Works (54)
Updated: March 28th, 2024 08:59
2022 journal article
Anelasticity in thin-shell nanolattices
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 119(38).
author keywords: anelasticity; 3D nanostructures; nanolattices; nanoindentation
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
11. Sustainable Cities and Communities
(Web of Science)
Source: Web Of Science
Added: January 23, 2023
2022 journal article
Cavity Engineering of Perovskite Distributed Feedback Lasers
ACS Photonics, 9(9), 3124–3133.
author keywords: perovskite lasers; distributed feedback lasers; cavity fabrication; cavity engineering
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 19, 2022
2021 journal article
Directional Polarized Light Emission from Thin‐Film Light‐Emitting Diodes
Advanced Materials, 33(9), 2006801.
author keywords: beam shaping; organic light-emitting diodes; perovskite light-emitting diodes; polarized light; waveguides
TL;DR:
By selectively diffracting the transverse electric (TE) waveguide mode while suppressing other optical modes in a nanostructured LED, the authors demonstrate highly directional light emission from a full-area organic LED with a small divergence angle less than 3° and a TE to transverse magnetic (TM) polarization extinction ratio of 13.6%.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Sources: Web Of Science, NC State University Libraries, Crossref
Added: February 15, 2021
2020 journal article
Active Periodic Magnetic Nanostructures with High Aspect Ratio and Ultrahigh Pillar Density
ACS APPLIED MATERIALS & INTERFACES, 12(9), 11135–11143.
author keywords: dynamic materials; active nanostructures; nanofabrication; magnetic nanoparticles; high aspect ratio
TL;DR:
Active periodic nanostructures with pillar density of 0.25 pillar/μm^2 are demonstrated, which is the highest density for magnetically actuated pillars so far, and can find potential applications in particle manipulation and tunable photonic elements.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation
(Web of Science)
11. Sustainable Cities and Communities
(Web of Science)
Source: Web Of Science
Added: March 30, 2020
2020 journal article
Efficient Energy Funneling in Quasi-2D Perovskites: From Light Emission to Lasing
ADVANCED MATERIALS, 32(16).
author keywords: amplified spontaneous emission; distributed-feedback lasers; energy funneling; light-emitting diodes; quasi-2D perovskites
TL;DR:
The results show that it is important to control the morphology of the quasi-2D films to achieve efficient energy transfer, which is a critical requirement for light-emitting devices.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science; OpenAlex)
Sources: Web Of Science, NC State University Libraries
Added: March 16, 2020
2020 journal article
Mode Dispersion in Photonic Crystal Organic Light-Emitting Diodes
ACS APPLIED ELECTRONIC MATERIALS, 2(6), 1759–1767.
author keywords: OLED; photonic crystal; optical modes; photonic band gap; light extraction
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Sources: Web Of Science, NC State University Libraries
Added: July 20, 2020
2020 journal article
Multi-layered domain morphology in relaxor single crystals with nano-patterned composite electrode
ACTA MATERIALIA, 182, 10–17.
author keywords: Piezoelectricity; Domain engineering; Single crystal; Piezoresponse force microscopy (PFM); Ferroelectric relaxor
doi.org (publisher)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: December 30, 2019
2020 journal article
Recovering cavity effects in corrugated organic light emitting diodes
OPTICS EXPRESS, 28(21), 32214–32225.
TL;DR:
It is found that the cavity effects can be partially recovered using a low index Teflon layer inserted between the ITO anode and the substrate due to the enhancement of the reflectance of the corrugated electrodes.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science; OpenAlex)
Sources: Web Of Science, NC State University Libraries
Added: November 16, 2020
2019 journal article
Enhancing optical transmission of multilayer composites using interfacial nanostructures
JOURNAL OF APPLIED PHYSICS, 126(6).
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: September 3, 2019
2019 journal article
Increasing etching depth of sapphire nanostructures using multilayer etching mask
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 37(6).
