Works (15)

Updated: July 5th, 2023 15:57

2009 conference paper

Predeposition plasma nitridation process applied to Ge substrates to passivate interfaces between crystalline-Ge substrates and Hf-based high-K dielectrics

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 27(1), 294–299.

By: G. Lucovsky, J. Long, K. Chung, H. Seo, B. Watts, R. Vasic, M. Ulrich

Source: NC State University Libraries
Added: August 6, 2018

2008 journal article

Bulk defects in nano-crystalline and in non-crystalline HfO2-based thin film dielectrics

THIN SOLID FILMS, 517(1), 437–440.

By: S. Lee n, H. Seo n, G. Lucovsky n, L. Fleming n, M. Ulrich n & J. Luening

author keywords: Thin film high-k dielectrics; Non-crystalline transition metal oxides; Nano-crystalline transition metal oxides; Bulk defects; Intrinsic bonding defects; Divacancies
Source: Web Of Science
Added: August 6, 2018

2008 journal article

Suppression of Ge-O and Ge-N bonding at Ge-HfO2 and Ge-TiO2 interfaces by deposition onto plasma-nitrided passivated Ge substrates: Integration issues Ge gate stacks into advanced devices

MICROELECTRONICS RELIABILITY, 48(3), 364–369.

TL;DR: Near edge X-ray absorption spectroscopy (NEXAS) has been used to determine nano-scale morphology of thin films of nano-crystalline transition metal (TM) elemental oxides and identifies a new and novel application for NEXAS based on the resonant character of the respective O K{sub 1} and N K{ sub 1} edge absorptions. (via Semantic Scholar)
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2008 journal article

Suppression of defect states in HfSiON gate dielectric films on n-type Ge(100) substrates

APPLIED PHYSICS LETTERS, 93(18).

By: K. Chung n, H. Seo n, J. Long n & G. Lucovsky n

author keywords: annealing; conduction bands; defect states; diffusion; ellipsometry; germanium; hafnium compounds; high-k dielectric thin films; ion-surface impact; X-ray absorption spectra
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Web Of Science
Added: August 6, 2018

2007 article

Defect reduction by suppression of pi-bonding coupling in nano- and non-crystalline high-(medium)-kappa gate dielectrics

MICROELECTRONIC ENGINEERING, Vol. 84, pp. 2350–2353.

author keywords: high-/medium-kappa dielectrics; spectroscopic studies; fundamental electronic states; band edge defects
Source: Web Of Science
Added: August 6, 2018

2007 article

Intrinsic electronically active defects in transition metal elemental oxides

Lucovsky, G., Seo, H., Lee, S., Fleming, L. B., Ulrich, M. D., Luning, J., … Bersuker, G. (2007, April). JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, Vol. 46, pp. 1899–1909.

By: G. Lucovsky n, H. Seo n, S. Lee n, L. Fleming n, M. Ulrich n, J. Luning*, P. Lysaght, G. Bersuker

author keywords: transition metal oxides; crystal field and Jahn-Teller d-state splittings; ab initio molecular orbital theory; valence and conduction band states; intrinsic defect states; coherent pi-bonding interactions; nanocrystalline length scales of order
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Web Of Science
Added: August 6, 2018

2007 article

Length scales for coherent pi-bonding interactions in complex high-k oxide dielectrics and their interfaces

MICROELECTRONIC ENGINEERING, Vol. 84, pp. 2298–2301.

By: H. Seo n, G. Lucovsky n, L. Fleming n, M. Ulrich n, J. Luning*, G. Koster*, T. Geballe*

author keywords: length scales of order; spectroscopic studies; nanocrystalline complex oxides and complex oxide alloys
Source: Web Of Science
Added: August 6, 2018

2007 article

Spectroscopic studies of O-vacancy defects in transition metal oxides

Lucovsky, G., Luening, J., Fleming, L. B., Ulrich, M. D., Rowe, J. E., Seo, H., … Bersuker, G. (2007, October). JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, Vol. 18, pp. S263–S266.

