Displaying all 15 works
Sorted by most recent date added to the index first, which may not be the same as publication date order.
2022 journal article
(Invited) Introduction and Overview of Area-Selective Thin Film Deposition
ECS Meeting Abstracts.
2022 journal article
In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors
Dalton Transactions, 51(5), 1838–1849.
2022 journal article
Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 21(4).
2022 journal article
The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2
JOURNAL OF APPLIED PHYSICS, 132(24).
2022 article
Toxin-Blocking Textiles: Rapid, Benign, Roll-to-Roll Production of Robust MOF-Fabric Composites for Organophosphate Separation and Hydrolysis
Morgan, S. E. E., Willis, M. L. L., Dianat, G., Peterson, G. W. W., Mahle, J. J. J., & Parsons, G. N. N. (2022, November 18). CHEMSUSCHEM, Vol. 11.
2022 journal article
Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition
APPLIED PHYSICS LETTERS, 121(8).
2022 journal article
Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(6).
2022 journal article
Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films
ACS APPLIED MATERIALS & INTERFACES, 14(37), 42232–42244.
2022 article
Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films
Hsain, H. A., Lee, Y., Lancaster, S., Materano, M., Alcala, R., Xu, B., … Jones, J. L. (2022, September 7). ACS APPLIED MATERIALS & INTERFACES, Vol. 9.
2022 article
Improving polymethacrylate EUV resists with TiO2 area-selective deposition
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX, Vol. 12055.
2022 article
Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore-scale simulation
Gu, H., Lee, D. T., Corkery, P., Miao, Y., Kim, J.-S., Yuan, Y., … Tsapatsis, M. (2022, September 7). AICHE JOURNAL, Vol. 9.
2022 journal article
Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality
APPLIED MATERIALS TODAY, 28.
2022 journal article
Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al(2)O(3 )Films br
JOURNAL OF PHYSICAL CHEMISTRY C, 126(16), 7036–7046.
2022 journal article
Green MOF-Fabrics: Benign, Scalable Sorption-Vapor Synthesis of Catalytic Composites to Protect against Phosphorus-Based Toxins
ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 10(8), 2699–2707.
2022 review
Many routes to ferroelectric HfO2: A review of current deposition methods
[Review of ]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(1).
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