Center for Dielectrics and Piezoelectrics

Works Published in 2022

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Displaying all 15 works

Sorted by most recent date added to the index first, which may not be the same as publication date order.

2022 journal article

(Invited) Introduction and Overview of Area-Selective Thin Film Deposition

ECS Meeting Abstracts.

By: G. Parsons n

Source: ORCID
Added: June 22, 2023

2022 journal article

In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors

Dalton Transactions, 51(5), 1838–1849.

By: R. Nye n, S. Wang n, S. Uhlenbrock*, J. Smythe* & G. Parsons n

TL;DR: In situ ellipsometry and quartz crystal microbalance are used to explore growth initiation and growth rate evolution during MLD of polyurea using aromatic p-phenylene diisocyanate or aliphatic 1,6-hexamethylene diisOCyanate combined with ethylenediamine or 1, 6-hexanediamine co-reactants to provide useful insight into mechanisms needed to control growth of ultra-thin organic films for advanced applications. (via Semantic Scholar)
Source: ORCID
Added: June 22, 2023

2022 journal article

Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 21(4).

author keywords: extreme ultraviolet lithography; photoresist; area-selective deposition; atomic layer deposition; TiO2; polymethacrylate
Sources: Web Of Science, NC State University Libraries
Added: March 6, 2023

2022 journal article

The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2

JOURNAL OF APPLIED PHYSICS, 132(24).

By: Y. Lee n, R. Broughton n, H. Hsain n, S. Song n, P. Edgington n, M. Horgan n, A. Dowden n, A. Bednar n ...

Sources: Web Of Science, ORCID, NC State University Libraries
Added: January 23, 2023

2022 article

Toxin-Blocking Textiles: Rapid, Benign, Roll-to-Roll Production of Robust MOF-Fabric Composites for Organophosphate Separation and Hydrolysis

Morgan, S. E. E., Willis, M. L. L., Dianat, G., Peterson, G. W. W., Mahle, J. J. J., & Parsons, G. N. N. (2022, November 18). CHEMSUSCHEM, Vol. 11.

By: S. Morgan n, M. Willis n, G. Dianat n, G. Peterson*, J. Mahle* & G. Parsons n

author keywords: inorganic chemistry; metal-organic frameworks; organophosphates; roll-to-roll; supramolecular chemistry
Sources: Web Of Science, NC State University Libraries
Added: December 5, 2022

2022 journal article

Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

APPLIED PHYSICS LETTERS, 121(8).

Sources: Web Of Science, ORCID, NC State University Libraries
Added: November 21, 2022

2022 journal article

Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(6).

By: J. Kim n, H. Oh n & G. Parsons n

Sources: Web Of Science, ORCID, NC State University Libraries
Added: October 17, 2022

2022 journal article

Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films

ACS APPLIED MATERIALS & INTERFACES, 14(37), 42232–42244.

By: H. Hsain, Y. Lee, S. Lancaster, M. Materano, R. Alcala, B. Xu, T. Mikolajick, U. Schroeder, G. Parsons, J. Jones

author keywords: Hf0.5Zr0.5O2; hafnia; zirconia; ferroelectric; orthorhombic; oxygen; texture
Sources: Web Of Science, NC State University Libraries
Added: October 11, 2022

2022 article

Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films

Hsain, H. A., Lee, Y., Lancaster, S., Materano, M., Alcala, R., Xu, B., … Jones, J. L. (2022, September 7). ACS APPLIED MATERIALS & INTERFACES, Vol. 9.

author keywords: Hf0; 5Zr0; hafnia; zirconia; ferroelectric; orthorhombic; oxygen; texture
Sources: Web Of Science, ORCID, NC State University Libraries
Added: September 26, 2022

2022 article

Improving polymethacrylate EUV resists with TiO2 area-selective deposition

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX, Vol. 12055.

author keywords: EUV lithography; Photoresist; Area-selective deposition; ALD; TiO2; Polymethacrylate
Sources: Web Of Science, NC State University Libraries
Added: September 12, 2022

2022 article

Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore-scale simulation

Gu, H., Lee, D. T., Corkery, P., Miao, Y., Kim, J.-S., Yuan, Y., … Tsapatsis, M. (2022, September 7). AICHE JOURNAL, Vol. 9.

By: H. Gu*, D. Lee*, P. Corkery*, Y. Miao*, J. Kim n, Y. Yuan*, Z. Xu*, G. Dai* ...

author keywords: atomic layer deposition; membrane; mesoporous substrate; pore constriction; zeolitic imidazolate framework
Sources: Web Of Science, ORCID, NC State University Libraries
Added: September 12, 2022

2022 journal article

Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality

APPLIED MATERIALS TODAY, 28.

By: S. Wang n, T. Pirzada n, W. Xie n, E. Barbieri n, O. Hossain n, C. Opperman n, L. Pal n, Q. Wei n, G. Parsons n, S. Khan n

author keywords: lignocellulosic biomass; Banana fiber; Gas sorption; Antibacterial matrix; MOF-fiber composites; VOC sensor
Sources: Web Of Science, NC State University Libraries
Added: June 20, 2022

2022 journal article

Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al(2)O(3 )Films br

JOURNAL OF PHYSICAL CHEMISTRY C, 126(16), 7036–7046.

By: H. Saare n, G. Dianat n & G. Parsons n

Sources: Web Of Science, ORCID, NC State University Libraries
Added: June 6, 2022

2022 journal article

Green MOF-Fabrics: Benign, Scalable Sorption-Vapor Synthesis of Catalytic Composites to Protect against Phosphorus-Based Toxins

ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 10(8), 2699–2707.

By: S. Morgan n, M. Willis n, G. Peterson*, J. Mahle* & G. Parsons n

author keywords: metal-organic frameworks; MOF-polymer composites; green chemistry; high yield; catalysis
Sources: Web Of Science, ORCID, NC State University Libraries
Added: March 28, 2022

2022 review

Many routes to ferroelectric HfO2: A review of current deposition methods

[Review of ]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(1).

Sources: Web Of Science, ORCID, NC State University Libraries
Added: December 13, 2021

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