By: G. Lucovsky n, J. Luening, L. Fleming n, M. Ulrich n, J. Rowe*, H. Seo n, S. Lee n, P. Lysaght, G. Bersuker

UN Sustainable Development Goal Categories
13. Climate Action (OpenAlex)
Source: Web Of Science
Added: August 6, 2018

2007 article

Studies of bonding defects, and defect state suppression in HfO2 by soft X-ray absorption and photoelectron spectroscopies

Lucovsky, G., Seo, H., Fleming, L. B., Luening, J., Lysaght, P., & Bersuker, G. (2007, September 15). SURFACE SCIENCE, Vol. 601, pp. 4236–4241.

By: G. Lucovsky n, H. Seo n, L. Fleming n, J. Luening, P. Lysaght & G. Bersuker

author keywords: transition metal oxides; crystal field and Jahn-Teller d-state splittings; Ab initio molecular orbital theory; intrinsic bonding states; intrinsic defect states
Source: Web Of Science
Added: August 6, 2018

2007 article

Total dose and bias temperature stress effects for HfSiON on Si MOS capacitors

Chen, D. K., Mamouni, E. E., Zhou, X. J., Schrimpf, R. D., Fleetwood, D. M., Galloway, K. F., … Cressler, J. D. (2007, December). IEEE TRANSACTIONS ON NUCLEAR SCIENCE, Vol. 54, pp. 1931–1937.

By: D. Chen*, E. Mamouni*, X. Zhou*, R. Schrimpf*, D. Fleetwood*, K. Galloway*, S. Lee n, H. Seo n ...

author keywords: alternative dielectrics; bias-temperature instability; HfSiON; nitridation; total-dose irradiation
Source: Web Of Science
Added: August 6, 2018

2006 article

Intrinsic nanocrystalline grain-boundary and oxygen atom vacancy defects in ZrO2 and HfO2

Lucovsky, G., Hinkle, C. L., Fulton, C. C., Stoute, N. A., Seo, H., & Luning, J. (2006, November). RADIATION PHYSICS AND CHEMISTRY, Vol. 75, pp. 2097–2101.

author keywords: X-ray absorption spectra; transition metal oxides; X-ray absorption spectra; Jahn-Teller splittings; conduction band edge states; grain-boundary defect states; oxygen atom vacancies; interfacial traps
Source: Web Of Science
Added: August 6, 2018

2006 article

Suppression of Jahn-Teller term-split band edge states in the x-ray absorption spectra of non-crystalline Zr silicates and Si oxynitride alloys, and alloys of ZrO2 with Y2O3

Lucovsky, G., Fulton, C. C., Ju, B. S., Stoute, N. A., Tao, S., Aspnes, D. E., & Luening, J. (2006, November). RADIATION PHYSICS AND CHEMISTRY, Vol. 75, pp. 1591–1595.

By: G. Lucovsky n, C. Fulton n, B. Ju n, N. Stoute n, S. Tao n, D. Aspnes n, J. Luening

author keywords: x-ray absorption spectra; x-ray absorption spectroscopy; Jahn-Teller term-spit states; Zr silicate alloys; cubic zirconia and hafnia
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2005 journal article

Characterization of remote inductively coupled CH4-N-2 plasma for carbon nitride thin-film deposition

Journal of Applied Physics, 98(4).

By: H. Seo, J. Kim, K. Chung, J. Kim, S. Kim & H. Jeon

Source: NC State University Libraries
Added: August 6, 2018

2005 journal article

Deposition and plasma measurements of Zr-oxide films with low impurity concentrations by remote PEALD

ELECTROCHEMICAL AND SOLID STATE LETTERS, 8(3), G82–G84.

By: J. Kim*, S. Kim*, H. Seo n, J. Kim* & H. Jeon*

Source: Web Of Science
Added: August 6, 2018

2005 journal article

Surface characteristics of indium-tin oxide cleaned by remote plasma

Japanese Journal of Applied Physics. Part 1, Regular Papers, Short Notes & Review Papers, 44(2), 1041–1044.

By: S. Kim, H. Seo, Y. Kim, K. Kim, Y. Tak & H. Jeon

Source: NC State University Libraries
Added: August 6, 2018

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