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1994 chapter
PROGRESS IN LARGE AREA SELECTIVE SILICON DEPOSITION FOR TFT LCD APPLICATIONS
In Amorphous Silicon Technology-1994 (Vol. 336, pp. 19–24). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1994BC30G00003&KeyUID=WOS:A1994BC30G00003
Contributors: J. Souk, G. Parsons , E. Schiff, M. Hack, A. Madan, M. Powell, A. Matsuda
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