Works Published in 1988
Displaying all 2 works
Sorted by most recent date added to the index first, which may not be the same as publication date order.
1988 journal article
SPECTROSCOPIC EMISSION STUDIES OF O2/HE AND N2/HE PLASMAS IN REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 6(3), 1849–1854.
Contributors: D. Tsu n, G. Parsons n & G. Lucovsky n
Sources: ORCID, NC State University Libraries, NC State University Libraries
Added: August 6, 2018
1988 journal article
PROPERTIES OF INTRINSIC AND DOPED A-SI-H DEPOSITED BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 6(3), 1912–1916.
Contributors: G. Parsons n , D. Tsu n & G. Lucovsky n
pubs.aip.org (publisher PDF)
Sources: ORCID, NC State University Libraries, NC State University Libraries
Added: August 6, 2018
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