Center for Dielectrics and Piezoelectrics

Works Published in 2006

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Displaying all 4 works

Sorted by most recent date added to the index first, which may not be the same as publication date order.

2006 journal article

Charge generation during oxidation of thin Hf metal films on silicon

THIN SOLID FILMS, 513(1-2), 201–205.

By: T. Gougousi n, D. Terry n & G. Parsons n

Contributors: T. Gougousi n, D. Terry n & G. Parsons n

author keywords: hafmium oxide; charge defects; dielectrics; interfaces; oxidation
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2006 journal article

Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films

APPLIED PHYSICS LETTERS, 88(9).

Contributors: D. Barua n, T. Gougousi n, E. Young n & G. Parsons n

Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2006 journal article

Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures

APPLIED PHYSICS LETTERS, 89(4).

By: K. Park n & G. Parsons n

Contributors: K. Park n & G. Parsons n

Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2006 journal article

Solvent enhanced resist flow for room temperature imprint lithography

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 24(2), 818–822.

By: C. Chu n & G. Parsons n

Contributors: C. Chu n & G. Parsons n

UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

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