Displaying all 4 works
Sorted by most recent date added to the index first, which may not be the same as publication date order.
2004 journal article
Postdeposition reactivity of sputter-deposited high-dielectric-constant films with ambient H2O and carbon-containing species
JOURNAL OF APPLIED PHYSICS, 95(3), 1391–1396.
Contributors: T. Gougousi n & G. Parsons n
2004 patent
Non-crystalline oxides for use in microelectronic, optical, and other applications
Washington, DC: U.S. Patent and Trademark Office.
2004 journal article
Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 22(6), 2256–2260.
Contributors: K. Park n & G. Parsons n
2004 article
Effect of N-2 plasma on yttrium oxide and yttrium-oxynitride dielectrics
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 22, pp. 445–451.
Contributors: D. Niu n, R. Ashcraft n, C. Hinkle n & G. Parsons n
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