Center for Dielectrics and Piezoelectrics

Works Published in 2001

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2001 journal article

Physical and electrical characterization of ultrathin yttrium silicate insulators on silicon

JOURNAL OF APPLIED PHYSICS, 90(2), 918–933.

By: J. Chambers n & G. Parsons n

Contributors: J. Chambers n & G. Parsons n

Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2001 journal article

Effects of surface pretreatments on interface structure during formation of ultra-thin yttrium silicate dielectric films on silicon

APPLIED SURFACE SCIENCE, 181(1-2), 78–93.

By: J. Chambers n, B. Busch*, W. Schulte*, T. Gustafsson*, E. Garfunkel*, S. Wang n, D. Maher n, T. Klein*, G. Parsons n

Contributors: J. Chambers n, B. Busch*, W. Schulte*, T. Gustafsson*, E. Garfunkel*, S. Wang n, D. Maher n, T. Klein*, G. Parsons n

author keywords: X-ray photoelectron spectroscopy; transmission electron microscopy; capacitance-voltage curve
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

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