Works (15)
Updated: July 5th, 2023 15:57
2009 conference paper
Predeposition plasma nitridation process applied to Ge substrates to passivate interfaces between crystalline-Ge substrates and Hf-based high-K dielectrics
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 27(1), 294–299.
Source: NC State University Libraries
Added: August 6, 2018
2008 journal article
Bulk defects in nano-crystalline and in non-crystalline HfO2-based thin film dielectrics
THIN SOLID FILMS, 517(1), 437–440.
author keywords: Thin film high-k dielectrics; Non-crystalline transition metal oxides; Nano-crystalline transition metal oxides; Bulk defects; Intrinsic bonding defects; Divacancies
Source: Web Of Science
Added: August 6, 2018
2008 journal article
Suppression of defect states in HfSiON gate dielectric films on n-type Ge(100) substrates
APPLIED PHYSICS LETTERS, 93(18).
author keywords: annealing; conduction bands; defect states; diffusion; ellipsometry; germanium; hafnium compounds; high-k dielectric thin films; ion-surface impact; X-ray absorption spectra
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
2007 article
Defect reduction by suppression of pi-bonding coupling in nano- and non-crystalline high-(medium)-kappa gate dielectrics
MICROELECTRONIC ENGINEERING, Vol. 84, pp. 2350–2353.
author keywords: high-/medium-kappa dielectrics; spectroscopic studies; fundamental electronic states; band edge defects
Source: Web Of Science
Added: August 6, 2018
2007 article
Intrinsic electronically active defects in transition metal elemental oxides
Lucovsky, G., Seo, H., Lee, S., Fleming, L. B., Ulrich, M. D., Luning, J., … Bersuker, G. (2007, April). JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, Vol. 46, pp. 1899–1909.
author keywords: transition metal oxides; crystal field and Jahn-Teller d-state splittings; ab initio molecular orbital theory; valence and conduction band states; intrinsic defect states; coherent pi-bonding interactions; nanocrystalline length scales of order
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
2007 article
Length scales for coherent pi-bonding interactions in complex high-k oxide dielectrics and their interfaces
MICROELECTRONIC ENGINEERING, Vol. 84, pp. 2298–2301.
author keywords: length scales of order; spectroscopic studies; nanocrystalline complex oxides and complex oxide alloys
Source: Web Of Science
Added: August 6, 2018
2007 article
Spectroscopic studies of O-vacancy defects in transition metal oxides
Lucovsky, G., Luening, J., Fleming, L. B., Ulrich, M. D., Rowe, J. E., Seo, H., … Bersuker, G. (2007, October). JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, Vol. 18, pp. S263–S266.
UN Sustainable Development Goal Categories
13. Climate Action
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
2007 article
Studies of bonding defects, and defect state suppression in HfO2 by soft X-ray absorption and photoelectron spectroscopies
Lucovsky, G., Seo, H., Fleming, L. B., Luening, J., Lysaght, P., & Bersuker, G. (2007, September 15). SURFACE SCIENCE, Vol. 601, pp. 4236–4241.
author keywords: transition metal oxides; crystal field and Jahn-Teller d-state splittings; Ab initio molecular orbital theory; intrinsic bonding states; intrinsic defect states
Source: Web Of Science
Added: August 6, 2018
2007 journal article
Suppression of Ge-O and Ge-N bonding at Ge-HfO2 and Ge-TiO2 interfaces by deposition onto plasma-nitrided passivated Ge substrates: Integration issues Ge gate stacks into advanced devices
MICROELECTRONICS RELIABILITY, 48(3), 364–369.
TL;DR:
Near edge X-ray absorption spectroscopy (NEXAS) has been used to determine nano-scale morphology of thin films of nano-crystalline transition metal (TM) elemental oxides and identifies a new and novel application for NEXAS based on the resonant character of the respective O K{sub 1} and N K{ sub 1} edge absorptions.
(via Semantic Scholar)
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018
2007 article
Total dose and bias temperature stress effects for HfSiON on Si MOS capacitors
Chen, D. K., Mamouni, E. E., Zhou, X. J., Schrimpf, R. D., Fleetwood, D. M., Galloway, K. F., … Cressler, J. D. (2007, December). IEEE TRANSACTIONS ON NUCLEAR SCIENCE, Vol. 54, pp. 1931–1937.
author keywords: alternative dielectrics; bias-temperature instability; HfSiON; nitridation; total-dose irradiation
Source: Web Of Science
Added: August 6, 2018
2006 article
Intrinsic nanocrystalline grain-boundary and oxygen atom vacancy defects in ZrO2 and HfO2
Lucovsky, G., Hinkle, C. L., Fulton, C. C., Stoute, N. A., Seo, H., & Luning, J. (2006, November). RADIATION PHYSICS AND CHEMISTRY, Vol. 75, pp. 2097–2101.
author keywords: X-ray absorption spectra; transition metal oxides; X-ray absorption spectra; Jahn-Teller splittings; conduction band edge states; grain-boundary defect states; oxygen atom vacancies; interfacial traps
Source: Web Of Science
Added: August 6, 2018
2006 article
Suppression of Jahn-Teller term-split band edge states in the x-ray absorption spectra of non-crystalline Zr silicates and Si oxynitride alloys, and alloys of ZrO2 with Y2O3
Lucovsky, G., Fulton, C. C., Ju, B. S., Stoute, N. A., Tao, S., Aspnes, D. E., & Luening, J. (2006, November). RADIATION PHYSICS AND CHEMISTRY, Vol. 75, pp. 1591–1595.
author keywords: x-ray absorption spectra; x-ray absorption spectroscopy; Jahn-Teller term-spit states; Zr silicate alloys; cubic zirconia and hafnia
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018
2005 journal article
Characterization of remote inductively coupled CH4-N-2 plasma for carbon nitride thin-film deposition
Journal of Applied Physics, 98(4).
Source: NC State University Libraries
Added: August 6, 2018
2005 journal article
Deposition and plasma measurements of Zr-oxide films with low impurity concentrations by remote PEALD
ELECTROCHEMICAL AND SOLID STATE LETTERS, 8(3), G82–G84.
Source: Web Of Science
Added: August 6, 2018
2005 journal article
Surface characteristics of indium-tin oxide cleaned by remote plasma
Japanese Journal of Applied Physics. Part 1, Regular Papers, Short Notes & Review Papers, 44(2), 1041–1044.
Source: NC State University Libraries
Added: August 6, 2018
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