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: April 14, 2020
2019 journal article
Magnetically Actuated Dynamic Iridescence Inspired by the Neon Tetra
ACS NANO, 13(4), 4657–4666.
author keywords: dynamic iridescence; neon tetra; structural coloration; ferrofluid; magnetic nanoparticles
TL;DR:
In this method, a periodic array of magnetic nanopillars serves as a template to guide the assembly of iron oxide nanoparticles when magnetized in a liquid environment, allowing the structure to tilt about the base when the angle of the applied field is changed.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
14. Life Below Water
(OpenAlex)
Source: Web Of Science
Added: June 4, 2019
2019 review
Recent progress in near-field nanolithography using light interactions with colloidal particles: from nanospheres to three-dimensional nanostructures
[Review of ]. NANOTECHNOLOGY, 30(35).
author keywords: colloidal particles; self-assembly; nanosphere; 3D nanolithography; 3D nanostructures
TL;DR:
This review article will report recent progress in utilizing self-assembly of colloidal particles for nanolithography, outlining the underlying optical effects, review the geometries that can be fabricated, discuss key limitations, and highlight potential applications in nanophotonics, optoelectronic devices, and nanoarchitectured materials.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Source: Web Of Science
Added: July 1, 2019
2018 journal article
Atomic Layer Deposition: Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors (Adv. Mater. Interfaces 22/2018)
Advanced Materials Interfaces, 5(22), 1870109.
Sources: Crossref, NC State University Libraries
Added: January 19, 2020
2018 journal article
Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors
ADVANCED MATERIALS INTERFACES, 5(22).
author keywords: atomic layer deposition; conformal thin films; physical vapor deposition; stretchable electronics
UN Sustainable Development Goal Categories
3. Good Health and Well-being
(Web of Science)
Sources: Web Of Science, NC State University Libraries
Added: December 10, 2018
2018 article
Evaluation of Photoacoustic Transduction Efficiency of Candle Soot Nanocomposite Transmitters
Chang, W.-Y., Zhang, X. A., Kim, J., Huang, W., Bagal, A., Chang, C.-H., … Jiang, X. (2018, September). IEEE TRANSACTIONS ON NANOTECHNOLOGY, Vol. 17, pp. 985–993.
author keywords: Photoacoustic efficiency; FDTD simulation; candle soot; carbon nanoparticles; PDMS; nanocomposite
UN Sustainable Development Goal Categories
3. Good Health and Well-being
(Web of Science)
7. Affordable and Clean Energy
(OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: October 16, 2018
2018 journal article
Patterned nano-domains in PMN-PT single crystals
Acta Materialia, 143, 166–173.
author keywords: Piezoelectricity; Atomic force microscopy (AFM); Diffusion; Nanodomains; Single crystal
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
2018 journal article
Twin photonic nanojets generated from coherent illumination of microscale sphere and cylinder
Nanotechnology, 29(7), 075204.
author keywords: photonic nanojet; particle scattering; Mie theory; nanolithography
TL;DR:
This work investigates the generation of twin photonic nanojets through the illumination of a microsphere or cylinder from two coherent sources with relative phase shift, and finds the width, length, and intensity enhancement factor of the nanojet geometry are found to be functions of the phase, angle offsets, and particle geometry.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Sources: Web Of Science, Crossref
Added: August 6, 2018
2017 journal article
Enhanced total internal reflection using low-index nanolattice materials
OPTICS LETTERS, 42(20), 4123–4126.
TL;DR:
Enhanced total internal reflection (TIR) induced by integrating robust nanolattice materials with periodic architectures between high-index media is demonstrated.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
2017 journal article
Large-Area Nanolattice Film with Enhanced Modulus, Hardness, and Energy Dissipation
Scientific Reports, 7(1).
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
11. Sustainable Cities and Communities
(Web of Science)
Sources: Crossref, ORCID, NC State University Libraries, NC State University Libraries
Added: August 6, 2018
2017 journal article
Nanostructured antireflective in-plane solar harvester
OPTICS EXPRESS, 25(16), A840–A850.
TL;DR:
The demonstrated solar harvester can be potentially be widely deployed in residential and commercial buildings as multifunctional windows for solar energy harvesting, scavenging, spectra splitting, and anti-glare properties.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science; OpenAlex)
Source: Web Of Science
Added: August 6, 2018
2017 journal article
Three-dimensional colloidal interference lithography
Nanotechnology, 28(12), 125302.
author keywords: nanolithography; three-dimensional nanostructures; colloids; self-assembly; interference lithography
TL;DR:
Through the introduction of single colloidal particles, the fabrication capability of Lloyd's mirror interference can now be extended to fabrication of 3D nanostructure with complex shell geometry, which could find potential applications in the area of photonics, drug delivery, and nanofluidics.
