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1995 article
REAL-TIME PROCESS AND PRODUCT DIAGNOSTICS IN RAPID THERMAL CHEMICAL-VAPOR-DEPOSITION USING IN-SITU MASS-SPECTROMETRIC SAMPLING
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 13, pp. 1924–1927.
Contributors: L. Tedder n, G. Rubloff n, I. Shareef*, M. Anderle*, D. Kim n & G. Parsons n
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