Center for Dielectrics and Piezoelectrics

Works Published in 1996

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Displaying all 4 works

Sorted by most recent date added to the index first, which may not be the same as publication date order.

1996 chapter

Inert gas dilution and ion bombardment effects in room temperature (35 degrees C) plasma deposition of a-Si:H

In Amorphous Silicon Technology - 1996 (Vol. 420, pp. 399–404). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1996BH07P00064&KeyUID=WOS:A1996BH07P00064

By: E. Srinivasan, D. Lloyd, M. Fang, G. Parsons, M. Hack, E. Schiff, S. Wagner, R. Schropp, A. Matsuda

Contributors: E. Srinivasan, D. Lloyd, M. Fang, G. Parsons, M. Hack, E. Schiff, S. Wagner, R. Schropp, A. Matsuda

Source: ORCID
Added: June 22, 2023

1996 journal article

Dynamic rate and thickness metrology during poly-Si rapid thermal chemical vapor deposition from SiH4 using real time in situ mass spectrometry (vol 14, pg 267, 1996)

Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 14(4), 2680.

By: L. Tedder n, G. Rubloff n, B. Conaghan* & G. Parsons n

Contributors: L. Tedder n, G. Rubloff n, B. Conaghan* & G. Parsons n

Source: ORCID
Added: June 22, 2023

1996 journal article

Dynamic rate and thickness metrology during poly-Si rapid thermal chemical vapor deposition from SiH4 using real time in situ mass spectrometry

Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 14(2), 267–270.

By: L. Tedder n, G. Rubloff n, B. Cohaghan* & G. Parsons n

Contributors: L. Tedder n, G. Rubloff n, B. Cohaghan* & G. Parsons n

Sources: NC State University Libraries, ORCID, NC State University Libraries
Added: August 6, 2018

1996 journal article

Ab initio calculation of hydrogen abstraction energetics from silicon hydrides

JOURNAL OF CHEMICAL PHYSICS, 105(13), 5467–5471.

By: E. Srinivasan n, H. Yang n & G. Parsons n

Contributors: E. Srinivasan n, H. Yang n & G. Parsons n

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

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