(via Semantic Scholar)
Sources: Crossref, Web Of Science
Added: August 6, 2018
2016 journal article
Designing unit cell in three-dimensional periodic nanostructures using colloidal lithography
OPTICS EXPRESS, 24(2), A276–A284.
TL;DR:
This work investigates the design and control of the unit-cell geometry by examining the relative ratio of the illumination wavelength and colloidal nanosphere diameter, using analytical and finite-difference time-domain (FDTD) modeling.
(via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018
2016 journal article
Fabrication and design of metal nano-accordion structures using atomic layer deposition and interference lithography
NANOSCALE, 8(9), 4984–4990.
TL;DR:
This study has developed a method to fabricate and control novel complex platinum nanostructures with accordion-like profile using atomic layer deposition on lithographically patterned polymer templates.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
3. Good Health and Well-being
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018
2016 journal article
Fabrication and structural properties of AlN submicron periodic lateral polar structures and waveguides for UV-C applications
APPLIED PHYSICS LETTERS, 108(26).
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018
2016 journal article
Wicking Enhancement in Three-Dimensional Hierarchical Nanostructures
LANGMUIR, 32(32), 8029–8033.
Contributors: Z. Wang n, J. Zhao n, A. Bagal n, E. Dandley n, C. Oldham n, T. Fang n , G. Parsons n , n
TL;DR:
Enhanced wicking dynamics is demonstrated by using nanostructures with three-dimensional (3D) hierarchical features to increase the surface area while mitigating the obstruction of liquid flow.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation
(Web of Science)
11. Sustainable Cities and Communities
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018
2015 journal article
3D Nanostructures: Sculpting Asymmetric, Hollow-Core, Three-Dimensional Nanostructures Using Colloidal Particles (Small 11/2015)
Small, 11(11), 1226–1226.
Source: Crossref
Added: January 19, 2020
2015 journal article
Fabrication of three-dimensional hierarchical nanostructures using template-directed colloidal assembly
NANOSCALE, 7(10), 4406–4410.
TL;DR:
Optical effects in template-directed colloidal assembly are explored to fabricate microscale patterns with integrated three-dimensional (3D) nanostructures to enable low-cost fabrication of hierarchical devices.
(via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018
2015 journal article
Multifunctional nano-accordion structures for stretchable transparent conductors
MATERIALS HORIZONS, 2(5), 486–494.
Contributors: A. Bagal n, E. Dandley n, J. Zhao n, X. Zhang n, C. Oldham n, G. Parsons n , n
UN Sustainable Development Goal Categories
3. Good Health and Well-being
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018
2015 journal article
Ordered 3D Thin-Shell Nanolattice Materials with Near-Unity Refractive Indices
ADVANCED FUNCTIONAL MATERIALS, 25(42), 6644–6649.
Contributors: X. Zhang n, A. Bagal n, E. Dandley n, J. Zhao n, C. Oldham n, B. Wu *, G. Parsons n , n
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018
2015 journal article
Sculpting Asymmetric, Hollow-Core, Three-Dimensional Nanostructures Using Colloidal Particles
SMALL, 11(11), 1285–1292.
TL;DR:
A nanolithography technique is demonstrated based on oblique illuminations of colloidal particles to fabricate hollow-core 3D nanostructures with complex symmetry that has high pattern versatility, is low cost and high throughput, and can find potential application in nanoneedles, nanonozzles, and materials with anisotropic properties.
(via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018
2013 journal article
Antireflection effects at nanostructured material interfaces and the suppression of thin-film interference
NANOTECHNOLOGY, 24(23).
MeSH headings : Animals; Nanostructures / chemistry; Nanostructures / ultrastructure; Optical Phenomena; Polymers / chemistry; Silicon / chemistry
TL;DR:
This work describes the use of interfacial nanostructures to eliminate interference effects in thin films using the same principle inspired by moth-eye structures, and creates an effective medium where the index is gradually varying between the neighboring materials.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
2013 journal article
Fabrication of subwavelength periodic nanostructures using liquid immersion Lloyd's mirror interference lithography
OPTICS LETTERS, 38(14), 2531–2534.
