Center for Dielectrics and Piezoelectrics

Works Published in 1986

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1986 journal article

DEPOSITION OF ALPHA-SI,SN H ALLOY-FILMS BY REACTIVE MAGNETRON SPUTTERING FROM SEPARATE SI AND SN TARGETS

Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 4(3), 470–474.

By: G. Parsons* , J. Cook, G. Lucovsky, S. Lin & M. Mantini

Contributors: G. Parsons* , J. Cook, G. Lucovsky, S. Lin & M. Mantini

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: ORCID
Added: June 22, 2023

1986 journal article

Deposition of a-Si,Sn:H alloy films by reactive magnetron sputtering from separate Si and Sn targets

Journal of Vacuum Science & Technology, A(4), 470–474.

By: G. Parsons , J. Cook, G. Lucovsky, S. Lin & M. Mantini

Source: NC State University Libraries
Added: August 6, 2018

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