CMOS devices

Microelectronic Engineering, 72(04-Jan), 257–262.

By: C. Hinkle, C. Fulton, R. Nemanich & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

A spectroscopic phase separation study distinguishing between chemical with different degrees of crystallinity in Zr(Hf) silicate alloys

Surface Science, 566(Sep 20 2004), 772–776.

By: G. Lucovsky, G. Rayner, D. Kang, C. Hinkle & J. Hong

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

A spectroscopic study distinguishing between chemical phase separation with different degrees of crystallinity in Hf(Zr) silicate alloys

Applied Surface Science, 234(37990), 429–433.

By: G. Lucovsky, G. Rayner, D. Kang, C. Hinkle & J. Hong

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Chemical phase separation in Zr silicate alloys: a spectroscopic study distinguishing between chemical phase separation with different degree of micro- and nano-crystallinity

Microelectronic Engineering, 72(04-Jan), 304–309.

By: G. Rayner, D. Kang, C. Hinkle, J. Hong & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Effect of N-2 plasma on yttrium oxide and yttrium-oxynitride dielectrics

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 22(3), 445–451.

By: D. Niu, R. Ashcraft, C. Hinkle & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Enhanced tunneling in stacked gate dielectrics with ultra-thin HfO2 (ZrO2) layers sandwiched between thicker SiO2 layers

Surface Science, 566(Sep 20 2004), 1185–1189.

By: C. Hinkle, C. Fulton, R. Nemanich & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Enhanced tunneling in stacked gate dielectrics with ultra-thin HfO2 layers sandwiched between thicker SiO2 layers

Applied Surface Science, 234(37990), 240–245.

By: C. Hinkle, C. Fulton, R. Nemanich & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Nitrogen bonding, stability, and transport in AlON films on Si

Applied Physics Letters, 84(24), 4992–4994.

By: G. Soares, K. Bastos, R. Pezzi, L. Miotti, C. Driemeier, I. Baumvol, C. Hinkle, G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon

Applied Physics Letters, 84(23), 4629–4631.

By: L. Edge, D. Schlom, R. Brewer, Y. Chabal, J. Williams, S. Chambers, C. Hinkle, G. Lucovsky ...

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Thermal stability of plasma-nitrided aluminum oxide films on Si

Applied Physics Letters, 84(1), 97–99.

By: K. Bastos, R. Pezzi, L. Miotti, G. Soares, C. Driemeier, J. Morais, I. Baumvol, C. Hinkle, G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

2003 journal article

Remote plasma-assisted nitridation (RPN): applications to Zr and Hf silicate alloys and Al2O3

Applied Surface Science, 216(04-Jan), 124–132.

By: C. Hinkle & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

Electron trapping in non-crystalline Ta- and Hf-aluminates for gate dielectric applications in aggressively scaled silicon devices

Solid-State Electronics, 46(11), 1799–1805.

By: R. Johnson, J. Hong, C. Hinkle & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

Electron trapping in noncrystalline remote plasma deposited Hf- aluminate alloys for gate dielectric applications

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(3), 1126–1131.

By: R. Johnson, J. Hong, C. Hinkle & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018