Displaying all 4 works
Sorted by most recent date added to the index first, which may not be the same as publication date order.
2006 journal article
Charge generation during oxidation of thin Hf metal films on silicon
THIN SOLID FILMS, 513(1-2), 201–205.
Contributors: T. Gougousi n, D. Terry n & G. Parsons n
2006 journal article
Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films
APPLIED PHYSICS LETTERS, 88(9).
Contributors: D. Barua n, T. Gougousi n, E. Young n & G. Parsons n
2006 journal article
Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures
APPLIED PHYSICS LETTERS, 89(4).
Contributors: K. Park n & G. Parsons n
2006 journal article
Solvent enhanced resist flow for room temperature imprint lithography
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 24(2), 818–822.
Contributors: C. Chu n & G. Parsons n
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