TL;DR:
A liquid immersion Lloyd's mirror interference lithography system to fabricate subwavelength periodic nanostructures and successfully fabricated a grating structure with 112 nm period using a laser with 325 nm wavelength, attaining a numerical aperture of 1.45.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
9. Industry, Innovation and Infrastructure
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
2013 journal article
Study on dielectric and piezoelectric properties of 0.7 Pb(Mg1/3Nb2/3)O-3-0.3 PbTiO3 single crystal with nano-patterned composite electrode
JOURNAL OF APPLIED PHYSICS, 114(11).
TL;DR:
The results indicate that nano-patterned composite electrode and backswitching poling has a great potential in domain engineering of relaxor single crystals for advanced devices.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
2013 journal article
Three-Dimensional Nanolithography Using Light Scattering from Colloidal Particles
ACS NANO, 7(7), 6212–6218.
author keywords: nanolithography; three-dimensional nanostructures; colloids; self-assembly; light scattering
MeSH headings : Colloids / chemistry; Colloids / radiation effects; Crystallization / methods; Light; Materials Testing; Molecular Imprinting / methods; Nanostructures / chemistry; Nanostructures / radiation effects; Nanostructures / ultrastructure; Particle Size; Photography / methods
TL;DR:
The use of light scattering from colloidal particles to fabricate complex hollow nanostructures that can be used to trap nanomaterial, and they are demonstrated to have the ability to trap 50 nm silica nanoparticles.
(via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018
2012 journal article
Nanotextured Silica Surfaces with Robust Superhydrophobicity and Omnidirectional Broadband Supertransmissivity
ACS NANO, 6(5), 3789–3799.
author keywords: high aspect ratio nanostructure; wetting; antireflective; enhanced transmission; antifogging; self-cleaning
TL;DR:
A systematic approach to concurrent design of optimal structures in the fluidic and optical domains and a fabrication procedure that achieves the desired aspect ratios and periodicities with few defects and large pattern area are reported.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
2011 journal article
Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands
Applied Optics, 50(10), 1364.
TL;DR:
Measurements of the diffraction efficiency of 200-nm-period freestanding blazed transmission gratings for wavelengths in the 0.96 to 19.4 nm range show efficiencies in the range of ∼50-100% of theoretical predictions when taking the effects of the support mesh into account.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2011 journal article
From Two-Dimensional Colloidal Self-Assembly to Three-Dimensional Nanolithography
Nano Letters, 11(6), 2533–2537.
author keywords: 3D nanostructures; colloidal assembly; nanosphere lithography; phase lithography
MeSH headings : Colloids / chemistry; Nanostructures / chemistry; Nanotechnology / methods; Particle Size; Surface Properties
TL;DR:
A 3D nanolithography process that utilizes self-assembled nanospheres to create a periodic array of focal spots, which are then replicated across multiple depth in a transparent medium according to the Talbot effect is presented.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2011 journal article
Nanostructured gradient-index antireflection diffractive optics
Optics Letters, 36(12), 2354.
TL;DR:
The fabrication and characterization of a nanostructured diffractive element with near-zero reflection losses is described, and the proposed principles can be applied to improve the performance of any diffractive structures, potentially leading to more efficient Fresnel lenses, holographic elements, and integrated optical systems.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2010 journal article
Assembling nanoparticle catalysts with nanospheres for periodic carbon nanotube structure growth
Nanotechnology, 22(3), 035301.
TL;DR:
A novel method to grow carbon nanotubes in a periodic structure using a simple one-step self-assembly process that eliminates the need for lithography and material deposition, greatly reducing the fabrication complexity and cost.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2010 journal article
Design and optimization of broadband wide-angle antireflection structures for binary diffractive optics
Optics Letters, 35(7), 907.
TL;DR:
A class of antireflecting structures that can effectively suppress reflections for binary diffractive optics is proposed that may lead to more efficient diffractive devices for applications in thin-film photovoltaic, waveguide coupler, and holographic optical elements.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2010 journal article
High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths
Optics Letters, 35(15), 2615.
