Displaying all 11 works
Sorted by most recent date added to the index first, which may not be the same as publication date order.
1998 chapter
Thin film transistors fabricated with poly-Si films crystallized by microwave annealing
In Flat-Panel Display Materials-1998 (Vol. 508, pp. 139–144). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500021&KeyUID=WOS:000077248500021
Contributors: Y. Choi, J. Lee, T. Jang, B. Ahn, G. Parsons , C. Tsai, T. Fahlen, C. Seager
1998 chapter
Synthesis and characterization of luminescent ZnO powders produced by thermally-induced doping
In Flat-Panel Display Materials-1998 (Vol. 508, pp. 275–280). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500042&KeyUID=WOS:000077248500042
Contributors: B. Allieri, L. Depero, L. Sangaletti, L. Antonini, M. Bettinelli, G. Parsons , C. Tsai, T. Fahlen, C. Seager
1998 chapter
Reaction processes for low temperature (< 150 degrees C) plasma enhanced deposition of hydrogenated amorphous silicon thin film transistors on transparent plastic substrates
In Flat-Panel Display Materials-1998 (Vol. 508, pp. 19–24). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500003&KeyUID=WOS:000077248500003
Contributors: G. Parsons , C. Yang, T. Klein, L. Smith, C. Tsai, T. Fahlen, C. Seager
1998 journal article
Reaction processes for low temperature (< 150 degrees C) plasma enhanced deposition of hydrogenated amorphous silicon thin film transistors on transparent plastic substrates
Amorphous and Microcrystalline Silicon Technology-1998, 507, 19–24. http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000079335700003&KeyUID=WOS:000079335700003
Contributors: G. Parsons , C. Yang, T. Klein, L. Smith, R. Schropp, H. Branz, M. Hack, I. Shimizu, S. Wagner
1998 chapter
High conductivity gate metallurgy for TFT/LCD's
In Flat-Panel Display Materials-1998 (Vol. 508, pp. 37–46). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500006&KeyUID=WOS:000077248500006
Contributors: P. Fryer, E. Colgan, E. Galligan, W. Graham, R. Horton, L. Jenkins, R. John, Y. Kuo
1998 journal article
In-situ mass spectrometry for real-time uniformity sensing in ECR silicon dioxide etching
Journal of Vacuum Science & Technology, B(16), 2996–3002.
1998 journal article
Endpoint uniformity sensing and analysis in silicon dioxide plasma etching using in situ mass spectrometry
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 16(6), 2996–3002.
Contributors: J. Chambers*, K. Min & G. Parsons
1998 article
Silane consumption and conversion analysis in amorphous silicon and silicon nitride plasma deposition using in situ mass spectroscopy
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 16, pp. 1852–1856.
Contributors: A. Chowdhury n, T. Klein n, T. Anderson n & G. Parsons n
1998 journal article
Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon: Surface modification for controlled nucleation
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 16(3), 1316–1320.
Contributors: L. Smith n, W. Read n, C. Yang n, E. Srinivasan n, C. Courtney n, H. Lamb n, G. Parsons n
1998 journal article
Self-aligned gate and source drain contacts in inverted-staggered a-Si : H thin-film transistors fabricated using selective area silicon PECVD
IEEE ELECTRON DEVICE LETTERS, 19(6), 180–182.
Contributors: C. Yang n, W. Read n, C. Arthur n, E. Srinivasan n & G. Parsons n
1998 journal article
Hydrogen abstraction kinetics and crystallization in low temperature plasma deposition of silicon
APPLIED PHYSICS LETTERS, 72(4), 456–458.
Contributors: E. Srinivasan n & G. Parsons n
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