TL;DR:
Measurements are reported that show, for a 5000l/mm grating diffracting in the third order, a diffraction efficiency of 37.6% at a wavelength of 13.6nm.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Crossref
Added: January 19, 2020
2010 conference paper
Ultra-high Resolution Optics for EUV and Soft X-ray Inelastic Scattering
Presented at the SRI 2009, 10TH INTERNATIONAL CONFERENCE ON RADIATION INSTRUMENTATION.
Event: SRI 2009, 10TH INTERNATIONAL CONFERENCE ON RADIATION INSTRUMENTATION
author keywords: blazed gratings; multilayer EUV; soft x-rays; lithography; anisotropic etch
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Crossref
Added: February 18, 2020
2009 journal article
Self-assembled ferrofluid lithography: patterning micro and nanostructures by controlling magnetic nanoparticles
Nanotechnology, 20(49), 495301.
TL;DR:
An alternative self-assembly process to pattern different geometries with user-defined tunability across the micro and nanoscale, presenting itself as a promising nanomanufacturing tool.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2008 journal article
Design of a double-pass shear mode acousto-optic modulator
Review of Scientific Instruments, 79(3), 033104.
TL;DR:
The design of a compact double-pass shear mode acousto-optic modulator for high power operation in the UV is presented, using a spherical mirror retroreflector in the second pass to correct for beam deflection, and changes in beam position and angle during frequency tuning can be eliminated.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Crossref
Added: January 19, 2020
2008 journal article
Fabrication of 50 nm period gratings with multilevel interference lithography
Optics Letters, 33(14), 1572.
TL;DR:
A multilevel interference lithography process to fabricate 50 nm period gratings using light with a 351.1 nm wavelength that presents a general scheme for overlaying periodic structures and can be used to Fabricate more complex periodic structures.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2008 journal article
Spatial-frequency multiplication with multilevel interference lithography
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 26(6), 2135–2138.
Source: Crossref
Added: January 19, 2020
2007 journal article
Phase control in multiexposure spatial frequency multiplication
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 25(6), 2439.
TL;DR:
The authors report a technique that achieves accurate phase control over large areas during spatial frequency multiplication by utilizing a surrounding alignment grating.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2006 journal article
Describing isotropic and anisotropic out-of-plane deformations in thin cubic materials by use of Zernike polynomials
Applied Optics, 45(3), 432.
TL;DR:
Isotropic and anisotropic out-of-plane deformations induced by thin-film residual stress on thin cubic materials are studied and an analytical expression can be derived for the biaxial stiffness modulus for all directions in any given cubic crystal plane.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2006 journal article
Efficiency of a grazing-incidence off-plane grating in the soft-x-ray region
Applied Optics, 45(8), 1680.
TL;DR:
Efficiency measurements of a grazing-incidence diffraction grating in the off-plane mount were performed using polarized synchrotron radiation, offering the possibility of performing unique science studies of astrophysical, solar, and laboratory sources by exploiting the polarization sensitivity of the off -plane grating.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2006 journal article
Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating
Applied Optics, 45(8), 1676.
TL;DR:
The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile, which presents opportunities to instrument designs for high-resolution EUV spectroscopy in astrophysics where high efficiency in high orders is desirable.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
2005 journal article
Doppler writing and linewidth control for scanning beam interference lithography
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 23(6), 2640.
UN Sustainable Development Goal Categories
4. Quality Education
(OpenAlex)
Source: Crossref
Added: January 19, 2020
2004 journal article
High fidelity blazed grating replication using nanoimprint lithography
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 22(6), 3260.
Source: Crossref
Added: January 19, 2020
2003 journal article
Fabrication of sawtooth diffraction gratings using nanoimprint lithography
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 21(6), 2755.
Source: Crossref
Added: January 19, 2020
2003 journal article
Nanometer-level repeatable metrology using the Nanoruler
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 21(6), 3097.
TL;DR:
The Nanonruler’s metrology system that is based on digital frequency synthesizers, acousto-optics, and heterodyne phase sensing is presented, used to assess the fringe-to-substrate placement stability and the accuracy of the feedback signals.
(via Semantic Scholar)
Source: Crossref
Added: January 19, 2020
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